The invention relates to a device and a method for imaging a sample (2) arranged in an object plane (1). Such a device comprises an optical relay system (3) which images an area of the sample (2) from the object plane (1) into an intermediate image plane (4). Here, the object plane (1) and the intermediate image plane (4) with an optical axis (5) of the relay system (3) include an angle different from 90°. The optical relay system (3) is composed of several lenses. The device also comprises an optical imaging system (6) with an objective, the optical axis (7) of which lies perpendicularly on the intermediate image plane (4) and which is focused on the intermediate image plane (4), with the result that the object plane (1) can be imaged undistorted onto a detector (8). Finally, the device also comprises an illumination apparatus (10) for illuminating the sample (2) with a light sheet (11), wherein the light sheet (11) lies essentially in the object plane (1) and defines an illumination direction, and wherein the normal of the object plane (1) defines a detection direction.

In such a device, the object plane (1) with the optical axis (5) of the relay system (3) includes an angle, the value of which is smaller than the aperture angle of an object-side detection aperture cone (12) of the relay system (3), and the object plane (1) lies at least partially within the object-side detection aperture cone (12). The intermediate image plane (4) with the optical axis (5) of the relay system (3) also includes an angle, the value of which is smaller than the aperture angle of an intermediate image-side detection aperture cone (13) of the relay system (3), and the intermediate image plane (4) lies at least partially within the intermediate image-side detection aperture cone (13).

A method is used to generate a report presenting parameter values corresponding to a structured illumination microscopy (SIM) optical system. The parameter values are based at least in part on the performed modulation calculation corresponding to an image set captured with the SIM optical system. A minimum FWHM slice is identified, based at least in part on an average FWHM value across the images in the first image set. Parameter estimation is performed on the identified minimum FWHM slice. Best in-focus parameters are identified based at least in part on the performed estimation. A phase estimate is performed for each image in the set. A modulation calculation is performed based at least in part on the identified best in-focus parameters. The report is based at least in part on the performed modulation calculation.

Lighting arrangement for a diagnostic or surgical microscope has a light source, and the lighting arrangement defining an illuminating beam path. An illumination optics is arranged between the light source and an objective of the microscope which defines an imaging beam path, and in the beam path of the light source at least one deflection element is arranged for coupling in of the illuminating beam path into the imaging beam path. The illumination optics has at least one pancratic system. The lighting arrangement has, in the manner of a Köhler illumination, a collector lens arrangement which is arranged downstream of the light source in the beam direction of the light source, a field diaphragm arranged downstream of the collector lens arrangement, and an auxiliary lens arrangement arranged downstream of the field diaphragm, and the auxiliary lens arrangement has at least one pancratic system.

Disclosed herein are systems for imaging of samples using an array of micro optical elements and methods of their use. In some embodiments, an optical chip comprising an array of micro optical elements moves relative to an imaging window and a detector in order to scan over a sample to produce an image. A focal plane can reside within a sample or on its surface during imaging. Detecting optics are used to detect back-emitted light collected by an array of micro optical elements that is generated by an illumination beam impinging on a sample. In some embodiments, an imaging system has a large field of view and a large optical chip such that an entire surface of a sample can be imaged quickly. In some embodiments, a sample is accessible by a user during imaging due to the sample being exposed while disposed on or over an imaging window.

A system for illuminating a surgical field comprises a surgical imaging element and an illumination element. The surgical imaging element images the surgical field and has an image axis. The illumination element or the imaging element may be moved independently of the other in order to control illumination or field of view.

An operating microscope includes an objective lens, a first illumination optical system, a deflector, and an observation optical system. The first illumination optical system is arranged coaxially with an optical axis of the objective lens and is configured to be capable of illuminating first illumination light onto an eye to be operated through the objective lens. The deflector is configured to deflect returning light of the first illumination light in a direction intersecting the optical axis, the returning light being incident from the eye to be operated through objective lens. The observation optical system is configured to be capable of guiding the returning light deflected by the deflector to an eyepiece lens or an imaging element.

Regarding a microscope system, a technique capable of suitably achieving a focusing on a surface of a sample is provided. The microscope system includes an irradiation optical system (laser light source 101 or the like) that irradiates a surface of a sample 3 on a stage 104 with light from an oblique direction, an observation optical system (camera 112 or the like) that forms an image of scattered light from the surface of the sample 3, a focus mechanism (piezo stage 106 or the like) that changes a height position of focus with respect to the surface of the sample 3, and a computer system 100 that acquires an image from the observation optical system. Regarding the sample 3, the computer system acquires a first image in a first focus state and a second image in a second focus state, in which the first image and the second image have different focus heights, calculates an amount of change between a position of a first spot pattern in the first image and a position of a second spot pattern in the second image, calculates an amount of change in height of the sample 3 based on an incident angle in the oblique direction and the amount of change in position of spot pattern, and adjusts the height position of the focus by using the amount of change in sample height so as to focus on the surface of the sample 3.

The invention relates to a method for illuminating an object in a digital light microscope, to a digital light microscope, and to a bright field reflected-light illumination device for a digital light microscope. According to the invention, the bright field reflected-light illumination and the dark field reflected-light illumination are configured with light-emitting diodes as light sources and are individually or jointly drivable via a control unit. Both the bright field reflected-light illumination and the dark field reflected-light illumination are configured as “critical” illumination, in which the light source is imaged into the object plane.

Described herein are systems and methods for improving light-sheet microscopy with cost-effective and simplified components. Such cost-effective and simplified components can be implemented in a light focusing system, a light generation system, and/or in imaging system. The light focusing system can be improved by attaching a voice coil motor to a focusing lens to increase the imagable field of view. The light generation system can be improved with a multimode laser diode to increase the uniformity of the beam profile and to increase the usable optical power. The imaging system can be improved by using a fluid chamber with positive cylindrical optical window for minimizing spherical aberrations.

A device and method for expediting spectral measurement in metrological activities during semiconductor device fabrication through interferometric spectroscopy of white light illumination during calibration, overlay, and recipe creation.