An optoelectronic component includes an optical transducer made of III-V semiconductor material and an optical scanning microelectromechanical system comprising a mirror. The optical transducer and the optical scanning microelectromechanical system are produced on a common wafer comprising at least a first layer made of silicon or silicon nitride with a thickness of less than one micron and wherein at least the mirror and its holding springs are produced. In a first variant, the mobile parts of the optical scanning microelectromechanical system are produced in various layers of silicon. In a second variant, the mobile parts of the optical scanning microelectromechanical system are produced in the layer of III-V semiconductor material.

An actuator that includes: a first driving body that includes a first piezoelectric material that extends in a first axis direction; a second driving body that includes a second piezoelectric material shorter than the first piezoelectric material in the first axis direction; and a base that holds the first driving body and the second driving body at proximal end portions of the first driving body and the second driving body in the first axis direction. The first driving body and the second driving body are aligned and coupled together in a polarization axis direction in a state in which a polarization axis of the first piezoelectric material and a polarization axis of the second piezoelectric material correspond with each other. A length of the second piezoelectric material in a second axis direction is greater than a length of the first piezoelectric material in the second axis direction.

An optical device according to an embodiment of the present disclosure includes a light source in which a plurality of light emitting elements are arranged at a predetermined distance, an optical system configured to convert light beams from the plurality of light emitting elements into line light beams, and a light deflection element configured to deflect each of the line light beams. Each of the line light beams is caused to be incident on the light deflection element such that a longitudinal direction of each of the light beams is aligned with a direction of a rotating axis of the light deflection element.

A MEMS-mirror device (1) is provided that comprises a support (2), a mirror body (3) that is rotationally suspended with respect to the support along a rotation axis (4), and an actuator (7A, 7B) to induce a rotation in the mirror body around the rotation axis. The mirror body (3) has a mirror surface (311) that in a neutral state defines a reference plane (x, y) having a longitudinal axis (y) through a center of the mirror body parallel to the rotation axis (4) and a lateral axis (x) transverse to the longitudinal axis. The mirror body (3) has a central portion (31) and integral therewith a pair of extension portions (32A, 32B) that extend in mutually opposite directions along the longitudinal axis. Each of the extension portions (32A, 32B) is flexibly coupled at a lateral side (322A, 322B) to the support with a respective plurality (6A, 6B) of torsion beams (61) which in a neutral state of the mirror body extend in the reference plane (x, y). The torsion beams of a respective plurality of torsion beams have a respective first end (611) attached to the support and a respective second end (612) attached to the respective extension portion, wherein the respective first end and the respective second end have mutually different positions (y1, y2) in the direction of the longitudinal axis (y) and in the lateral direction (x) are at mutually opposite sides (x1, x2) of the rotation axis (4).

A method for scanning a transmitted beam through a 360° FOV in a LIDAR system using no moving parts. The method includes directing a laser beam at a first frequency to an SPPR device and directing the laser beam from the SPPR device onto a conical mirror to direct the laser beam at a certain angle therefrom depending on the first frequency of the laser beam. The method further includes shifting the optical frequency of the laser beam to a second frequency to change the angle that the transmitted beam is directed from the conical mirror and intensity modulating the laser beam at the second frequency using a first intensity modulation frequency for a predetermined period of time. The method further includes receiving a reflected beam from the target and estimating a round trip time of the transmitted beam and the reflected beam using the modulation of the laser beam.

A multipass scanner usable e.g. in a near-eye display is disclosed. The multipass scanner scans a light beam angularly, forming an image in angular domain. The multipass scanner includes a light source, a tiltable reflector, and a multipass coupler that couples light emitted by the light source to the tiltable reflector, receives the reflected light and couples it back to the tiltable reflector to double the scanning angle. Then, the multipass coupler couples the light reflected at least twice from the tiltable reflector to an exit pupil of the scanner. A pupil-replicating waveguide disposed at the exit pupil of the scanner extends the image in angular domain. Multiple reflections of the light beam from the tiltable reflector enable one to increase the angular scanning range and associated field of view of the display without having to increase the angular scanning range of the tiltable reflector.

The disclosure provides a control device of an annealing device, which is capable of further suppressing a temperature of a surface opposite to a laser irradiation surface from rising. A beam spot of a pulsed laser beam output from a laser light source on a surface of an annealed target is shaped into a long shape in one direction by a beam shaping optical element. A movement mechanism moves the beam spot with respect to the annealed target. The control device controls the laser light source and the movement mechanism and performs annealing by performing a sweep operation of moving the beam spot in a longitudinal direction of the beam spot with respect to the annealed target while causing the pulsed laser beam to be incident on the annealed target.

A display apparatus comprises a mirror assembly, a first mirror of the mirror assembly oscillating about a first axis upon excitation by a first excitation signal and the first or a second mirror of the mirror assembly oscillating about a second axis upon excitation by a second excitation signal, a light source projecting a light beam onto the mirror assembly for deflection by the mirror assembly towards an image area, the light source being controlled according to pixels of image frames, a gaze tracker detecting a user's region of interest, ROI, within the image area, and a controller modulating one of the excitation signals by a first modulation signal which is dependent on the ROI detected by the gaze tracker.

This application discloses a galvanometer and a LiDAR. The galvanometer includes a first shaft and a second shaft. A first shaft drive voltage is used to control the galvanometer to vibrate around the first shaft, a second shaft drive voltage is used to control the galvanometer to vibrate around the second shaft, and the first shaft drive voltage and the second shaft drive voltage are superimposed to drive the galvanometer. There are N working intervals in a second shaft drive period, and in the N working intervals, the second shaft drive voltage and the first shaft drive voltage jointly drive the galvanometer to form N scanning tracks. The N scanning tracks do not coincide and N is a positive integer.

In an optical device, when viewed from a first direction, first, second, third, and fourth movable comb electrodes are respectively disposed between a first support portion and a first end of a movable unit, between a second support portion and a second end of the movable unit, between a third support portion and the first end, and between a fourth support portion and the second end of the movable unit. The first and second support portions respectively include first and second rib portions formed so that the thickness of each of the first and second support portions becomes greater than the thickness of the first torsion bar. The third and fourth support portions respectively include third and fourth rib portions formed so that the thickness of each of the third and fourth support portions becomes greater than the thickness of the second torsion bar.