The disclosure provides a method and to an apparatus for determining the heating state of a mirror in an optical system, in particular in a microlithographic projection exposure apparatus. A method for determining the heating state of an optical element includes: measuring values of a first temperature that the optical element has at a first position using a temperature sensor; and estimating a second temperature that the optical element has at a second position, which is located at a distance from the first position, on the basis of the measured values, wherein estimating the second temperature is accomplished while taking into account a temporal change in the previously measured values.

In accordance with some embodiments, a lithography method in semiconductor manufacturing is provided. The lithography method includes transmitting a main pulse laser to a zone of excitation through a first optic assembly. The lithography method further includes supplying a coolant to the first optic assembly and detecting a temperature of the coolant with a use of at least one sensor. The lithography method also includes adjusting a heat transfer rate between the coolant and the first optic assembly based on the temperature of the first optic assembly. In addition, the lithography method includes generating a droplet of a target material into the zone of excitation. The lithography method further includes exciting the droplet of the target material into plasma with the main pulse laser in the zone of excitation.

The disclosure relates to an optical element, including: a substrate, a first coating, which is disposed on a first side of the substrate and is configured for reflecting radiation having a used wavelength (λ.sub.EUV) in the EUV wavelength range, and a second coating, which is disposed on a second side of the substrate, for influencing heating radiation that is incident on the second side of the substrate. The disclosure also relates to an optical arrangement having at least one such optical element.

An image modulating system including layers such as a formatter plate (PCB), an electrical connector plate called an interposer, a back cooling block, a front cooling frame and a reflective spatial light modulator. A cooling heat transfer channel is provided to transfer heat between the front cooling frame of the light valve and the back cooling block of the reflective spatial light modulator so as to reduce the thermal gradient between the front and back of the reflective spatial light modulator. The cooling heat transfer channel passes through any intervening layers such as the formatter plate (PCB), and/or the electrical connector plate called the interposer. The cooling heat transfer channel is preferably formed of a heat pipe or a circulating cooling medium.

A method for temperature control of a component that is transferable between a first system and a second system includes: ascertaining a temperature drift of a temperature of the component that is to be expected after transfer of the component from the first system into the second system; and modifying a temperature prevailing in the first system and/or a temperature prevailing in the second system such that the temperature drift that is actually occurring after transfer of the component from the first system into the second system is reduced with respect to the expected temperature drift.

In various embodiments, laser devices include a thermal bonding layer featuring an array of carbon nanotubes and at least one metallic thermal bonding material.

In one aspect, a transparent heat exchanger includes a first transparent substrate optically attached to a heat source, one or more fins to transfer heat from the heat source, the one or more fins comprising transparent material and further comprising one of a manifold coupled to the first transparent substrate or a facesheet coupled to the first transparent material.

A mirror support for an optical mirror and a method for producing an optical mirror are disclosed. In an embodiment a mirror support includes a mirror body comprising a diamond particle reinforced aluminum composite material and a polishing layer arranged on the mirror body, wherein a content of diamond particles in the aluminum composite material is between 5% by mass and 50% by mass inclusive and is selected such that a thermal coefficient of linear expansion of the mirror body is adapted to a thermal coefficient of linear expansion of the polishing layer.

Mounts for micro-mirrors are disclosed. A disclosed example apparatus includes a micro-mirror having a reflective surface area, and a movable mount to support and move the micro-mirror to direct light onto a printing area, where the movable mount includes a cross-sectional profile area that is at least 30% of the reflective surface area of the micro-mirror.

Integrated active cooling of high-power reflective or diffractive optics uses substrates manufactured from low-expansion ceramics to flow coolant between the back surface of the substrate and chambers behind but adjacent a reflective front surface, in a direction transverse to the front surface, to thereby achieve much greater average power handling than known cooling techniques.