Integrated active cooling of high-power reflective or diffractive optics uses substrates manufactured from low-expansion ceramics to flow coolant between the back surface of the substrate and chambers behind but adjacent a reflective front surface, in a direction transverse to the front surface, to thereby achieve much greater average power handling than known cooling techniques.

A variable radius mirror includes a mirror element having a deformable face with an outer surface incorporating a reflective element. The deformable face is deformable in response to a pressure applied by a pressure medium acting on an inner surface of the deformable face. A ring extends around a perimeter of the deformable face and protrudes from the inner surface of the deformable face. The mirror element further includes at least one of a plurality of steps recessed at different depths into the inner surface of the deformable face, a cooling cavity having a pair of manifolds between the outer surface and the inner surface of the deformable face, and a sidewall of the ring having a curved inner surface and a curved outer surface.

An optical element and a lithographic apparatus including the optical element. The optical element includes a first member having a curved optical surface and a heat transfer surface, and a second member that comprises at least one recess, the at least one recess sealed against the heat transfer surface to form at least one closed channel between the first member and the second member to allow fluid to flow therethrough for thermal conditioning of the curved optical surface. In an embodiment, one or more regions of the heat transfer surface exposed to the at least one closed channel are positioned along a curved profile similar to that of the curved optical surface.

An apparatus and a method for cooling a digital micromirror device are disclosed. For example, the apparatus includes a digital micromirror device (DMD), a housing coupled to the DMD, wherein a first side of the housing is coupled to a bottom of the DMD and a cooling block coupled to a second side of the housing that is opposite the first side. The cooling block includes a plate that includes a plurality of openings, a diaphragm coupled to the plate, an air inlet to generate an airflow across the plate, wherein the diaphragm creates a force to move the airflow in a direction that is perpendicular to a direction of the airflow towards the second side of the housing, and an air outlet to collect the airflow.

The disclosure relates to an optical element, including: a substrate, a first coating, which is disposed on a first side of the substrate and is configured for reflecting radiation having a used wavelength (.sub.EUV) in the EUV wavelength range, and a second coating, which is disposed on a second side of the substrate, for influencing heating radiation that is incident on the second side of the substrate. The disclosure also relates to an optical arrangement having at least one such optical element.

There is herein described a ceramic wavelength converter having a high reflectivity reflector. The ceramic wavelength converter is capable of converting a primary light into a secondary light and the reflector comprises a reflective metal layer and a dielectric buffer layer between the ceramic wavelength converter and the reflective metal layer. The buffer layer is non-absorbing with respect to the secondary light and has an index of refraction that is less than an index of refraction of the ceramic wavelength converter. Preferably the reflectivity of the reflector is at least 80%, more preferably at least 85% and even more preferably at least 95% with respect to the secondary light emitted by the converter.

A projection exposure apparatus for semiconductor lithography includes component having a fluid channel and a device for providing a fluid for flowing through the fluid channel. The fluid channel is connected to the device via a supply line and an outgoing line. The supply line and the outgoing line are connected to one another in parallel with the fluid channel via a short circuit.

A portable heated mirror includes a mount subassembly that includes a mount housing and a mount member that is configured to releasably attach the heated mirror to a support surface. The heated mirror also includes a mirror subassembly that is pivotally attached to the mount subassembly by a ball-in-socket arrangement. The mirror subassembly includes a mirror housing that contains a mirror and a flexible heating element in the form of a flexible heat film that contains heating elements and is secured to a rear surface of the mirror for heating the mirror when the flexible heat film is actuated. A battery power source is operatively connected to a printed circuit board that is contained within the mirror housing.

A mirror assembly (32) for directing a beam (28) includes a base (450), and an optical element (454) that includes (i) a mirror (460), (ii) a stage (462) that retains the mirror (460), (iii) a mover assembly (464) that moves the stage (462) and the mirror (460) relative to the base (450), and (v) a thermally conductive medium (466) that is positioned between the stage (462) and the base (450) to transfer heat between the stage (462) and the base (450). The thermally conductive medium (466) has a thermal conductivity that is greater than the thermal conductivity of air. The thermally conductive medium (466) can include an ionic fluid or a liquid metal.

The present disclosure provides a hair removing device, including: a reflector, a light source, a first light-transmitting body, a heat dissipation base and a refrigerating member. The light source is arranged inside the reflector and can emit light. The reflector can reflect light, such that the hair removing device can emit light to remove the hair from the skin. The first light-transmitting body and the reflector cooperatively define a cavity to receive the light source. A body of the light source is suspended in the cavity. Two sides of the heat dissipation base are thermally coupled to the reflector and the refrigerating member respectively.