G01Q10/065

FEEDBACK CORRECTION IN SUB-RESONANT TAPPING MODE OF AN ATOMIC FORCE MICROSCOPE
20190391178 · 2019-12-26 ·

A method of carrying out sub-resonant tapping in an atomic force microscope includes causing a probe that is disposed above a sample to be translated in a direction parallel to a horizontal plane defined by the sample and to oscillate in a vertical direction that is perpendicular to the horizontal plane about an equilibrium line that is separated from the horizontal plane by a vertical offset. As a result, the probe repeatedly taps a surface of the sample. Each tap begins with a first contact of the probe on the surface followed by a progressive increase in force exerted by the sample on the probe until a peak force is attained. The vertical offset is controlled by relying at least in part on a feature other than the peak force as a basis for controlling the vertical offset.

INDENTATION HEAD FOR AN INDENTATION INSTRUMENT
20240060866 · 2024-02-22 ·

An indentation head system for an indentation instrument includes: an indenter tip contacting a sample surface along at least an indentation axis; a reference element supporting the tip; a zero-level sensor generating a signal indicating whether the tip is displaced with respect to the reference element from a neutral relative position; an elastic element between the tip and an actuator with known elongation, the actuator connected to the reference element; and a controller receiving signals from the zero-level sensor to perform servo control of the actuator based on output of the zero-level sensor and the known elongation of the actuator so the zero-level sensor outputs a signal corresponding to a substantially zero displacement of the tip from the neutral relative position, the controller calculating a force applied by the tip to the sample based on an output of the displacement sensor and an elastic coefficient of the elastic element.

Method and apparatus of operating a scanning probe microscope
10502761 · 2019-12-10 · ·

An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.

ATOMIC FORCE MICROSCOPY DEVICE, METHOD AND LITHOGRAPHIC SYSTEM

An atomic force microscopy device arranged for determining sub-surface structures in a sample comprises a scan head with a probe including a flexible carrier and a probe tip arranged on the flexible carrier. Therein an actuator applies an acoustic input signal to the probe and a tip position detector measures a motion of the probe tip relative to the scan head during scanning, and provides an output signal indicative of said motion, to be received and analyzed by a controller. At least an end portion of the probe tip tapers in a direction away from said flexible carrier towards an end of the probe tip. The end portion has a largest cross-sectional area Amax at a distance Dend from said end, the square root of the largest cross-sectional area Amax is at least 100 nm and the distance Dend is in the range of 0.2 to 2 the value of said square root.

Methods, devices and systems for scanning tunneling microscopy control system design

Methods, devices, and systems for controlling a scanning tunneling microscope system are provided. In some embodiments, the methods, devices, and systems of the present disclosure utilize a control system included in or added to a scanning tunneling microscope (STM) to receive data characterizing a tunneling current between a tip of the scanning tunneling microscope system and a sample, to estimate, in real-time, a work function associated with the scanning tunneling microscope system, and to adjust, by a control system, a position of the tip based on an estimated work function. Associated systems are described herein.

HIGH-PRECISION SCANNING DEVICE

A high-precision scanning device (1) comprises a first linear scanner (11) for providing scanning movements along a first linear scanning axis (21). The first linear scanner comprises a first base frame (31), a first scanning frame (41), two mutually parallel first piezoelectric bending plates (51A, 51B), and two first hinge joints (61A, 61B) having two first hinge axes (71A, 71B), respectively. Under influence of synchronic piezoelectric operation of the two first piezoelectric bending plates, the first scanning frame is being synchronically moved relative to the first base frame along said first linear scanning axis. The scanning device is compact, especially nearby the working areas where the precise scanning movements have to be performed, so that the device can be operable in very tiny working areas.

SAMPLE CONTAINER MOUNTING MEMBER AND SAMPLE CONTAINER SEALING METHOD
20190353680 · 2019-11-21 ·

A holding member, a sample container, and a mounting member are used in a scanning probe microscope. The mounting member is made of an elastically deformable material such as a rubber material. The mounting member includes an annular main body. When the mounting member is mounted on the holding member and the sample container, the holding member is inserted into the sample container while the main body of the mounting member is elastically deformed along an outer circumferential surface of the sample container. One end of the mounting member is detached from the outer circumferential surface of the sample container, and brought into close contact with an outer circumferential surface of the holding member. When the holding member and the sample container are relatively moved, the main body of the mounting member is elastically deformed.

AUTOMATED LANDING METHOD OF A SCANNING PROBE MICROSCOPY SYSTEM AND SCANNING PROBE MICROSCOPY SYSTEM USING THE SAME
20240110939 · 2024-04-04 ·

The present disclosure relates to a method of operating an SPM system including a landing procedure. The landing procedure comprises a first landing stage including a first translation over a first actuation distance by a coarse translation means to bring a probe tip held by an SPM head from an initial separation from a substrate to be probed to a second, more proximal, separation as defined by a characteristic transitional response of the probe tip in proximity to the substrate. Following the first stage a second translation is applied, over a second actuation distance by a fine translation means under feedback control to bring the probe tip to a working separation. Prior to applying the first (coarse) actuation distance an initial optical distance is determined which is indicative of the initial separation, using a detector, preferably a mark sensor. The measured initial optical distance is related to a reference distance so as to determine a deviation. The first actuation distance corresponds the reference distance and the deviation. The disclosure also relates to an SPM system and software product arranged to implement the landing method.

Device and method for operating a bending beam in a closed control loop
11965910 · 2024-04-23 · ·

The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth greater than the bit depth of the controlled variable; and (c) at least one second interface designed to provide a manipulated variable of the at least one control loop.

Scanning probe system
11959936 · 2024-04-16 · ·

A method of scanning a sample with a scanning probe system, the scanning probe system comprising a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever, the method comprising using the probe to measure an electrostatic interaction between the sample and the probe; and after measuring the electrostatic interaction between the sample and the probe, scanning the sample with the probe while simultaneously applying a bias voltage to the scanning probe system, the applied bias voltage based on the measured electrostatic interaction between the sample and the probe.