A mirror support includes a first rod in which one end is connected to an arm at a position closer to a side of a first pad fixed to the mirror with respect to a second pad fixed to the mirror while the other end stretched and inclined onto the side of first pad from the position connected is connected to a support structure; a first-rod elastic body that is an elastic body constituting the first rod; a second rod in which one end is connected to arm at a position closer to a side of second pad with respect to first pad while the other end stretched and inclined onto the side of second pad from the position connected is connected to the support structure; and a second-rod elastic body that is an elastic body constituting the second rod.

A mirror support includes a first rod in which one end is connected to an arm at a position closer to a side of a first pad fixed to the mirror with respect to a second pad fixed to the mirror while the other end stretched and inclined onto the side of first pad from the position connected is connected to a support structure; a first-rod elastic body that is an elastic body constituting the first rod; a second rod in which one end is connected to arm at a position closer to a side of second pad with respect to first pad while the other end stretched and inclined onto the side of second pad from the position connected is connected to the support structure; and a second-rod elastic body that is an elastic body constituting the second rod.

A mirror support includes a first rod in which one end is connected to an arm at a position closer to a side of a first pad fixed to the mirror with respect to a second pad fixed to the mirror while the other end stretched and inclined onto the side of first pad from the position connected is connected to a support structure; a first-rod elastic body that is an elastic body constituting the first rod; a second rod in which one end is connected to arm at a position closer to a side of second pad with respect to first pad while the other end stretched and inclined onto the side of second pad from the position connected is connected to the support structure; and a second-rod elastic body that is an elastic body constituting the second rod.

A micromechanical mirror device has: a plate-shaped mirror having a reflecting surface for reflecting light, the reflecting surface being configured to be planar; a closed frame structure supporting the plate-shaped mirror and completely framing an edge of the plate-shaped mirror; a spring arrangement having at least two spring structures arranged mirror-symmetrically and connecting the closed frame structure to a stationary support structure, the spring arrangement being configured such that the closed frame structure and the plate-shaped mirror can be brought into a resonant vibrational state with respect to the support structure; and a connecting arrangement having at least four connecting spring structures arranged mirror-symmetrically and each connecting the plate-shaped mirror to the closed frame structure; the connecting spring structures being configured to be elastically deformable and arranged such that they deform back and forth in the resonant vibrational state so that the plate-shaped mirror is partially mechanically decoupled from the closed frame structure.

A micromechanical mirror device has: a plate-shaped mirror having a reflecting surface for reflecting light, the reflecting surface being configured to be planar; a closed frame structure supporting the plate-shaped mirror and completely framing an edge of the plate-shaped mirror; a spring arrangement having at least two spring structures arranged mirror-symmetrically and connecting the closed frame structure to a stationary support structure, the spring arrangement being configured such that the closed frame structure and the plate-shaped mirror can be brought into a resonant vibrational state with respect to the support structure; and a connecting arrangement having at least four connecting spring structures arranged mirror-symmetrically and each connecting the plate-shaped mirror to the closed frame structure; the connecting spring structures being configured to be elastically deformable and arranged such that they deform back and forth in the resonant vibrational state so that the plate-shaped mirror is partially mechanically decoupled from the closed frame structure.

An optomechanical device having an interface that is mounted to another interface wherein the two interfaces are made of materials having the same or similar coefficients of thermal expansion and within the optomechanical device is an interface that is designed to compensate for the second mechanical component that is made of materials having the same or similar coefficients of thermal expansion as the optic or photonic device or instrument being held or controlled altogether with a fully constrained set of slip planes making for an optical mechanical device consisting of two or more materials that have coefficients of thermal expansion that are suitably matched to the materials it is being mounted to and the materials it is holding or controlling.

An optomechanical device having an interface that is mounted to another interface wherein the two interfaces are made of materials having the same or similar coefficients of thermal expansion and within the optomechanical device is an interface that is designed to compensate for the second mechanical component that is made of materials having the same or similar coefficients of thermal expansion as the optic or photonic device or instrument being held or controlled altogether with a fully constrained set of slip planes making for an optical mechanical device consisting of two or more materials that have coefficients of thermal expansion that are suitably matched to the materials it is being mounted to and the materials it is holding or controlling.

An optical module includes: a lens unit including a collimating lens array that collimates a plurality of beams output from a multi-emitter semiconductor laser bar including a plurality of emission points; and element units including respective optical elements disposed in front of the lens unit in a direction of propagation of the beams, in which the element units further include respective holding members that hold the respective optical elements. An orientation of a curve of the collimating lens array and orientations of curves of the optical elements are aligned with an orientation of a curve of a line connecting the plurality of emission points, and the holding members are joined by corresponding third joining members in the direction of propagation.

The present invention discloses a solar panel mirror unit (1) being shaped, such as curved, and having a sandwich structure, said sandwich structure comprising an outermost front reflecting layer (2), intended as the sun reflecting layer and therefore having a reflective coating, said outermost front reflecting layer (2) consisting of a first material having a first thermal expansion coefficient, an intermediate layer (4) having a honeycomb structure and being the core of the sandwich structure, and an innermost rear layer (5) consisting of a second material having a second thermal expansion coefficient, wherein said first and second thermal expansion coefficients are equal or substantially equal.

An optical system for a projection exposure apparatus, comprising a first component, a second component, and a fastening device used to attach the second component to the first component. The fastening device has a decoupling bushing for mechanically decoupling the second component from the first component. The decoupling bushing has a decoupling groove reducing the rigidity of the decoupling bushing.