An opto-mechanical apparatus including a hollow housing member having a first end and a second end, the housing member having a longitudinal axis, a parabolic mirror positioned on a side of to the first end of the housing member, and a mirror adjustment mechanism attached to the second end of the housing member, the mirror adjustment mechanism connected to the parabolic mirror through the housing member, the mirror adjustment mechanism configured to adjust an axial position of the parabolic mirror along the longitudinal axis and to adjust a radial position of the parabolic mirror about the longitudinal axis.

A magnetically drivable micromirror having an outer frame, a coil former, and torsion springs, situated in a first plane, the torsion springs having an axis of rotation, and the coil former being connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, having a mirror element that is situated in a second plane parallel to the first plane, the mirror element being connected to the coil former by an intermediate layer. A 2D scanner having a first magnetically drivable micromirror and a second drivable mirror, and to a method for producing a micromirror are also described.

An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets. A moving part includes a permanent magnet with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. An optical position sensor may direct a beam of radiation at the moving magnet through a central space between the electromagnets. The sizes of facets in a pupil mirror device may be made smaller in a peripheral region, but larger in a central region, thereby relaxing focusing requirements.

The method for controlling an angular position of a MEMS mirror, includes: applying a first driving moment to the MEMS mirror to generate a rotational scanning movement of the mirror; and, at a zooming instant, applying a second driving moment to the MEMS mirror, wherein the second driving moment is equal to the first driving moment plus an extra moment. The extra moment may be a DC offset. After a transient period of time from zooming instant, a third driving moment M.sub.2=k{dot over (θ)}.sub.2t is applied. The first and third driving moment are variable linearly with time. The driving moments are applied to torsional springs of the mirror.

Embodiments of the present disclosure include an actuator for steering mirrors with low magnetic hysteresis losses at high frequencies, with a fast step response, and without excessive heating of the steering mirror. Various embodiments of the actuator include two stators (a left stator and a right stator or an inner stator and an outer stator) and a rotor positioned between the stators. Each stator has a core assembly with one or more cores, two or more legs, and two or more faces positioned proximate to the rotor. The two or more legs are separated from one another by portions of the one or more coils. The rotor includes a core and a plurality of magnets, where each magnet has a face positioned proximate to the faces of one core assembly.

A camera module (170) includes a miniature scanning mirror (120), lens elements (163a to 163d) corresponding to thin lateral lens slices, and a short, wide imaging sensor (165). As the scanning mirror (120) pivots to scan a scene, the imaging sensor (165) captures successive image segments. Multiple image segments are stitched together by software running on a digital processor to provide a complete image. The assembly of lens elements (163a to 163d) may include moveable elements to allow variable focus, variable magnification and image stabilization, and may utilize refraction, reflection, diffraction and/or planar optical elements. The camera module (170) may be less than 5 millimeters thick while allowing long focal length lenses and increased light collecting area. Other embodiments include a switchable scan mirror with two apertures and a dual-camera system that provides binocular images and video.

Provided are a mask inspection apparatus and a mask inspection method that can prevent a reduction in a reflectance of a drop-in mirror, which is caused by carbon contaminants. A mask inspection apparatus according to the present invention includes a drop-in mirror including multi-layer film and a reflective surface. The drop-in mirror is configured to reflect illumination light incident on the reflective surface and illuminate the mask. An area of the reflective surface is configured to be greater than an area of an illuminated spot irradiated with the illumination light on the reflective surface. The drop-in mirror is configured to be movable. A position of the illuminated spot on the reflective surface is configured to be moved when the drop-in mirror is moved.

An adjustable reflector of a head-up display includes a base, a supporting frame, a control module, a pivot member, an adjusting frame and a reflecting element. A first end of the supporting frame is fixed to the base. The control module includes a flexible transmission member and a driving unit for driving the flexible transmission member to move. The pivot member is configured to move with the flexible transmission member. A first end of the adjusting frame is pivoted to the pivot member, and a second end of the adjusting frame is rotatable around the first end of the adjusting frame. A first side of the adjusting frame is slidably connected to a second end of the supporting frame. The reflecting element is arranged on a second side of the adjusting frame for reflecting a light beam generated by an image source to an optical combiner.

An optical element driving mechanism, including a movable part, a fixed part, a driving assembly, and a first supporting assembly. The movable part is for connecting an optical element. The movable part is movable relative to the fixed part. The driving assembly is for driving the movable part to move relative to the fixed part. The movable part is movable relative to the fixed part through the support of the first supporting element. The first supporting assembly is at least partially located between the movable part and the fixed part.

An optical member driving mechanism is provided, including a movable portion, a fixed portion, a first driving assembly, and a first intermediate assembly. The movable portion is configured to connect an optical member, and is movable relative to the fixed portion. The first driving assembly is configured to provide a first driving force to move the movable portion relative to the fixed portion. When the first driving assembly drives the movable portion to move relative to the fixed portion, the movable portion moves relative to the fixed portion via the first intermediate assembly.