The invention relates to a deformable mirror comprising a deformable membrane (2) having a reflecting face (3) and being mounted on a support provided with at least one actuator designed to deform said membrane (2), said actuator comprising at least one movable member (7) fixed to the membrane (2) via an adhesive joint (8) and having a main body (11) located away from the adhesive joint (8), said body being extended by an active part (12) that penetrates said adhesive joint (8) partly or completely in such a way that the adhesive spreads over the concealed face (4), parallel to the reflecting face (3), and adheres at least partly to the side wall (14) of said active part (12), this part (12) forming a tip (32) limiting the bonding footprint on said reflecting face (3). Deformable mirror for adaptive optics.

A method and a mirror selectively magnify an image reflected by a discrete portion of a reflective area of the mirror while an image reflected by the remainder of the reflective area outside the discrete portion remains unchanged. A light-transmitting area is placed within the reflective area, outside of and adjacent to the discrete portion, and a light source is located for directing light through the light-transmitting area to illuminate a space adjacent to and confronting at least the discrete portion of the reflective area.

A machining apparatus for laser machining a workpiece (12) in a machining zone (13) is provided, having a first interface (14) for a machining laser source for generating a machining laser beam (15), an outlet opening (18) for the machining laser beam (15), In an optical system between the first interface (14) and the outlet opening (18), which has at least one laser beam guiding device (22) having at least one movable surface (24) and at least one actuator (26), with which the movable surface (24) is dynamically adjustable, and a cooling device (28) for cooling the at least one actuator (26), wherein the cooling device (28) has at least one primary circuit (30) through which a first cooling fluid can flow without contact with the actuator (26). Furthermore, a set of parts for a machining apparatus for laser machining a workpiece (12) and a method of laser machining a workpiece (12) using such machining apparatus are also provided.

A scan unit (100) includes a base (141) and an elastic mount (111) having a first end (111A) and a second end (111B). The first end (111A) is coupled to the base (141), the second end (111B) being configured to couple to a mirror (150). The scan unit (100) also includes at least one interface element (146) configured to couple to one or more actuators (172, 310, 320). The scan unit (100) further includes at least one elastic coupling (400-404) arranged in-between the base (141) and the at least one interface element (146) and configured to deflect the base (141) upon actuation of the one or more actuators (172, 310, 320). The at least one elastic coupling (400-404) is integrally formed with at least a part (141A) of the base (141) and the at least one interface element (146).

A scan unit (100)—e.g., for Light Detection and Ranging, LIDAR—comprises a base (141) and a minor (150) for deflecting light (180). A first set (600) includes at least three torsion springs (601-605) extending along an axis (z, 119) between the base (141) and the mirror (150) in a first plane (691). A second set (610) includes at least three torsion springs (611-613) extending along the axis (z, 119) between the base (141) and the mirror (150) in a second plane (692) that is offset and parallel to the first plane (691).

An apparatus and method for optically remapping projected pixels to maximize the utilization and to optimize the distribution of remapped projection pixels to achieve optimal visual performance (generally uniform resolution and luminance). A device interposed between a projector and an imaging surface for optically remapping projected pixel locations with minimal aberration. When this device is interposed between a projector and an imaging surface, it changes the terminal location of each focused pixel such that it maximally coincides with the imaging surface, which is often a surface of complex curvature and very different from the native focal surface of the projector. One implementation of the technology includes a device that uses multiple optical surfaces.

In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module is provided. The apparatus comprises a microelectromechanical system (MEMS) and a substrate. The MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprises: a first flexible support structure and a second flexible support structure connected to the substrate; a micro-mirror comprising a first connection structure and a second connection structure, the first connection structure being connected to the first flexible support structure at a first connection point, the second connection structure being connected to the second flexible support structure at a second connection point, the first and second connection points being aligned with a rotation axis around which the micro-mirror rotates, the first flexible support structure and the second flexible support structure being configured to allow the first and second connection points to move when the micro-mirror rotates.

In one example, an apparatus that is part of a Light Detection and Ranging (LiDAR) module of a vehicle comprises a semiconductor integrated circuit comprising a microelectromechanical system (MEMS) and a substrate. The MEMS comprises an array of micro-mirror assemblies, each micro-mirror assembly comprising: a micro-mirror having a first thickness; and an actuator comprising first fingers and second fingers, the first fingers being connected with the substrate, the second fingers being mechanically connected to the micro-mirror having a second thickness smaller than the first thickness, the actuator being configured to generate an electrostatic force between the first fingers and the second fingers to rotate the micro-mirror to reflect light emitted by a light source out of the LiDAR module or light received by the LiDAR module to a receiver.

Scanning mirror systems for display devices are disclosed. A display device comprises a light source and a scanning mirror system coupled to a support structure, the scanning mirror system comprising a mirror, a flexure supporting the mirror, and a first anchor and a second anchor each coupled to the support structure. The scanning mirror system further includes a first arm extending between the first anchor and a first portion of the flexure, a second arm extending between the first anchor and a second portion of the flexure, and also includes a third arm, a fourth arm, and an actuator system. Each of the first arm and the second arm define a respective gap that extends inwardly from an outer perimeter of the scanning mirror system. The actuator system is configured to actuate the arms to vary a scan angle of the mirror.

Provided is focal variable device system including a focus variable element including an absorbing layer, and an adjustable light source configured to cause an adjustable light to enter the focus variable element. The absorbing layer includes a thermal expansion material that absorbs the adjustable light and thermally expands.