The present invention allows observation or capturing of a high-contrast image of a sample for which sufficient contrast cannot be obtained in bright-field observation, such as a wafer having a pattern with a small pattern height. According to the present invention, a sample is illuminated through an objective lens used for capturing an image, and an imaging optics are provided with an aperture filter so that an image is captured while light of bright-field observation components is significantly attenuated.

According to an aspect of the present inventive concept there is provided a light distribution device comprising a waveguide comprising a light coupling portion for light propagation, and a slab layer comprising a light coupling edge arranged at a boundary of the slab layer, configured for light propagation.

The light coupling portion extends alongside and at a distance from the light coupling edge, forming a gap therebetween.

The light distribution device is configured to allow light in the waveguide to be coupled into the slab layer across the gap.

The slab layer is configured to propagate light coupled into the slab layer such that an interference pattern is formed in the slab layer, and for control of the interference pattern.

A method serves for determining particles (3), in particular bacteria in fluid and operates using an imaging optical device with a light source (1), with an optical sensor (4) with a field of light-sensitive pixels and with a fluid sample, which is to be examined, arranged between the light source (1) and the sensor (4). Characteristics of at least one particle (3), which is detected with regard to imaging, are compared to characteristics of a characteristics collection for determining the detected particle (3). The image acquisition is effected with darkfield technology and a light-sensitive pixel comprises several subpixels which are used for image acquisition.

The present disclosure provides an imaging system, including methods and apparatus, with oblique illumination. In an exemplary method of imaging, a sample may be illuminated obliquely with excitation light generated by only a subset of a plurality of light sources mounted to an annular frame. An image may be detected, with the image formed with photoluminescence induced in the sample by the excitation light and received from a central opening of the annular frame.

Imaging apparatus 10 for imaging nozzle section 21 of droplet dispenser device 20 includes illumination device 11 arranged for creating illumination light directed along illumination axis A1 towards an illumination range configured for accommodating nozzle section 21, and camera device 12 having imaging axis A2 directed to the illumination range. Camera device 12 is configured for collecting nozzle image(s) of nozzle section 21 arranged in the illumination range, wherein illumination device 11 and camera device 12 are arranged for dark field illumination of nozzle section 21. Illumination axis A1 and imaging axis A2 are slanted relative to each other and an illumination angle between axes A1 and A2 is selected such that the at least one nozzle image is collected with a dark background. Furthermore, dispenser apparatus 100 for dispensing droplets on a target and an imaging method for imaging nozzle section 21 of droplet dispenser device 20 are described.

Imaging apparatus 10 for imaging nozzle section 21 of droplet dispenser device 20 includes illumination device 11 arranged for creating illumination light directed along illumination axis A1 towards an illumination range configured for accommodating nozzle section 21, and camera device 12 having imaging axis A2 directed to the illumination range. Camera device 12 is configured for collecting nozzle image(s) of nozzle section 21 arranged in the illumination range, wherein illumination device 11 and camera device 12 are arranged for dark field illumination of nozzle section 21. Illumination axis A1 and imaging axis A2 are slanted relative to each other and an illumination angle between axes A1 and A2 is selected such that the at least one nozzle image is collected with a dark background. Furthermore, dispenser apparatus 100 for dispensing droplets on a target and an imaging method for imaging nozzle section 21 of droplet dispenser device 20 are described.

Embodiments of a resolution enhancement technique for a light sheet microscopy system having a three objective lens arrangement in which one objective lens illuminates a sample and the second and third objective lenses collect the fluorescence emissions emitted by the sample are disclosed. The second objective lens focuses a first portion of the fluorescence emissions for detection by a second detection component, while the third objective lens focuses a second portion of the fluorescence emissions through a diffractive or refractive optic component for detection by a first detector component. A processor combines the images resulting from the first and second portions of the fluorescence emissions for generating composite images with increased axial and lateral resolution.

A system and method for using a microscope to at least haptically observe a specimen in a fluid is provided. In one embodiment of the present invention, an audio frequency modulation sensing (AFMS) device is used to convert an optical signal from the specimen into an electrical signal. A haptic feedback device is then used to convert the electrical signal in at least vibrations, thereby providing a user with haptic feedback associated with the optical signal from the specimen. In another embodiment, a second electrical signal can be provided to a second haptic feedback (e.g., shaker, piezo electric, electric current inducing, etc.) device in the fluid, thereby allowing for bidirectional haptic feedback between the user and the specimen. In other embodiments, aural data can be extracted from the electrical signal and presented to the user either alone in in synchronization with video data (e.g., from a video camera).

A system and method for using a microscope to at least haptically observe a specimen in a fluid is provided. In one embodiment of the present invention, an audio frequency modulation sensing (AFMS) device is used to convert an optical signal from the specimen into an electrical signal. A haptic feedback device is then used to convert the electrical signal in at least vibrations, thereby providing a user with haptic feedback associated with the optical signal from the specimen. In another embodiment, a second electrical signal can be provided to a second haptic feedback (e.g., shaker, piezo electric, electric current inducing, etc.) device in the fluid, thereby allowing for bidirectional haptic feedback between the user and the specimen. In other embodiments, aural data can be extracted from the electrical signal and presented to the user either alone in in synchronization with video data (e.g., from a video camera).

A structured illumination microscope includes: a first illumination optical system configured to irradiate, from a first direction, a sample with activating light for activating a fluorescent substance included in the sample; a second illumination optical system configured to irradiate, from a second direction that is different from the first direction, the sample with interference fringes of exciting light for exciting the fluorescent substance; a control unit configured to control a direction and a phase of the interference fringes; an imaging optical system configured to form an image of the sample irradiated with the interference fringes; an imaging element configured to take the image formed by the imaging optical system to generate a first image; and a demodulation unit configured to generate a second image by using a plurality of the first images generated by the imaging element.