A method adjusts a first element of a lithography apparatus toward a second element of the lithography apparatus via a tunable spacer which is arranged between the first element and the second element. The method includes: determining an actual location of the first element; determining a nominal location of the first element; unloading the tunable spacer; adjusting a height of the tunable spacer to bring the first element from the actual location to the nominal location; and loading the tunable spacer.

A scanning mirror for a laser scanning system includes a central axis, a mirror body, and a mirror surface on a front face of the mirror body. A first recess group is provided and includes a plurality of first recesses formed in the mirror body and arranged on a side of and spaced from the central axis as viewed from a back of the scanning mirror. A balancing mass is accommodated by the first recess group and includes at least one balancing body seated in at least one of the first recesses for balancing the scanning mirror. Each of the first recesses includes at least one radial stop against which the balancing body rests such that the balancing body is held in the first recess at a constant distance from the central axis. A method is also provided for balancing the scanning mirror.

A scanning mirror for a laser scanning system includes a central axis, a mirror body, and a mirror surface on a front face of the mirror body. A first recess group is provided and includes a plurality of first recesses formed in the mirror body and arranged on a side of and spaced from the central axis as viewed from a back of the scanning mirror. A balancing mass is accommodated by the first recess group and includes at least one balancing body seated in at least one of the first recesses for balancing the scanning mirror. Each of the first recesses includes at least one radial stop against which the balancing body rests such that the balancing body is held in the first recess at a constant distance from the central axis. A method is also provided for balancing the scanning mirror.

An optical module includes a mirror unit having a movable mirror portion, a magnet portion configured to generate a magnetic field acting on the movable mirror portion, and a package accommodating the magnet portion. The magnet portion has a Halbach structure including a first magnet applied with a force in a first direction, and a second magnet applied with a force in a second direction. The package has a bottom walls portion, a side wall portion, and a restriction portion configured to restrict movement of the second magnet in the second direction. The movable mirror portion is disposed in a space formed by the restriction portion.

An optical module includes a mirror unit having a movable mirror portion, a magnet portion configured to generate a magnetic field acting on the movable mirror portion, and a package accommodating the magnet portion. The magnet portion has a Halbach structure including a first magnet applied with a force in a first direction, and a second magnet applied with a force in a second direction. The package has a bottom walls portion, a side wall portion, and a restriction portion configured to restrict movement of the second magnet in the second direction. The movable mirror portion is disposed in a space formed by the restriction portion.

An optical device can deal with a relative difference in thermal expansion coefficient between a reflecting mirror and a mirror supporting member, and can also support the reflecting mirror with a simpler structure than the conventional one. The optical device includes: a reflecting mirror including a reflecting surface to reflect light, and a supported portion disposed on a rear surface and having three supported surfaces arranged with rotational symmetry of 120 degrees around an optical axis, the rear surface being a surface of the reflecting mirror existing on the contrary side to the reflecting surface; a structural member provided on a rear side of reflecting mirror; and three supporting members, each of the three supporting members including a mirror supporting portion connected to and supporting each of the three supported surfaces, and having two ends connected to the structural member.

Provided is a device for designed for use with a telescope having a primary mirror, such as a reflecting telescope, and to accurately analyzing the size of a step between paired regions of a plurality of mirror segments of the primary mirror. The device designed for use with a telescope whose primary mirror is composed of a plurality of mirror segments, and to analyze the size of a step between paired regions of the plurality of mirror segments comprises: a mask disposed in an optical axis of the primary mirror orthogonally to the optical axis at a given position where a plurality of mirror segment images as respective projected images of the plurality of mirror segments do not overlap each other, wherein a plurality of pairs of primary slits is formed at respective positions in the mirror segment images, wherein each of the primary slits are adjacent to a boundary between the paired regions of the mirror segment images and opposed and parallel to each other with a given spacing therebetween, and wherein at least one reference slit is arranged with respect to each of pairs of the primary slits in the mask, such that it extends at a given angle which is not parallel to each of the pairs of primary slits.

A manually foldable rearview device includes a head for holding at least one reflective element comprising at least one of a rearview mirror, a camera, and a display, a foot for attaching the head to a vehicle, a bearing bush connected rigidly to the foot and engaging the head for support and rotation of the head, the bearing bush including head and foot parts and a sliding disk which is connected axially displaceably to the bearing bush but not rotatably relative to the bearing bush by a suitable fixing, and a pretensioned spiral spring arranged around the bearing bush and pressing the head onto the foot.

A manually foldable rearview device includes a head for holding at least one reflective element comprising at least one of a rearview mirror, a camera, and a display, a foot for attaching the head to a vehicle, a bearing bush connected rigidly to the foot and engaging the head for support and rotation of the head, the bearing bush including head and foot parts and a sliding disk which is connected axially displaceably to the bearing bush but not rotatably relative to the bearing bush by a suitable fixing, and a pretensioned spiral spring arranged around the bearing bush and pressing the head onto the foot.

The invention comprises a hands-free, adjustable telescoping magnifying mirror. The mirror may have a first reflective surface and a second reflective surface and can be secured to a horizontal or vertical surface using a suction cup base or can be hung over a door or ledge using a retractable hanger bracket. A multi-stage telescoping rod is attached to the suction cup base and a swivel joint may be used to connect the telescoping rod to the mirror housing. The mirror may be extended from the base by extending the telescoping rod and the mirror assembly can stand freely without falling over, whether the suction cup base is engaged or not. Additionally, one or more light sources with diffuser screen may be disposed at a periphery of the first reflective surface or second reflective surface.