A catoptric system having a reference axis and including a reflective pattern-source (carrying a substantially one-dimensional pattern) and a combination of only three optical components disposed sequentially to transfer EUV radiation incident the first optical component onto the pattern-source. The combination is disposed in a fixed spatial and optical relationship with respect to the pattern-source, and represents an illumination unit (IU) of a 1D EUV exposure tool that additionally includes a projection optic sub-system configured to form an optical image of the pattern-source on an image plane with the use of only two beams of radiation. These only two beams of radiation originate at the pattern-source from the EUV radiation transferred onto the pattern-source.

A virtual image display apparatus includes a display device (image forming unit), a lens configured to refract imaging light from the display device, a first mirror member configured to reflect imaging light that passed through the lens, a second mirror member configured to reflect the imaging light reflected by the first mirror member, and a third mirror member of a transmissive type configured to reflect the imaging light reflected by the second mirror member toward a position of an exit pupil. The lens is asymmetric with respect to an optical axis in a first direction corresponding to an eccentric direction defined by the first mirror member and the second mirror member, and is symmetric, across the optical axis, with respect to a second direction orthogonal to the first direction.

An optical system (L0) that forms an image of an object and that includes an aperture stop (SP), a first reflection surface (R2), and a second reflection surface (R3) which are disposed in order from an enlargement side to a reduction side, an area of the first reflection surface is larger than an area of the second reflection surface, a reference axis is a path of a reference ray that passes through an opening center of the aperture stop to reach a center of a reduction plane, and an angle QPR (deg) between a line segment PQ connecting the opening center P and an intersection Q of the reference axis and the first reflection surface, and a line segment PR connecting the opening center P and an intersection R of the reference axis and the second reflection surface satisfies a predetermined condition.

A freeform folded optical system that include two freeform prisms with optical power. At least one of the freeform prisms is configured to fold the optical axis twice. Thus, embodiments of the freeform folded optical system fold the optical axis three or four times. Folding the optical axis three or four times in the freeform prisms allows for long focal lengths required for telephoto lens applications without requiring additional lens elements between the prisms. In addition, the configuration of the freeform folded optical system provides reduced Z-axis height when compared to conventional folded lens systems with similar optical characteristics.

An imaging optical system includes, in order from an enlargement conjugate side to a reduction conjugate side, a first mirror as a convex mirror, a first lens unit, a second mirror as a concave mirror, a third mirror as a concave mirror, and a second lens unit. The imaging optical system is configured to form a first intermediate real image and a second intermediate real image located at a position different from that of the first intermediate real image between the first mirror and a reduction side conjugate plane.

A light guide member includes three surfaces of a second surface, a fourth surface, and a fifth surface as two or more non-axisymmetric curved surfaces, and a projection lens includes a lens surface as a non-axisymmetric aspheric surface. With this, on the light guide member side, even when there is a shape constraint that the first surface or the third surface which is a surface contributing to light guide is a flat surface, and correction of asymmetric aberration is limited, it becomes possible to perform sufficient aberration correction as the whole of an optical system including the projection lens. Therefore, the virtual image display apparatus can have a wide viewing angle and high performance, and can be made small and lightweight.

Optical system includes front group, light-shielding member, and rear group that are arranged in this order in direction from object side toward image side. The light-shielding member is provided with opening elongated in first direction. The front group has aspherical surfaces, does not image the object at the opening in first section parallel to the first direction, and forms intermediate image of the object at the opening in second section perpendicular to the first direction. The rear group has diffractive surface that splits light beam that passes through the opening into light beams at different wavelengths in the second section and focuses the light beams on different locations in the second section. Tilt angles of the aspherical surfaces in the second section change in the first direction.

Disclosed systems and methods for the remote detection of atmospheric gas may include (1) receiving, at a collector, thermal infrared energy from at least one atmospheric column, (2) receiving, at optical subsystems, the thermal infrared energy over optical paths, (3) focusing the thermal infrared energy onto diffraction gratings that disperse the thermal infrared energy at a wavelength within a mid-wavelength infrared (MWIR) spectral region and a wavelength within a long-wavelength infrared (LWIR) spectral region, (4) receiving, at detectors, the thermal infrared energy dispersed from the diffraction gratings within the MWIR spectral region and the LWIR spectral region, (5) determining spectral component data associated with the thermal infrared energy in the MWIR spectral region and the LWIR spectral region, (6) sending the spectral component data to a computing device, and (7) identifying an atmospheric gas based on the spectral component data.

The image display apparatus includes an optical system causing a light flux entering from an original image through an entrance surface to reflect at a part of reflective surfaces, causing the reflected light flux to form an intermediate image, and then causing the light flux to reflect at another part of the reflective surfaces and exit from an exit surface toward an exit pupil located in a first direction. The optical element includes a first optical portion, a second optical portion provided in a second direction orthogonal to the first direction with respect to the first optical portion, and a connection portion to be connected to a holding portion provided in the apparatus. The connection portion is formed on a side face of the first optical portion so as to be included within a maximum width of the second optical portion.

A freeform folded optical system that include two freeform prisms with optical power. At least one of the freeform prisms is configured to fold the optical axis twice. Thus, embodiments of the freeform folded optical system fold the optical axis three or four times. Folding the optical axis three or four times in the freeform prisms allows for long focal lengths required for telephoto lens applications without requiring additional lens elements between the prisms. In addition, the configuration of the freeform folded optical system provides reduced Z-axis height when compared to conventional folded lens systems with similar optical characteristics.