A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.

A vibration rectification error correction device includes a first filter that operates in synchronization with the measured signal, and a second filter that operates in synchronization with the reference signal, in which the first filter generates a third signal based on a first signal having a first group delay amount and a second signal having a second group delay amount, the second filter receives a signal based on the third signal and outputs a fourth signal, and a first vibration rectification error and a second vibration rectification error have different polarities.

The present application relates to the technical field of sensors, and particularly relates to a lightning-proof piezoelectric acceleration sensor which comprises a housing, a core assembly, an insulation sheet, a shielding cover, a lightning-proof circuit board and a heat-shrinkable sleeve, the core assembly is provided inside the housing, the insulation sheet has one end fixedly connected to the core assembly and the other end fixedly connected to an inner wall of the housing, the shielding cover is sleeved outside the core assembly and has an open end oriented towards the insulation sheet, the lightning-proof circuit board is fixedly provided on an upper end of the shielding cover and is electrically connected to an external connector and the core assembly respectively, the heat-shrinkable sleeve is sleeved outside the shielding cover and has a lower end connected to the housing and an upper end situated higher than the shielding cover.

The present application relates to the technical field of sensors, and particularly relates to a lightning-proof piezoelectric acceleration sensor which comprises a housing, a core assembly, an insulation sheet, a shielding cover, a lightning-proof circuit board and a heat-shrinkable sleeve, the core assembly is provided inside the housing, the insulation sheet has one end fixedly connected to the core assembly and the other end fixedly connected to an inner wall of the housing, the shielding cover is sleeved outside the core assembly and has an open end oriented towards the insulation sheet, the lightning-proof circuit board is fixedly provided on an upper end of the shielding cover and is electrically connected to an external connector and the core assembly respectively, the heat-shrinkable sleeve is sleeved outside the shielding cover and has a lower end connected to the housing and an upper end situated higher than the shielding cover.

A system includes a microphone unit coupled to a roof of an autonomous vehicle. The microphone unit includes a microphone board having a first opening. The microphone unit also includes a first microphone positioned over the first opening and coupled to the microphone board. The microphone unit further includes an accelerometer. The system also includes a processor coupled to the microphone unit.

A 6-degree of freedom (DOF) PZT actuator-based dither stage includes a 6-DOF PZT Z-cut bimorph actuator-based stage. A net motion sensor includes a 6-DOF PZT Z-cut bimorph actuator-based stage and a PZT Z-cut bimorph actuator-based sensing cantilever coupled to the stage to detect motion. Methods to detect inertial sensor fixed offset, bias, and net motion are disclosed.

A 6-degree of freedom (DOF) PZT actuator-based dither stage includes a 6-DOF PZT Z-cut bimorph actuator-based stage. A net motion sensor includes a 6-DOF PZT Z-cut bimorph actuator-based stage and a PZT Z-cut bimorph actuator-based sensing cantilever coupled to the stage to detect motion. Methods to detect inertial sensor fixed offset, bias, and net motion are disclosed.

A piezoelectric sensor comprises a support structure, a channel extending through the support structure, a sensing material stack coupled to the support structure and extending over the channel, and a filler material disposed within the channel and over the sensing material stack. The sensing material stack comprises an structural layer, a first electrode layer disposed on the structural layer, a piezoelectric material disposed in a piezoelectric layer on the first electrode, and a second electrode disposed on the piezoelectric layer opposite the first electrode layer.

A piezoelectric sensor comprises a support structure, a channel extending through the support structure, a sensing material stack coupled to the support structure and extending over the channel, and a filler material disposed within the channel and over the sensing material stack. The sensing material stack comprises an structural layer, a first electrode layer disposed on the structural layer, a piezoelectric material disposed in a piezoelectric layer on the first electrode, and a second electrode disposed on the piezoelectric layer opposite the first electrode layer.

Disclosed is a piezoelectric washer intended for an accelerometer sensor having a ceramic body and a conductive electrode on each of two opposing faces, an electrical resistance being to be established between the two conductive electrodes. The ceramic body has, on its outer contour, a resistive path connecting the conductive electrodes to one another with a predetermined length and cross-section of the resistive path according to the resistance to be established between the two conductive electrodes.