A micromechanical light deflection device, including a micromechanical light deflection unit and a transparent cover for the micromechanical light deflection unit, the transparent cover including at least one passive beam shaping unit for a light beam.

A laser projection device, including at least one reflector unit having at least one reflector element that is configured to deflect at least one laser beam to be projected, and having at least one drive unit that is configured to excite at least the reflector element into resonant vibration. The laser projection device includes at least one temperature compensation unit, which is configured to acquire a vibrational frequency of at least the reflector element and to ascertain the temperature of the reflector unit from it.

A transfer printing method and a transfer printing apparatus. The transfer method includes: transferring a plurality of devices formed on an original substrate to a transfer substrate; obtaining first position information of positions of the plurality of devices on the transfer substrate; obtaining second position information of corresponding positions, on a target substrate, of devices to be transferred; comparing the first position information with the second position information to obtain first target position information recording a first transfer position; and aligning the transfer substrate with the target substrate and performing a site-designated laser irradiation on at least part of devices on the transfer substrate corresponding to the first transfer position, simultaneously, according to the first target position information, so as to transfer the at least part of the devices from the transfer substrate to the target substrate.

An oscillator control system that includes an oscillator structure; a phase error detector configured to generate a phase error signal based on a delayed event time signal and delayed reference signal; an analog signal path coupled between the oscillator structure and the phase error detector, the analog signal path configured to receive an event time signal and produce the delayed event time signal; a control circuit configured to generate a reference signal; a programmable delay circuit configured to receive the reference signal and induce a programmable delay on the reference signal thereby generating the delayed reference signal; and an analog delay measurement circuit configured to inject a test signal into the analog signal path, receive a delayed test signal from the analog signal path, measure an analog delay of the delayed test signal, and generate a configuration signal configured to adjust the programmable delay according to the measured analog delay.

An electro-optical system may include a light source configured to emit a beam of radiation, and a pivotable scanning mirror configured to project the beam of radiation toward a field of view. The electro-optical system may also include a first electrode associated with the scanning mirror, and a plurality of second electrodes spaced apart from the first electrode. The electro-optical system may further include a processor programmed to determine a capacitance value for each of the second electrodes relative to the first electrode. Each of the determined capacitance values may have an accuracy in a range of ± 1/100 to ± 1/1000 of a difference between a highest capacitance value and a lowest capacitance value between the first electrode and a respective one of the second electrodes. The processor may also be programmed to determine an orientation of the scanning mirror based on one or more of the determined capacitance values.

A mirror unit includes a mirror device includes a support portion and a movable mirror portion configured to be movable with respect to the support portion, and a package including a light incident opening and accommodating and holding the mirror device such that light incident from the light incident opening is able to be incident on the movable mirror portion. The package is provided with a ventilation port communicating an inside and an outside of the package.

Techniques are described herein for dynamically adjusting a resonant frequency of a resonance circuit to optimize power transfer to a mirror device such as a MEMS mirror. A variable capacitance circuit can be operated responsive to a bias control signal. A capacitance control circuit can vary the bias control signal to the resonance circuit responsive to a sense signal. The sense circuit is configured to generate the sense signal responsive to an output of the mirror device. By monitoring a signal level from the output of the mirror device 130, and adjusting the bias control signal of the resonance circuit, the exact resonance frequency of the resonance circuit can be adjusted until a peak signal level is observed, thus improving the efficiency of the energy transferred from the driver circuit 110 to the mirror device 130, and counteracting the impact of parasitic capacitances on the resonance.

An optical scanning device includes a mirror device that has a mirror portion, which is swingable around a first axis and a second axis orthogonal to each other, having a reflecting surface reflecting incident light, a first actuator causing the mirror portion to swing around the first axis by applying a rotational torque around the first axis to the mirror portion, and a second actuator causing the mirror portion to swing around the second axis by applying a rotational torque around the second axis to the mirror portion, and a processor that provides a first driving signal to the first actuator and provides a second driving signal to the second actuator. The processor, with the first driving signal and the second driving signal each as cyclic voltage signals whose amplitudes and phases change with time, causes the mirror portion to perform a spiral rotation operation including a period in which a swing amplitude around the first axis and a swing amplitude around the second axis change linearly.

A bijective coded aperture system uses mirror system with a multitude of reflector elements attached to an absorbing, such as black, substrate. Each of the reflector elements is independently placed at a different angle with respect to each other in such a manner that the image of the scene is replicated several times at the focal plane and on the image sensor. Moreover, these replicated images may be overlapping. An image processor can then execute reconstruction methods of the image to faithfully represent the scene.

The invention relates to a MEMS mirror assembly for detecting a large angular range up to 180°, preferably up to 160°, and to a method for producing a MEMS mirror assembly. The mirror assembly comprises a carrier substrate (1), on which a mirror (2) vibrating about at least one axis is mounted, a transparent cover (4), which is connected in a hermetically sealed manner to the carrier substrate (1) and which comprises an ellipsoidal dome (6) having a substantially round base area, and a compensation optical system (8), which is arranged in a predefined beam path for an incident beam outside the dome (6). The middle of the mirror (2) lies in the centre point of the dome, and the compensation optical system (8) collimates the incident beam in such a way that a divergence or convergence of the beam caused by the boundary surfaces of the dome once said beam has exited from the dome (6) is substantially compensated. The MEMS mirror assemblies are produced by joining a cover wafer and a mirror wafer, which each comprise a plurality of hemispherical domes and mirrors mounted on the carrier substrate. The mirror assemblies are then separated from the joined wafers. The domes of the cover wafer are produced by a glass flow process.