A system for optical imaging of defects on unpatterned wafers that includes an illumination module, relay optics, a segmented polarizer, and a detector. The illumination module is configured to produce a polarized light beam incident on a selectable area of an unpatterned wafer. The relay optics is configured to collect and guide, radiation scattered off the area, onto the polarizer. The detector is configured to sense scattered radiation passed through the polarizer. The polarizer includes at least four polarizer segments, such that (i) boundary lines, separating the polarizer segments, are curved outwards relative to a plane, perpendicular to the segmented polarizer, unless the boundary line is on the perpendicular plane, and (ii) when the area comprises a typical defect, a signal-to-noise ratio of scattered radiation, passed through the polarizer segments, is increased as compared to when utilizing a linear polarizer.

A microscope unit comprises: a main lens barrel of an imaging optical system; and an illumination lens barrel of an illumination optical system connected to the main lens barrel, the illumination optical system having: a collector lens that collects light that has been irradiated from a light source; a fly-eye lens allowing to be transmitted therethrough light from the collector lens; a first relay lens having lenses that relay light from the fly-eye lens; a field stop that stops down a range of light from the first relay lens; a second relay lens that relays to a beam splitter light from the first relay lens; and the beam splitter guiding at least a part of light incident thereon to the objective lens and allowing to be transmitted therethrough to a side of an imaging sensor at least a part of light incident thereon from the objective lens.

A microscope unit comprises: a main lens barrel of an imaging optical system, the main lens barrel being configured capable of being fitted with an imaging sensor and an objective lens; and an illumination lens barrel of an illumination optical system, the illumination lens barrel being connected to the main lens barrel and configured capable of being fitted with a light source, the illumination lens barrel having: a first lens barrel configured capable of being fitted with the light source; and an intermediate lens barrel connecting the main lens barrel and the first lens barrel, and a field stop of light irradiated from the light source being disposed more inwardly than an outer peripheral surface of the intermediate lens barrel is.

An observation device includes: a macro observation system; and a micro observation system. The macro observation system and the micro observation system are arranged so as to satisfy a first condition. The first condition is that a distance from a macro optical axis to a micro optical axis is equal to or less than a square root of a sum of squares of a first distance and a second distance. The first distance is a distance between the macro optical axis and a central axis of an outer diameter of the nosepiece. The second distance is a distance in a first direction between the central axis of the outer diameter and a side surface of the nosepiece. The first direction is a direction orthogonal to the macro optical axis and orthogonal to a line segment connecting the macro optical axis and the central axis of the outer diameter.

Provided is a microscope apparatus including: a microscope section configured to perform magnified observation of a subject's eye while obtaining a red reflex caused by irradiating a fundus of the subject's eye with illuminating light; a holding section configured to hold the microscope section; and a tilting section configured to tilt an illumination optical axis which is an optical axis of an illumination optical system, and an observation optical axis which is an optical axis of an observation optical system in the microscope section, around a tilt reference point in an interior of the subject's eye as a base point, while maintaining a substantially coaxial state between the illumination optical axis and the observation optical axis.

Methods and systems are provided for synchronizing image capture at a multi-detector imaging system. In one example, a method includes coordinating cycling of each microscope assembly of the multi-detector imaging system through a selection of illumination channels, each microscope assembly configured to obtain an image of a portion of one of more than one microplate wells simultaneously, to generate complete images of the more than one microplate wells concurrently.

Methods and systems are provided for a microscope assembly. In one example, the microscope assembly include an objective arranged at a top of a plate and aligned with a first side of the plate and a tube lens positioned below the objective along the first side of the plate and spaced away from the objective. The assembly further includes a laser auto-focus oriented parallel with a height of the plate and a light source coupled to a central region of the front face of the plate, between the tube lens and the laser auto-focus.

An observation system includes an observation apparatus including a housing having an arrangement surface for placement of a sample, the sample including a culture medium, and an external illumination unit which is disposed outside the housing and includes at least one light source configured to emit illumination light. At least a part of the arrangement surface is formed of a transparent member having an optically transparent property. The observation apparatus includes an imaging unit which is provided in the housing and includes an image sensor configured to image, via the transparent member, the sample illuminated by the illumination light from the external illumination unit to acquire images of at least three colors.

Disclosed herein are systems for imaging of samples using an array of micro optical elements and methods of their use. In some embodiments, an optical chip comprising an array of micro optical elements moves relative to an imaging window and a detector in order to scan over a sample to produce an image. A focal plane can reside within a sample or on its surface during imaging. Detecting optics are used to detect back-emitted light collected by an array of micro optical elements that is generated by an illumination beam impinging on a sample. In some embodiments, an imaging system has a large field of view and a large optical chip such that an entire surface of a sample can be imaged quickly. In some embodiments, a sample is accessible by a user during imaging due to the sample being exposed while disposed on or over an imaging window.

The technology disclosed relates to structured illumination microscopy (SIM). In particular, the technology disclosed relates to capturing and processing, in real time, numerous image tiles across a large image plane, dividing them into subtiles, efficiently processing the subtiles, and producing enhanced resolution images from the subtiles. The enhanced resolution images can be combined into enhanced images and can be used in subsequent analysis steps.