The invention relates to microelectromechanical systems (MEMS), and specifically to a mirror system, for example to be used in LiDAR (Light Detection and Ranging). The MEMS mirror system of the invention uses four suspenders, each of which is connected to the reflector body at two separate connection points which can be independently displaced by piezoelectric actuators. By actuating adjacent and opposite pairs of piezoelectric actuators, the reflector body can be driven to oscillated about two orthogonal axes.

Some embodiments may include a method of generating assessment data in a system including a galvanometric scanning system (GSS) having a laser device to generate a laser beam and an X-Y scan head module to position the laser beam on a work piece. The method may include selecting a dimension based on a desired accuracy for validation (and/or a characteristic of an imaging system in embodiments that utilize an imaging system). The method may include commanding the GSS to draw a mark based on a polygon or ellipse of the selected dimension around a predetermined target point associated with the work piece to generate assessment data, and following operation of the GSS based on said commanding, validating a calibration of the GSS using the assessment data (or an image thereof in embodiments that utilize an imaging system). Other embodiments may be disclosed and/or claimed.

An optical arrangement for a laser beam includes an f-theta lens. The f-theta lens is disposed in a divergent beam path of the optical arrangement in order to focus the laser beam into a focus plane. The focus plane is located at a distance from a focal plane of the f-theta lens.

A laser-excited-phosphor light-source system in which a phosphor plate remains stationary while a laser beam is made to scan across the phosphor plate. In some embodiments, the phosphor-plate assembly includes a plurality of areas each having a different phosphor substance that emits wavelength-converted light in response to excitation from the scanned laser beam and/or a diffusive material. In some embodiments, one or more rotating prisms and/or one or more rotating or oscillating or angularly displaced mirrors are used to deflect the input laser light on the way toward the phosphor plate and to deflect the wavelength-converted and/or diffused light in the opposite direction such that the output beam of wavelength-converted and/or diffused light remains stationary with respect to the phosphor plate as the input laser beam is moved across the surface of the phosphor-plate assembly.

A first portion (110) and a second portion (120) of a casing (100) are separable obliquely from a second surface (122) side (upper side, that is, a positive direction side of a third direction (Z)) toward a first surface (112) side (lower side, that is, a negative direction side of the third direction (Z)) of the casing (100) with respect to the first surface (112) or the second surface (122) of the casing (100) from a first side surface (114) (window portion (130)) side (front side, that is, a positive direction side of a first direction (X)) toward an opposite side (fourth side surface 124 side) (rear side, that is, a negative direction side of the first direction (X)) to the first side surface (114) (window portion (130)).

An optical apparatus includes a deflection unit configured to deflect illumination light from a light source and to deflect reflected light from the object, and a light guide unit configured to guide the illumination light to the deflection unit and to guide the reflected light from the deflection unit to a light receiving unit. The light guide unit includes first and second passage areas, and a reflective area. The illumination light is branched into first and second illumination lights by the light guide unit. The first illumination light is emitted from the first passage area and the second illumination light is emitted from the second passage area so that an emission direction of the first illumination light and that of the second illumination light are not parallel to each other, and then the first illumination light and the second illumination light enter the deflection unit.

A light scanning device includes a mirror device that includes a movable mirror which swings about at least one axis, and a package that has at least two or more light transmission surfaces not constituting the same plane and accommodates the mirror device, in which out of the two or more light transmission surfaces of the package, one light transmission surface is a light receiving surface for receiving an incidence ray on the movable mirror from an outside, and the other light transmission surface is a light extraction surface for extracting light reflected by the movable mirror to the outside.

An image forming apparatus includes a light emitting device that emits light, a movable mirror that reflects the light emitted from the light emitting device, a first actuator that causes the movable mirror to swing about a first axis, a first reference signal output portion that outputs a first reference signal by estimating a point in time when a deflection angle of the movable mirror about the first axis becomes equal to a first reference angle, a light emission controller that causes the light emitting device to emit the light based on the first reference signal output from the first reference signal output portion, an imaging apparatus that images the light reflected by the movable mirror, and a correction portion that corrects a timing of the first reference signal output by the first reference signal output portion based on imaging information acquired by the imaging apparatus.

A microelectromechanical structure includes a body of semiconductor material having a fixed frame internally defining a cavity, a mobile mass elastically suspended in the cavity and movable with a first resonant movement about a first rotation axis and with a second resonant movement about a second rotation axis, orthogonal to the first axis. First and second pairs of supporting elements, extending in cantilever fashion in the cavity, are rigidly coupled to the frame, and are piezoelectrically deformable to cause rotation of the mobile mass about the first and second rotation axes. First and second pairs of elastic-coupling elements are elastically coupled between the mobile mass and the first and the second pairs of supporting elements. The first and second movements of rotation of the mobile mass are decoupled from one another and do not interfere with one another due to the elastic-coupling elements of the first and second pairs.

A system for irradiating a microplate may include a light engine with a plurality of light sources, such as light-emitting diodes, included in one or more linear arrays. The plurality of light sources are configured to emit germicidal irradiation, which is directed to the microplate by optical components, such as optical lenses positioned on top of each well of the microplate. The linear array is linearly movable so that as the linear array scans across the microplate, the optical components direct the germicidal irradiation to a plurality of surfaces of each well.