A scalable parabolic or disc shaped mirror, that is formed and maintained by inflating, with air or inert gas, a rigid polymer membrane envelope, that is pre-formed, and such that when inflated, forms this parabolic or disc shape, governed by a center supporting pole, and ring around circumference of the mirror. The top half of the ballooned envelope is made of a clear transparent membrane through which the sun's rays pass through and on to the lower inner lower surface, which is coated with reflective surface. The balloon is skewered through the middle of each membrane, and clamped with flanges to hermetically seal the envelope. The pole or center structure is anchored and hinged at the base so the Pneumatic Mirror can be articulated to face towards the sun, thus focussing the energy to whatever device is at the focal point.

A microscope for examining a specimen configured to receive a first light source or a second light source. The first light source being configured to emit a first output light through a first pupil, and the second light source being configured to emit a second output light through a second pupil that is different than the first pupil. The microscope comprises a frame, a source objective, and first and second optical assemblies. The first and second optical assemblies are removably connectable to the frame. The first optical assembly comprises a first set of optical elements that are configured to pass the first output light to an imaging pupil of the source objective, and the second optical assembly comprises a second set of optical elements configured to pass the second output light to the imaging pupil.

A diffusive ultraviolet illuminator is provided. The illuminator can include a reflective mirror and a set of ultraviolet radiation sources located within a proximity of the focus point of the reflective mirror. The ultraviolet radiation from the set of ultraviolet radiation sources is directed towards a reflective surface located adjacent to the illuminator. The reflective surface can diffusively reflect at least 30% the ultraviolet radiation and the diffusive ultraviolet radiation can be within at least 40% of Lambertian distribution. A set of optical elements can be located between the illuminator and the reflective surface in order to direct the ultraviolet radiation towards at least 50% of the reflective surface.

A luminaire (500) comprising a linearly polarized light source (200) and a collimating reflector (301) arranged to collimate light from the light source towards an optical axis OA. The reflective inner surface of the reflector comprises at least one set of grooves (306), or four spaced zones of grooves, which each extend in a respective plane including the optical axis. Each groove comprises two flat side surfaces to cause light from the light source to undergo a double reflection in the groove, to avoid rotation of each beamlet and thus to reduce loss of imaging of the source. This partly preserves the linear polarization of the source, for use in reducing glare in displays or from lights on the road, or enhancing sparkle for illuminating jewellery.

A solar concentrator assembly can include mirror assemblies that are connected to pivotable frames with locating connections. The locating connections can be in the form of cam devices or tool-less connections formed by snap fitting devices as well as tool-less cam devices.

A light-concentrating lens assembly for a solar energy system, the assembly comprising a plurality of concentrically arranged paraboloid mirror reflectors, a conical light guide extending below the plurality of paraboloid mirror reflectors, an inner central cone disposed along a central axis of the concentrically arranged paraboloid mirror reflectors, and a compound paraboloid concentrator disposed beneath the inner central cone.

A general method is provided for electronically reconfiguring the internal structure of a solid to allow precision control of the propagation of wave energy. The method allows digital or analog control of wave energy, such as but not limited to visible light, while maintaining low losses, a multi-octave bandwidth, polarization independence, large area and a large dynamic range in power handling. Embodiments of the technique are provided for large-angle beam steering, lenses and other devices to control wave energy.

An extreme ultraviolet (EUV) collector inspection apparatus and method capable of precisely inspecting a contamination state of an EUV collector and EUV reflectance in accordance with the contamination state are provided. The EUV collector inspection apparatus includes a light source arranged in front of an EUV collector to be inspected and configured to output light in a visible light (VIS) band from UV rays, an optical device configured to output narrowband light from the light, and a camera configured to perform imaging from an UV band to a VIS band. An image by wavelength of the EUV collector is obtained by using the optical device and the camera and a contamination state of the EUV collector is inspected.

A light source measurement apparatus includes an objective lens that collects light emitted from a light source having a plurality of light emission points, a first reflection attenuation filter, a second reflection attenuation filter, a condensing lens, a space filter, and a movable stage, in which the first reflection attenuation filter and the second reflection attenuation filter are disposed such that polarization directions are orthogonal to each other, in which the space filter has an opening through which light emitted from a measurement target light emission point among the plurality of light emission points is transmitted, and in which the opening has a shape in which a dimension of the measurement target light emission point in a fast direction is larger than a dimension of the measurement target light emission point in a slow direction.

Beam guiding devices for guiding a laser beam, in particular in a direction towards a target region for producing extreme ultraviolet (EUV) radiation, include an adjustment device for adjusting a beam diameter and an aperture angle of the laser beam. The adjustment device includes a first mirror having a first curved reflecting surface, a second mirror having a second curved reflecting surface, a third mirror having a third curved reflecting surface, a fourth mirror having a fourth curved reflecting surface, and a movement device configured to adjust the beam diameter and the aperture angle of the laser beam by moving the first reflecting surface and the fourth reflecting surface relative to one another and, independently thereof, moving the second reflecting surface and the third reflecting surface together relative to the first reflecting surface and the fourth reflecting surface.