A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.

A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.

Implementations of an accelerometer component may include: a first Z proof mass rotatable about a first axis and coupled to an anchor, the first Z proof mass including a first plurality of electrodes. Implementations may include a second Z proof mass rotatable about the first axis and coupled to the anchor, the second Z proof mass including a second plurality of electrodes. An X-axis accelerometer subcomponent may be located within a perimeter of the first Z proof mass, and a Y-axis accelerometer subcomponent may be located within a perimeter of the second Z proof mass. The first plurality of electrodes and the second plurality of electrodes may be symmetrical about each of the first axis, a second axis perpendicular to the first axis, a third axis diagonal to the first axis and second axis, and a fourth axis diagonal to the first axis and second axis.

Implementations of an accelerometer component may include: a first Z proof mass rotatable about a first axis and coupled to an anchor, the first Z proof mass including a first plurality of electrodes. Implementations may include a second Z proof mass rotatable about the first axis and coupled to the anchor, the second Z proof mass including a second plurality of electrodes. An X-axis accelerometer subcomponent may be located within a perimeter of the first Z proof mass, and a Y-axis accelerometer subcomponent may be located within a perimeter of the second Z proof mass. The first plurality of electrodes and the second plurality of electrodes may be symmetrical about each of the first axis, a second axis perpendicular to the first axis, a third axis diagonal to the first axis and second axis, and a fourth axis diagonal to the first axis and second axis.

According to one aspect of the present disclosure, a device and technique for impact detection includes a housing enclosing a mass member where the housing is configured to enable movement of the mass member from a first position to a second position within the housing in response to receipt by the housing of an acceleration event. The impact indicator also includes switch circuitry and a passive radio-frequency identification (RFID) module coupled to the switch circuitry. Responsive to movement of the mass member from the first position to the second position, the mass member causes a change in the switch circuitry where the change in the switch circuitry causes a change in a value output by the RFID module when activated.

According to one aspect of the present disclosure, a device and technique for impact detection includes a housing enclosing a mass member where the housing is configured to enable movement of the mass member from a first position to a second position within the housing in response to receipt by the housing of an acceleration event. The impact indicator also includes switch circuitry and a passive radio-frequency identification (RFID) module coupled to the switch circuitry. Responsive to movement of the mass member from the first position to the second position, the mass member causes a change in the switch circuitry where the change in the switch circuitry causes a change in a value output by the RFID module when activated.

According to one aspect of the present disclosure, a device and technique for impact detection includes a housing, switch circuitry having an omega-shaped switch element, and a mass member movable within the housing from a first position to a second position in response to receipt by the housing of an acceleration event. Movement of the mass member to the second position causes the mass member to move the switch element to change a state of a circuit condition of the switch circuitry, and the change of the state of the switch circuitry indicates receipt of the acceleration event.

According to one aspect of the present disclosure, a device and technique for impact detection includes a housing, switch circuitry having an omega-shaped switch element, and a mass member movable within the housing from a first position to a second position in response to receipt by the housing of an acceleration event. Movement of the mass member to the second position causes the mass member to move the switch element to change a state of a circuit condition of the switch circuitry, and the change of the state of the switch circuitry indicates receipt of the acceleration event.

A physical quantity sensor includes an anchor fixed to a substrate, a support beam, a fixed electrode unit, a movable body, and a damper unit. The fixed electrode unit is provided at the substrate. One end of the support beam is coupled to the anchor. The movable body includes a movable electrode unit and a frame unit. The movable electrode unit includes a movable electrode facing a fixed electrode of the fixed electrode unit. The frame unit couples the movable electrode unit and the other end of the support beam. The damper unit is coupled to the frame unit, is provided in a region surrounded by the support beam and the frame unit, and damps vibration of the frame unit in a first direction.

A physical quantity sensor includes an anchor fixed to a substrate, a support beam, a fixed electrode unit, a movable body, and a damper unit. The fixed electrode unit is provided at the substrate. One end of the support beam is coupled to the anchor. The movable body includes a movable electrode unit and a frame unit. The movable electrode unit includes a movable electrode facing a fixed electrode of the fixed electrode unit. The frame unit couples the movable electrode unit and the other end of the support beam. The damper unit is coupled to the frame unit, is provided in a region surrounded by the support beam and the frame unit, and damps vibration of the frame unit in a first direction.