An EUV collector mirror for an extreme ultra violet (EUV) radiation source apparatus includes an EUV collector mirror body on which a reflective layer as a reflective surface is disposed, a heater attached to or embedded in the EUV collector mirror body and a drain structure to drain melted metal from the reflective surface of the EUV collector mirror body to a back side of the EUV collector mirror body.

An optical device may include an enclosure including an optical aperture and a plurality of optical components positioned within the enclosure, where the plurality of optical components are to emit and/or receive light through the optical aperture. The optical device may include at least one heating element or cooling element to provide an isothermal environment to the plurality of optical components, where the at least one heating element or cooling element is thermally coupled with the enclosure.

The present specification discloses a mirror assembly having an image viewing surface which resists fogging caused by condensation of water vapor on the viewing surface and a fogless mirror system comprising such a mirror assembly and an attachment system as well as methods and uses for such mirror assembly and fogless mirror system.

An EUV collector mirror for an extreme ultra violet (EUV) radiation source apparatus includes an EUV collector mirror body on which a reflective layer as a reflective surface is disposed, a heater attached to or embedded in the EUV collector mirror body and a drain structure to drain melted metal from the reflective surface of the EUV collector mirror body to a back side of the EUV collector mirror body.

An optical element for reflecting radiation, such as EUV radiation, comprises: a substrate; a reflective coating applied to a surface of the substrate; a plurality of cooling channels, which run in the substrate below the surface on which the reflective coating is applied; a distributor for connecting at least one cooling fluid inlet to the plurality of cooling channels; and a collector for connecting the plurality of cooling channels to at least one cooling fluid outlet. The distributor and/or the collector are integrated into at least one, optionally rod-like insert component which is introduced into at least one to cavity formed in the substrate. An optical arrangement, such as an EUV lithography system, comprises: at least one optical element formed in the manner described further above; and a cooling device which is designed for the flowing of a cooling fluid through the plurality of cooling channels.

Provided is a reflector comprising: an outer wall; and an inner wall which reflects the xenon lamp light from a xenon lamp toward an object to be light sintered, and which consists of inner side walls and an inner top wall which are spaced apart by a predetermined distance from the outer wall to allow cooling water for cooling heat generated by the xenon lamp light to flow, wherein at least a part of the inner side walls has the same thickness as at least a part of the inner top wall.

An apparatus includes a base that includes a raised surface and a first opening through the raised surface. The apparatus also includes a cover configured to be coupled to the base in order to form a cavity, where the cover includes a second opening through the cover. The raised surface is configured to allow passage of a first portion of optical energy through the first opening and to reflect a second portion of the optical energy. Portions of the cover and the base surrounding the cavity are configured to absorb the reflected second portion of the optical energy. The base may further include one or more baffles positioned around the raised surface, and/or the cover may further include one or more baffles positioned around the second opening.

An isothermalized mirror assembly is a mirror structure that uses a heat pipe to isothermalize heat loads. The isothermalized mirror assembly includes at least one mirror unit and a quantity of thermally-convective fluid. The mirror unit includes a vacuum enclosure, a capillary medium, at least one reflector, and a plurality of cross supports. The vacuum enclosure is the structural base of the isothermalized mirror assembly and is used to retain a vacuum and the thermally-convective fluid. The cross supports are mounted within the vacuum enclosure and increases the structural integrity of the vacuum enclosure. The capillary medium is mounted across the interior of the vacuum enclosure and about each cross support. The capillary medium and the thermally-convective fluid work in conjunction to form a heat pipe within the vacuum enclosure. The reflector is externally mounted to the vacuum enclosure in order to redirect EM radiation.

An isothermalized mirror assembly is a mirror structure that uses a heat pipe to isothermalize heat loads. The isothermalized mirror assembly includes at least one mirror unit and a quantity of thermally-convective fluid. The mirror unit includes a vacuum enclosure, a capillary medium, at least one reflector, and a plurality of cross supports. The vacuum enclosure is the structural base of the isothermalized mirror assembly and is used to retain a vacuum and the thermally-convective fluid. The cross supports are mounted within the vacuum enclosure and increases the structural integrity of the vacuum enclosure. The capillary medium is mounted across the interior of the vacuum enclosure and about each cross support. The capillary medium and the thermally-convective fluid work in conjunction to form a heat pipe within the vacuum enclosure. The reflector is externally mounted to the vacuum enclosure in order to redirect EM radiation.

There is provided an optical scanner including: a mirror having a reflection surface for reflecting light, and a first back surface positioned at a side opposite to the reflection surface; a permanent magnet disposed at the first back surface of the mirror; a support portion that supports the mirror and has a second back surface positioned at the same side as the first back surface; a shaft portion that couples the mirror and the support portion to each other and enables the mirror to swing around a swing axis; a first member disposed at the second back surface of the support portion; a second member that supports the first member in a cantilever manner in a direction orthogonal to the swing axis and along the second back surface; a third member disposed to face the first member via the second member and coupled to the second member; and an electromagnetic coil disposed between the first member and the third member.