A sensor element according to the present technology includes a base portion, a movable portion, first and second bridge portions, and an acceleration detector unit. The movable portion is movable relative to the base portion by reception of an acceleration along at least a uniaxial direction. The first bridge portion includes a first beam and a first structure, the first beam connects the base portion and the movable portion, the first structure being provided between the first beam and the base portion and supporting the first beam. The second bridge portion includes a second beam and a second structure, the second beam extends in a second axis direction orthogonal to the first axis and parallel to the main surface and connects the base portion and the movable portion, the second structure being provided between the second beam and the base portion and supports the second beam.

Piezoresistive detection resonant device comprising a substrate, a mobile par configured to move with respect the substrate, suspension elements suspending the mobile part to the substrate, a piezoresistive detection device to detect the motions of the mobile part, said piezoresistive detection device comprising at least one strain gauge, wherein the piezoresistive detection resonant device also comprises a folded spring with at least two spring arms, connected to the mobile part and configured to be deformed by the motion of the mobile part, the at least one gauge being suspended between the substrate and the folded spring in such manner that the deformation of the gauge is reduced compared to the motion of the mobile part.

A piezoelectric sensor comprises a support structure, a channel extending through the support structure, a sensing material stack coupled to the support structure and extending over the channel, and a filler material disposed within the channel and over the sensing material stack. The sensing material stack comprises an structural layer, a first electrode layer disposed on the structural layer, a piezoelectric material disposed in a piezoelectric layer on the first electrode, and a second electrode disposed on the piezoelectric layer opposite the first electrode layer.

The disclosure discloses an acceleration sensor, where the acceleration sensor comprises: a housing, and a mass block in the housing and connected with the housing via at least two hanging beams, where an auxiliary buffer component is further provided between the mass block and a bottom surface of the housing, and an elastic coefficient of the auxiliary buffer component decreases as force applied thereon increases.

An MEMS or NEMS accelerometer adapted to measure an acceleration along a sensing axis includes a substrate featuring a plane; a mass having a central zone and suspended relative to the substrate; a single lever arm comprising: a first end connected to the substrate by means of a first connection adapted to allow rotation of the lever arm about a rotation axis perpendicular to the sensing axis, and a second end connected to the mass by means of a second connection adapted to transmit movement in translation of the mass to the lever arm whilst allowing rotation of the lever arm about the rotation axis; the second end of the lever arm being disposed at the level of the central zone of the mass; at least one strain gauge comprising: a first end connected to the substrate, and a second end connected to the lever arm.

A sensor unit with high reliability and stable detection accuracy against vibrations of an installation target object is to be provided. A sensor unit includes: a sensor module configured including a substrate with inertial sensors mounted thereon, and an inner case in which the substrate is installed; and an outer case accommodating the sensor module. A recessed part is formed in the inner case. The inertial sensors are arranged in an area overlapping with the recessed part as viewed in a plan view seen from the direction of thickness of the substrate, and a filling member is provided to fill a space formed by the substrate and the recessed part. The sensor module is joined to a bottom wall of the outer case via a joining member.

A shaping machine or a handling apparatus for a shaping machine includes at least one measuring device for measuring the spacing of two selected points of the shaping machine or the handling apparatus. Furthermore, the at least one measuring device has at least one piezoresistive micromechanical sensor.

A control unit generates a first control signal for camera shake correction on the basis of a first acceleration detection signal, a second acceleration detection signal, and an angular velocity signal. The first acceleration detection signal including information relating to an acceleration acting on a camera and has an alternating current (AC) waveform corresponding to the acceleration. The second acceleration detection signal including information relating to the acceleration and has an output waveform. An AC component corresponding to the acceleration is superimposed on a direct current (DC) component in the output waveform. The angular velocity signal including information relating to an angular velocity acting on the camera.

A control unit generates a first control signal for camera shake correction on the basis of a first acceleration detection signal, a second acceleration detection signal, and an angular velocity signal. The first acceleration detection signal including information relating to an acceleration acting on a camera and has an alternating current (AC) waveform corresponding to the acceleration. The second acceleration detection signal including information relating to the acceleration and has an output waveform. An AC component corresponding to the acceleration is superimposed on a direct current (DC) component in the output waveform. The angular velocity signal including information relating to an angular velocity acting on the camera.

A microelectromechanical and/or nanoelectromechanical device having a fixed part, at least one suspended part configured to be moveable in the plane of the device with respect to the fixed part along at least one first direction and a first suspension means for suspending the suspended part. The first suspension means includes two suspension elements each having a first end fixed directly to the suspended part and a second end connected to the fixed part, each suspension element having a half-ellipse shape in the plane and extending between the first end and the second end, and the two suspension elements being arranged with respect to each other so as to form an ellipse.