G02B7/1815

ROTARY IMAGING SYSTEM, PLANT IMAGER, ANIMAL IMAGER, AND ANIMAL AND PLANT IMAGER
20230263490 · 2023-08-24 ·

A rotary imaging system, a plant imager, an animal imager, and an animal and plant imager, relating to the technical field of living sample imaging. The plant imager, the animal imager, and the animal and plant imager all comprise a rotary imaging system. The rotary imaging system comprises the sample table unit is used for carrying a sample; the camera unit is used for imaging the sample; the rotation unit comprises an accommodating cavity accommodating the sample table unit, and the rotation unit is used for driving the camera unit to rotate with respect to the sample table unit and controlling the camera unit to be stationary with respect to the sample table unit. By means of rotary imaging system, powerful data support is provided for the subsequent image reconstruction and image fusion, and the number of cameras required for imaging different parts of a sample is also reduced.

INTEGRAL CONTROL SYSTEM FOR GALVANOMETER LASER LAMP
20220146082 · 2022-05-12 ·

The disclosure provides an integral control system for a galvanometer laser lamp. The system includes an integral control and drive device, a power source, and a plurality of component parts. The integral control and drive device includes a drive board, a galvanometer control module, and a laser control module. The component parts include a galvanometer motor and a laser that are respectively connected to the galvanometer control module and the laser control module. This optimizes the volume of the integral control and drive device and improves wiring between the modules, effectively reduces the volume of the entire system, and lowers the transportation and mounting costs.

Isothermal enclosure with optical aperture

An optical device may include an enclosure including an optical aperture and a plurality of optical components positioned within the enclosure, where the plurality of optical components are to emit and/or receive light through the optical aperture. The optical device may include at least one heating element or cooling element to provide an isothermal environment to the plurality of optical components, where the at least one heating element or cooling element is thermally coupled with the enclosure.

MULTI-BEAM COAXIAL LASER OPTICAL SYSTEM FOR USE IN ADDITIVE MANUFACTURING
20220134440 · 2022-05-05 ·

A feed head apparatus for laser additive manufacturing, comprising an optical housing configured to receive a laser beam and a feedstock therein, wherein the feedstock is for use in an additive manufacturing process that includes a build plate or other additive manufacturing work surface; a first reflective optic for receiving and reflecting the laser beam; and a second reflective optic for receiving laser light reflected by the first reflective optic, wherein the second reflective includes a first region of curvature for directing a portion of the laser light received from the first reflective optic onto the feedstock in a cylindrical configuration such that the feedstock and the cylinder of laser light are coaxial with regard to one another; and a second region of curvature for directing a portion of the laser light received from the first reflective optic onto the build or surface only in a ring-shaped configuration, wherein the ring of laser light surrounds the feedstock and the cylinder of laser light and is coaxial therewith.

Dual thermal control element configuration for opto-mechanical assembly

An opto-mechanical assembly includes a first thermal control element disposed on a region of a first section of an enclosure; a second thermal control element disposed on a region of a second section of the enclosure; and an optical element that includes a first portion and a second portion. The first thermal control element is configured to heat the first portion of the optical element and to cause the first portion of the optical element to be associated with a first temperature, and the second thermal control element is configured to heat the second portion of the optical element and to cause the second portion of the optical element to be associated with a second temperature. This causes a difference between the first temperature and the second temperature to satisfy a temperature difference threshold. Accordingly, this also causes a temperature gradient along an axis of the optical element to satisfy a temperature gradient threshold.

Method and device for determining the heating state of an optical element in an optical system for microlithography

A method and an apparatus for determining the heating state of an optical element in a microlithographic optical system involves at least one contactless sensor which is based on the reception of electromagnetic radiation from the optical element. The radiation range captured by the sensor is varied for the purposes of ascertaining a temperature distribution in the optical element.

FAST TEMPERATURE TUNING FOR OPTICAL RECEIVERS

A new and improved tunable optical receiver based on thermal optics and controllers for technologies that require fast wavelength channel tuning. The device entails a thermal control system in which a wavelength tunable filter, a sensor and at least two thermal actuators enables fast tuning, which are controlled by advanced algorithms. The key compositions of both parts are outlined and their main requirements are discussed

PRODUCTION METHOD AND MEASUREMENT METHOD

A method for measuring a surface shape of an optical element, wherein the optical element has a main body with a substrate and a reflective surface, and wherein at least one cooling channel for receiving a coolant is formed in the substrate, comprising: a) recording a cooling channel pressure, b) recording a measurement environment pressure, c) determining a pressure difference based on the cooling channel pressure and the measurement environment pressure, d) comparing the pressure difference with a predetermined target pressure difference, e) monitoring for a deviation between the pressure difference and the target pressure difference, wherein, if a deviation greater than a predetermined limit value is detected, the cooling channel pressure is adapted in such a way that the deviation becomes less than or equal to the predetermined limit value, and f) measuring the surface shape if the deviation is less than or equal to the predetermined limit value.

OPTICAL DEVICE WITH THERMALLY CONDUCTIVE FINGERS AND RELATED METHOD
20220121002 · 2022-04-21 ·

An optical device may include an optical body having first and second opposing sides, and passageways extending between the first and second opposing sides. The optical device includes a mirror layer carried by the optical body adjacent the second opposing side, thermally conductive fingers extending in the passageways, and a heatsink carried by the optical body adjacent the first opposing side and coupled to the thermally conductive fingers.

MIRROR, OPTICAL SYSTEM AND METHOD FOR OPERATING AN OPTICAL SYSTEM
20230305290 · 2023-09-28 ·

A mirror, such as for a microlithographic projection exposure apparatus, comprises an optical effective surface. The mirror comprises a mirror substrate and a plurality of cavities in the mirror substrate. Fluid can be applied to each cavity. A deformation is transferable to the optical effective surface by varying the fluid pressure in the cavities. Related optical systems methods are provided.