A deformable mirror and capacitive array controller is capable of controlling a plurality of individual actuators by applying independent voltages from 0V to 240V to each actuator. The device utilizes a distributed microcontroller (MCU) architecture, including a main microcontroller and a plurality of slave microcontrollers to maximize actuator voltage refresh rate. One Slave MCU may be used for up to 384 actuators. For maximizing actuator refresh rate, each Slave MCU may be limited to 192 actuators. The final circuit stage includes a digital/analog converter, a voltage sample and hold and a high voltage amplifier, all packaged in a single integrated circuit. These integrated circuits are referred hereinafter as HV S&H (high voltage sample and hold). A flexible, stacked PCB assembly significantly reduces overall footprint and weight compared to conventional devices. The device's power consumption is nearly an order of magnitude less than that of a conventions adaptive optical system.

A vehicle, a head-up displaying system and a projector are provided, the projector including a displaying component (1) configured to project an image, and a three-mirror optical device positioned in an optical path of an emergent light of the displaying component (1), configured to reflect the image projected by the displaying component (1) onto a front windshield (5) such that the front windshield (5) reflects the image to eyes of a driver and including: a zoom lens assembly (2) having a zoom lens (21) for zooming in/out the image projected by the displaying component (1), and a first curvature adjusting component configured to adjust a curvature of the zoom lens (21); an image quality compensation lens assembly (3) having an image quality compensation lens (31) configured to compensate for an image quality distortion caused during a change of the curvature of the zoom lens (21), and a second curvature adjusting component configured to adjust a curvature of the image quality compensation lens (31); and a front windshield compensation lens assembly (4) configured to compensate for an image distortion caused by the front windshield (5).

A tunable spectral filter includes a first tunable dispersive element, a first optical element, a spatial filtering element located at the focal plane, a second optical element, and a second dispersive element. The first tunable dispersive element introduces spectral dispersion to an illumination beam with an adjustable dispersion. The first optical element focuses the illumination beam at a focal plane in which a distribution of a spectrum of the spectrally-dispersed illumination beam at the focal plane is controllable by adjusting the dispersion of the first tunable dispersive element. The spatial filtering element filters the spectrum of the illumination beam based on the distribution of the spectrum of the illumination beam at the focal plane. The second optical element collects the spectrally-dispersed illumination beam transmitted from the spatial filtering element. The second tunable dispersive element removes the dispersion introduced by the first tunable dispersive element from the illumination beam.

An optical element comprises a substrate and an optical surface formed on the substrate. At least one fluid-tight sealed chamber is embedded in the substrate and has a rheological fluid introduced therein for deforming the optical surface. An optical arrangement, such as an EUV lithography system, comprises at least one optical element as described above and a field generating device for generating an electromagnetic field. The electromagnetic field can be a time-varying electromagnetic field. The electromagnetic field can be a magnetic field. The electromagnetic field passes through the at least one chamber which contains the rheological fluid. A method for producing an optical element designed as described above is also provided.

A projector for HUD includes a displaying component (1) configured to project an image, and a three-mirror optical device (10) configured to reflect the image onto a front windshield (5) which reflects the image to a driver's eyes. The three-mirror optical device (10) comprises a zoom lens assembly (2) having a zoom lens (21) for zooming in/out the image projected by the displaying component (1), and an image quality compensation lens assembly (3) having an image quality compensation lens (31) for compensating for an image quality distortion caused during a change of the focus of the zoom lens(21), and a front windshield compensation lens assembly (4), configured to compensate for a distortion caused by the front windshield (5). A first and a second focus adjusting component (22, 32) are configured to adjust the focus of the zoom lens (21) and the focus of quality compensation lens (31), respectively.

Systems and methods for auto-calibrating a virtual reality (VR) or augmented reality (AR) head-mounted display to a given user with a refractive condition without adding corrective lenses to optical elements of the head-mounted display and without requiring subjective refraction procedures. A method comprises projecting a grid onto an eye of a user using a light source of a head-mounted display worn by the user, capturing the grid as-reflected from the eye using a camera of the head-mounted display, determining a pattern of a reflection of the grid based on the grid as-reflected, generating an aberration map based on a difference between the pattern as-reflected and the grid as-projected, and determining a correction to apply to at least one viewing lens of the head-mounted display worn by the user based on the aberration map.

An optical assembly for semiconductor lithography comprises an optical element and an actuator for deforming the optical element. The actuator is constructed from at least three sections, which include at least first and second group of sections that are controllable in each case via a controller are present. The first group serves for coarse actuation, and the second group serves for fine actuation. The controller is configured to control the groups independently of one another and the sections of a group jointly. The controller is furthermore configured to variably set the number of sections controlled jointly per group. Furthermore, the disclosure relates to a projection exposure apparatus equipped with the assembly, and to a method for controlling the optical assembly.

In one aspect, a device includes a frame, at least one lens coupled to the frame, at least one membrane at least partially covering at least one face of the lens, a reservoir in fluid communication with the membrane and containing fluid, and a fluid control assembly which controls fluid communication of the fluid between the reservoir and the membrane.

An imaging apparatus for imaging a rotating component is shown. The imaging apparatus has a proximal end configured to be attached to the rotating component, along with a distal end. The imaging apparatus has located within it a convex mirror at the distal end, which has a reflective surface which is directed toward the proximal end and having a field of view wider than the imaging apparatus. The imaging apparatus also has located within it a camera at the proximal end, the camera being directed towards to distal end and having a field of view which includes the mirror.

The disclosure provides an arrangement for the thermal actuation of a mirror, in particular in a microlithographic projection exposure apparatus, as well as related methods and systems.