A telescope includes a primary mirror, a secondary mirror configured to move along a first axis, and a tertiary mirror configured to move along a second axis. The secondary and tertiary mirrors are configured to move along respective axes in a synchronized manner to focus a beam of electromagnetic radiation from the primary mirror. The telescope further may include an anamorphic deformable mirror configured to achieve wavefront control and correction of optical aberrations. The telescope further may include a first linear actuator configured to move the secondary mirror along the first axis and a second linear actuator configured to move the tertiary mirror along the second axis.

A telescope includes a primary mirror, a secondary mirror configured to move along a first axis, and a tertiary mirror configured to move along a second axis. The secondary and tertiary mirrors are configured to move along respective axes in a synchronized manner to focus a beam of electromagnetic radiation from the primary mirror. The telescope further may include an anamorphic deformable mirror configured to achieve wavefront control and correction of optical aberrations. The telescope further may include a first linear actuator configured to move the secondary mirror along the first axis and a second linear actuator configured to move the tertiary mirror along the second axis.

An inspection device according to the present disclosure includes a spheroidal mirror configured to reflect illumination light as convergent light, a plane mirror configured to reflect the illumination light incident as the convergent light and cause the reflected illumination light to be incident on an object of inspection as incident light, a projection optical system configured to focus reflected light of the incident light reflected by the object of inspection, and a detector configured to detect reflected light focused by the projection optical system, wherein an angle of incidence of an incident optical axis being an optical axis of the incident light on the object of inspection is greater than 6 [deg], an angle of reflection of a reflected optical axis being an optical axis of the reflected light on the object of inspection is greater than 6 [deg].

An apparatus includes multiple optical elements arranged along an optical path between an entrance aperture and an exit aperture, configured to image an object at infinity to an image at infinity and defining an exit pupil for light at the exit aperture, the image have a magnification, M, in a range from 7× to 15χ. The optical elements include four non-planar mirrors. The apparatus also includes a connector configured to attach the apparatus to a mobile device having a camera with the exit pupil of the plurality of optical elements aligned with an entrance pupil of the camera of the mobile device.

A freeform folded optical system that include two freeform prisms with optical power. At least one of the freeform prisms is configured to fold the optical axis twice. Thus, embodiments of the freeform folded optical system fold the optical axis three or four times. Folding the optical axis three or four times in the freeform prisms allows for long focal lengths required for telephoto lens applications without requiring additional lens elements between the prisms. In addition, the configuration of the freeform folded optical system provides reduced Z-axis height when compared to conventional folded lens systems with similar optical characteristics.

The present disclosure provides an optical imaging lens assembly including, sequentially from an object side to an image side along an optical axis, a first lens having refractive power; a second lens having refractive power; and a third lens having refractive power. A distance BFL along the optical axis from an image-side surface of the third lens of the optical imaging lens assembly to an imaging plane of the optical imaging lens assembly and a distance Td along the optical axis from an object-side surface of the first lens to the image-side surface of the third lens satisfy: 4.5BFL/Td7.0.

Optical system includes a front group, light-shielding member, and rear group that are arranged in this order in direction from object side toward image side. The light-shielding member is provided with opening elongated in first direction. The front group does not image the object at the opening in first section parallel to the first direction and forms intermediate image of the object at the opening in second section perpendicular to the first direction. The rear group has diffractive surface that splits light beam that passes through the opening into light beams at different wavelengths in the second section and focuses the light beams on different locations in the second section. Light beam that is emitted from the front group 11 and that enters the opening is non-parallel light in the first section.

Optical system includes front group, light-shielding member, and rear group that are arranged in direction from object side toward image side. The light-shielding member is provided with opening elongated in first direction. The front group does not image the object at the opening in first section parallel to the first direction and forms intermediate image of the object at the opening in second section perpendicular to the first direction. The rear group has diffractive surface that splits light beam that passes through the opening into light beams at different wavelengths in the second section and focuses the light beams on different locations in the second section. F-number for the side of the image in the first section differs from an F-number for the side of the image in the second section.

Optical system includes front group, light-shielding member, and rear group that are arranged in this order in direction from object side toward image side. The light-shielding member is provided with opening elongated in first direction. The front group has aspherical surfaces, does not image the object at the opening in first section parallel to the first direction, and forms intermediate image of the object at the opening in second section perpendicular to the first direction. The rear group has diffractive surface that splits light beam that passes through the opening into light beams at different wavelengths in the second section and focuses the light beams on different locations in the second section. Tilt angles of the aspherical surfaces in the second section change in the first direction.

A catoptric system having a reference axis and including a reflective pattern-source (carrying a substantially one-dimensional pattern) and a combination of only three optical components disposed sequentially to transfer EUV radiation incident the first optical component onto the pattern-source. The combination is disposed in a fixed spatial and optical relationship with respect to the pattern-source, and represents an illumination unit (IU) of a 1D EUV exposure tool that additionally includes a projection optic sub-system configured to form an optical image of the pattern-source on an image plane with the use of only two beams of radiation. These only two beams of radiation originate at the pattern-source from the EUV radiation transferred onto the pattern-source.