A vehicle, a head-up displaying system and a projector are provided, the projector including a displaying component (1) configured to project an image, and a three-mirror optical device positioned in an optical path of an emergent light of the displaying component (1), configured to reflect the image projected by the displaying component (1) onto a front windshield (5) such that the front windshield (5) reflects the image to eyes of a driver and including: a zoom lens assembly (2) having a zoom lens (21) for zooming in/out the image projected by the displaying component (1), and a first curvature adjusting component configured to adjust a curvature of the zoom lens (21); an image quality compensation lens assembly (3) having an image quality compensation lens (31) configured to compensate for an image quality distortion caused during a change of the curvature of the zoom lens (21), and a second curvature adjusting component configured to adjust a curvature of the image quality compensation lens (31); and a front windshield compensation lens assembly (4) configured to compensate for an image distortion caused by the front windshield (5).

A device for measuring an aberration has an image sensor, projection optics for optically projecting onto the image sensor, an optical unit for influencing the optical projection onto the image sensor so that the result on the image sensor is a multiple image of a plurality of sub-images, wherein the optical unit has at least one region per sub-image, wherein the regions influence different lateral portions of a wavefront incident on the projection optics in different ways, and an evaluator configured to determine information relating to the aberration based on the multiple image.

A device for measuring an aberration has an image sensor, projection optics for optically projecting onto the image sensor, an optical unit for influencing the optical projection onto the image sensor so that the result on the image sensor is a multiple image of a plurality of sub-images, wherein the optical unit has at least one region per sub-image, wherein the regions influence different lateral portions of a wavefront incident on the projection optics in different ways, and an evaluator configured to determine information relating to the aberration based on the multiple image.

The invention relates to a device with a planar mirror (1), comprising a first axis of symmetry (A), and an actuating and holding means (10) with a frame (2), said frame (2) being firmly connected to the peripheral surface (1.3) of the planar mirror (1) and centrally contacting the rear surface (1.2) of the planar mirror (1). There is a socket (3), which is linearly adjustable along the axis of symmetry (A) in the frame (2) and is firmly connected, via a membrane spring (8), to the frame (2), on the one hand, and to a crown-like adjusting element (5), on the other hand. The crown-like adjusting element (5) has crown spikes which act on retaining lugs (6) connected to the planar mirror (1) and deform them, thereby applying forces corresponding to said deformation into the planar mirror (1) in order to deform the latter.

The invention relates to arrangements for actuating an element in a microlithographic projection exposure apparatus. In accordance with one aspect, an arrangement for actuating an element in a microlithographic projection exposure apparatus comprises a first number (n.sub.R) of degrees of freedom, wherein an adjustable force can be transmitted to the optical element in each of the degrees of freedom, and a second number (n.sub.A) of actuators, which are coupled to the optical element in each case via a mechanical coupling for the purpose of transmitting force to the optical element, wherein the second number (n.sub.A) is greater than the first number (n.sub.R). In accordance with one aspect, at least one of the actuators is arranged in a node of at least one natural vibration mode of the optical element.

A deformable mirror with variable curvature including: a plate having a reflective face and opposite hidden face and whose shape has a center (C) and radiuses (r), and at least one actuator intended to exert a force on the hidden face in order to deform the plate. The plate comprises a plurality of primary and secondary portions. The secondary portions being interposed between the primary portions, each of the primary portions extending locally substantially along and on either side of a respective radius (r) among said radiuses (r), and having a stiffness different from the adjacent secondary portions. The deformable mirror is intended to the introduction or the correction of an optical aberration in a light beam.

An apparatus for generating extreme ultraviolet (EUV) radiation includes a droplet generator configured to generate target droplets. An excitation laser is configured to heat the target droplets using excitation pulses to convert the target droplets to plasma. A deformable mirror is disposed in a path of the excitation laser. A controller is configured to adjust parameters of the excitation laser by controlling the deformable mirror based on a feedback parameter.

An apparatus for generating extreme ultraviolet (EUV) radiation includes a droplet generator configured to generate target droplets. An excitation laser is configured to heat the target droplets using excitation pulses to convert the target droplets to plasma. A deformable mirror is disposed in a path of the excitation laser. A controller is configured to adjust parameters of the excitation laser by controlling the deformable mirror based on a feedback parameter.

The invention relates to arrangements for actuating an element in a microlithographic projection exposure apparatus. In accordance with one aspect, an arrangement for actuating an element in a microlithographic projection exposure apparatus comprises a first number (n.sub.R) of degrees of freedom, wherein an adjustable force can be transmitted to the optical element in each of the degrees of freedom, and a second number (n.sub.A) of actuators, which are coupled to the optical element in each case via a mechanical coupling for the purpose of transmitting force to the optical element, wherein the second number (n.sub.A) is greater than the first number (n.sub.R). In accordance with one aspect, at least one of the actuators is arranged in a node of at least one natural vibration mode of the optical element.

A mirror main body (15) includes a surface (17b) of tempered glass (17) on which mirror finishing is applied and a back surface (17a) of the tempered glass (17) on which a thin film (18) which is impermeable and has low reflectance with respect to visible light is provided.