Patent classifications
G02B17/0605
LASER LINE ILLUMINATION USING COMBINED SINGLE-MODE AND MULTI-MODE LASER SOURCES
Systems for combining multi-mode (MM) and single-mode (SM) illumination beams of differing wavelengths together and creating a uniform, multi-wavelength laser line at a sample plane with minimal or no loss of optical power. A system includes correction optics configured to reduce the beam waist size of the MM illumination beam to substantially the same size as the beam waist size of the SM illumination beam, and beam-combining optics configured to combine the SM illumination beam and the MM illumination beam into a combined illumination beam along a first light path.
Optics for analysis of microwells
In one aspect of the present disclosure an optical measurement device includes a sample holder defining a sample plane, wherein the sample holder is configured to arrange a sample carrier including an array of measurement positions in the sample plane, an illumination unit configured to illuminate the sample plane, a detector and an optical imaging system configured to image the sample plane including the array of measurement positions onto the detector, the optical imaging system including two or more curved reflective elements adapted to image the sample plane onto the detector with a magnification of between 2:1 and 1:2 and the detector being configured to take an image of all measurement positions of the array of measurement positions at a time.
SWITCHABLE REFLECTIVE CIRCULAR POLARIZER IN HEAD-MOUNTED DISPLAY
Disclosed herein are techniques for displaying images on multiple image planes in a near-eye display system. A switchable optical device includes a first polarizer configurable to polarize incident light into light of a first circular polarization state, and a second polarizer configurable to transmit light of a second circular polarization state and reflect light of the first circular polarization state into light of the first circular polarization state. The switchable optical device also includes a partial reflector positioned between the first polarizer and the second polarizer. The partial reflector is configured to transmit light from the first polarizer and reflect light from the second polarizer, where the reflected light and the light from the second polarizer have different polarization states. At least one of the first polarizer or the second polarizer includes a cholesteric liquid crystal (CLC) circular polarizer that is switchable by a voltage signal.
OPTICAL ASSEMBLY FOR GUIDING AN OUTPUT BEAM OF A FREE ELECTRON LASER
An optical assembly guides an output beam of a free electron laser to a downstream illumination-optical assembly of an EUV projection exposure apparatus. The optical assembly has first and a second GI mirrors, each with a structured reflection surface to be impinged upon by the output beam. A first angle of incidence on the first GI mirror is between one mrd and 10 mrad. A maximum first scattering angle is produced, amounting to between 50% and 100% of the first angle of incidence. A second angle of incidence on the second GI mirror is at least twice as large as the first angle of incidence. A maximum second scattering angle of the output beam amounts to between 30% and 100% of the second angle of incidence. The two planes of incidence on the two GI mirrors include an angle with respect to one another that is greater than 45.
INFORMATION DISPLAY APPARATUS
A head-up display apparatus includes a display panel configured to display an image, and a reflecting mirror configured to reflect light from the display panel. An optical distance between the reflecting mirror and the display panel is changed to continuously change a display position of a virtual image from a distant place to an adjacent position such that a virtual image obtained by being reflected at an upper portion of a windshield is formed farther than a virtual image obtained by being reflected at a lower portion of the windshield when viewed from a viewpoint position of a driver.
Projection optical system, exposure apparatus, and device manufacturing method
There is provided a projection optical system that projects an image of an object onto an image plane. The projection optical system includes an imaging optical system including a first concave mirror, a convex mirror, and a second concave mirror; an optical member having a first reflecting surface and a second reflecting surface each redirecting an optical path; and a supporting member that supports the convex mirror. The first reflecting surface, the first concave mirror, the convex mirror, the second concave mirror, and the second reflecting surface are provided in that order in a direction of travel of light from an object plane. The optical member has a through hole having an opening on a side facing the convex mirror. The supporting member extends through the through hole and from the opening to the convex mirror.
Switchable reflective circular polarizer in head-mounted display
Disclosed herein are techniques for displaying images on multiple image planes in a near-eye display system. A switchable optical device includes a first polarizer configurable to polarize incident light into light of a first circular polarization state, and a second polarizer configurable to transmit light of a second circular polarization state and reflect light of the first circular polarization state into light of the first circular polarization state. The switchable optical device also includes a partial reflector positioned between the first polarizer and the second polarizer. The partial reflector is configured to transmit light from the first polarizer and reflect light from the second polarizer, where the reflected light and the light from the second polarizer have different polarization states. At least one of the first polarizer or the second polarizer includes a cholesteric liquid crystal (CLC) circular polarizer that is switchable by a voltage signal.
Lens array and image display device incorporating the same
An image display device includes a light source, an imaging element to form an image with a light beam from the light source, and a lens array illuminated with the light beam forming the image for image display, in which lenses are arranged closely to each other. In which in the lens array a curvature radius of a surface of a border of neighboring lenses is set to be smaller than a wavelength of the light beam.
Eye tracking for a head mounted display including a pancake lens block
A head-mounted display (HMD) includes a pancake lens block, an eye tracking system, and an electronic display. The electronic display is coated with a dichroic film that transmits visible light and reflects infrared light (IR). An IR emitter illuminates an eye of the user, and infrared light is reflected from an eye through the pancake lens block and is incident on the dichroic film. The reflected light undergoes multiple reflections before being captured by an image capturing element of the eye tracking system that is positioned at a periphery of HMD located off-axis relative to an optical axis of the pancake lens block.
Magnifying imaging optical unit and EUV mask inspection system with such an imaging optical unit
A magnifying imaging optical unit serves for inspecting lithography masks which are used in EUV projection exposure. The imaging optical unit comprises at least two mirrors (M1 to M4) which can be displaced relative to one another for changing a magnification value. According to a further aspect, a magnifying imaging optical unit comprises at least one mirror (M1 to M4) and a magnification value, which can be changed by displacement of at least two mirrors (M1 to M4) relative to one another. Here, the magnification value can be changed between a minimum magnification value, which is greater than 100, and a maximum magnification value, which is greater than 200. An imaging optical unit emerges, which can be adapted to, in particular, mask structures with different sizes.