The present invention discloses a MEMS device and electronic apparatus. The MEMS device comprises: a micro-LED; and a movable member, wherein the micro-LED is mounted on the movable member and is configured for moving with the movable member. According to an embodiment of this invention, the signal detection of a MEMS device can be simplified and/or the contents of signals produced by the MEMS device can be enriched.

Certain example implementations of the disclosed technology include an optical-interferometer sensor assembly for measuring pressure or acceleration. The sensor assembly includes a diaphragm configured to deflect responsive to an applied stimulus, a diaphragm support structure in communication with the diaphragm, a sensing optical interferometer having a first optical cavity in communication with at least a portion of the diaphragm and the diaphragm support structure, and a reference optical interferometer having a second optical cavity in communication with the diaphragm support structure. The sensor assembly can include a sensing optical fiber in communication with the sensing optical interferometer and a reference optical fiber in communication with the reference optical interferometer. The sensor assembly can include a housing in communication with the diaphragm and the diaphragm support structure, and configured to reduce a thermal expansion mismatch in the sensor assembly.

Certain example implementations of the disclosed technology include an optical-interferometer sensor assembly for measuring pressure or acceleration. The sensor assembly includes a diaphragm configured to deflect responsive to an applied stimulus, a diaphragm support structure in communication with the diaphragm, a sensing optical interferometer having a first optical cavity in communication with at least a portion of the diaphragm and the diaphragm support structure, and a reference optical interferometer having a second optical cavity in communication with the diaphragm support structure. The sensor assembly can include a sensing optical fiber in communication with the sensing optical interferometer and a reference optical fiber in communication with the reference optical interferometer. The sensor assembly can include a housing in communication with the diaphragm and the diaphragm support structure, and configured to reduce a thermal expansion mismatch in the sensor assembly.

Resonator measurement system having at least MEMS and/or NEMS, comprising: an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr and at least one optical element whose optical index is sensitive to the displacement of the resonating element, excitation circuitry of exciting the resonating element at least at one operating frequency of fm, injection device for injecting a light beam whose intensity is modulated at frequency f1=fm+Δf in the optomechanical device, a photodetection device configured measure the intensity of a light beam coming out of the optomechanical device, the intensity of the measurement beam having at least one component at frequency Δf.

Systems and methods for a time-based optical pickoff for MEMS sensors are provided. In one embodiment, a method for an integrated waveguide time-based optical-pickoff sensor comprises: launching a light beam generated by a light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; and detecting changes in an area of overlap between the coupling port and a moving sensor component separated from the coupling port by a gap by measuring an attenuation of the light beam at the optical output port, wherein the moving sensor component is moving in-plane with respect a surface of the first substrate comprising the coupling port and the coupling port is positioned to detect movement of an edge of the moving sensor component.

Systems and methods for a time-based optical pickoff for MEMS sensors are provided. In one embodiment, a method for an integrated waveguide time-based optical-pickoff sensor comprises: launching a light beam generated by a light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; and detecting changes in an area of overlap between the coupling port and a moving sensor component separated from the coupling port by a gap by measuring an attenuation of the light beam at the optical output port, wherein the moving sensor component is moving in-plane with respect a surface of the first substrate comprising the coupling port and the coupling port is positioned to detect movement of an edge of the moving sensor component.

This disclosure is related to devices, systems, and techniques for determining an acceleration. For example, an accelerometer system includes a resonator and a light-emitting device configured to generate, based on an error signal, an optical signal. Additionally, the accelerometer includes a modulator configured to receive the optical signal, generate a modulated optical signal responsive to receiving the optical signal, and output the modulated optical signal to the resonator. A photoreceiver receives a passed optical signal from the resonator, where the passed optical signal indicates a resonance frequency of the resonator. Additionally, the photoreceiver receives a reflected optical signal from the resonator. The photoreceiver generates one or more electrical signals based on the passed optical signal and the reflected optical signal. Processing circuitry generates the error signal and determines the acceleration based on the one or more electrical signals.

This disclosure is related to devices, systems, and techniques for determining an acceleration. For example, an accelerometer system includes a resonator and a light-emitting device configured to generate, based on an error signal, an optical signal. Additionally, the accelerometer includes a modulator configured to receive the optical signal, generate a modulated optical signal responsive to receiving the optical signal, and output the modulated optical signal to the resonator. A photoreceiver receives a passed optical signal from the resonator, where the passed optical signal indicates a resonance frequency of the resonator. Additionally, the photoreceiver receives a reflected optical signal from the resonator. The photoreceiver generates one or more electrical signals based on the passed optical signal and the reflected optical signal. Processing circuitry generates the error signal and determines the acceleration based on the one or more electrical signals.

An atomic interferometric accelerometer comprises a laser that emits a pulsed beam at a first frequency, an electro-optic modulator that receives the beam, and a vacuum cell in communication with the electro-optic modulator. The electro-optic modulator outputs a first optical signal corresponding to the beam at the first frequency and a second optical signal having a second frequency different from the first frequency. The vacuum cell has a chamber for laser cooled atoms. The vacuum cell receives the optical signals such that they propagate in a direction that passes through the atoms. A piezo mirror retro-reflects the optical signals back through the vacuum cell in a counter-propagating direction. The piezo mirror is driven with substantially constant velocity during a beam pulse, thereby imparting a Doppler shift to the retro-reflected optical signals to create two non-symmetric counter-propagating lightwave pairs. One of the lightwave pairs supports interferometry while the other is non-resonant.

An atomic interferometric accelerometer comprises a laser that emits a pulsed beam at a first frequency, an electro-optic modulator that receives the beam, and a vacuum cell in communication with the electro-optic modulator. The electro-optic modulator outputs a first optical signal corresponding to the beam at the first frequency and a second optical signal having a second frequency different from the first frequency. The vacuum cell has a chamber for laser cooled atoms. The vacuum cell receives the optical signals such that they propagate in a direction that passes through the atoms. A piezo mirror retro-reflects the optical signals back through the vacuum cell in a counter-propagating direction. The piezo mirror is driven with substantially constant velocity during a beam pulse, thereby imparting a Doppler shift to the retro-reflected optical signals to create two non-symmetric counter-propagating lightwave pairs. One of the lightwave pairs supports interferometry while the other is non-resonant.