A method and transmitter for determining voltage standing wave ratios, VSWR, of an antenna array having multiple subarrays, each subarray having two branches. According to one aspect, a method includes grouping the branches of the 5 antenna array to form a number of groups, each group being formed so that nearest branches in group are separated by at least one branch not in the group. For each group, the method includes combining reflected signals from the branches of the group to produce a first signal YREFL and combining forward signals from the 10 branches of the group to produce a second signal YFWD; calculating a reflected power PREFL and a forward power PFWD and calculating a VSWR for the group based on the reflected power PREFL and the forward power PFWD.

A method and transmitter for determining voltage standing wave ratios, VSWR, of an antenna array having multiple subarrays, each subarray having two branches. According to one aspect, a method includes grouping the branches of the 5 antenna array to form a number of groups, each group being formed so that nearest branches in group are separated by at least one branch not in the group. For each group, the method includes combining reflected signals from the branches of the group to produce a first signal YREFL and combining forward signals from the 10 branches of the group to produce a second signal YFWD; calculating a reflected power PREFL and a forward power PFWD and calculating a VSWR for the group based on the reflected power PREFL and the forward power PFWD.

A first radio frequency scan of a plurality of electronic circuit devices fixed to a structural component of a physical structure can be initiated. Data can be received from each electronic circuit device that is scanned, the data received from each electronic circuit device indicating a first measured electrical impedance of a respective conductor connected to the electronic circuit device and an identifier assigned to the electronic circuit device. For each of the plurality of electronic circuit devices that are scanned, the received data can be stored to a first memory. The data for the electronic circuit devices forms a baseline measurement of the electronic circuit devices to which impedance data gathered from subsequent radio frequency scans of the electronic circuit devices is compared to determine whether any of the conductors of the electronic circuit devices have deformed or broken.

A first radio frequency scan of a plurality of electronic circuit devices fixed to a structural component of a physical structure can be initiated. Data can be received from each electronic circuit device that is scanned, the data received from each electronic circuit device indicating a first measured electrical impedance of a respective conductor connected to the electronic circuit device and an identifier assigned to the electronic circuit device. For each of the plurality of electronic circuit devices that are scanned, the received data can be stored to a first memory. The data for the electronic circuit devices forms a baseline measurement of the electronic circuit devices to which impedance data gathered from subsequent radio frequency scans of the electronic circuit devices is compared to determine whether any of the conductors of the electronic circuit devices have deformed or broken.

A low frequency active load pull tuner allows creating and controlling the reflection factor in a different frequency range than the operation frequency. It includes an active feedback loop and a remotely controlled digital electronic tuner, wherein the electronic tuner operates at an ordinary octave wide (Fmax/Fmin=2) frequency range (i.e. as an example 1-2 GHz), which leads to a low intermediate frequency band of 6 octaves or more. All required MHz range components for the tuner, except the custom-made digital electronic tuner, are readily available.

A low frequency active load pull tuner allows creating and controlling the reflection factor in a different frequency range than the operation frequency. It includes an active feedback loop and a remotely controlled digital electronic tuner, wherein the electronic tuner operates at an ordinary octave wide (Fmax/Fmin=2) frequency range (i.e. as an example 1-2 GHz), which leads to a low intermediate frequency band of 6 octaves or more. All required MHz range components for the tuner, except the custom-made digital electronic tuner, are readily available.

An apparatus and method for performing closed-loop multiple-output control of radio frequency (RF) matching for a semiconductor wafer fabrication process is provided. An apparatus for providing signals to a station of a process chamber performs semiconductor fabrication processes. A plurality of signal generators generates signals having first and second frequencies. A measurement circuit measures a voltage standing wave ratio (VSWR). A match reflection optimizer has a reactive component configured to be adjusted responsive to an output signal from the measurement circuit.

An apparatus and method for performing closed-loop multiple-output control of radio frequency (RF) matching for a semiconductor wafer fabrication process is provided. An apparatus for providing signals to a station of a process chamber performs semiconductor fabrication processes. A plurality of signal generators generates signals having first and second frequencies. A measurement circuit measures a voltage standing wave ratio (VSWR). A match reflection optimizer has a reactive component configured to be adjusted responsive to an output signal from the measurement circuit.

Various examples are provided related to anisotropic constitutive parameters (ACPs) that can be used to launch Zenneck surface waves. In one example, among others, an ACP system includes an array of ACP elements distributed over a medium such as, e.g., a terrestrial medium. The array of ACP elements can include one or more horizontal layers of radial resistive artificial anisotropic dielectric (RRAAD) elements positioned in one or more orientations over the terrestrial medium. The ACP system can include vertical lossless artificial anisotropic dielectric (VLAAD) elements distributed over the terrestrial medium in a third orientation perpendicular to the horizontal layer or layers. The ACP system can also include horizontal artificial anisotropic magnetic permeability (HAAMP) elements distributed over the terrestrial medium. The array of ACP elements can be distributed about a launching structure, which can excite the ACP system with an electromagnetic field to launch a Zenneck surface wave.

Various examples are provided related to anisotropic constitutive parameters (ACPs) that can be used to launch Zenneck surface waves. In one example, among others, an ACP system includes an array of ACP elements distributed over a medium such as, e.g., a terrestrial medium. The array of ACP elements can include one or more horizontal layers of radial resistive artificial anisotropic dielectric (RRAAD) elements positioned in one or more orientations over the terrestrial medium. The ACP system can include vertical lossless artificial anisotropic dielectric (VLAAD) elements distributed over the terrestrial medium in a third orientation perpendicular to the horizontal layer or layers. The ACP system can also include horizontal artificial anisotropic magnetic permeability (HAAMP) elements distributed over the terrestrial medium. The array of ACP elements can be distributed about a launching structure, which can excite the ACP system with an electromagnetic field to launch a Zenneck surface wave.