A metrology system includes an illumination source configured to generate an illumination beam, one or more illumination optics configured to direct the illumination beam to a sample, one or more collection optics configured to collect illumination emanating from the sample, a detector, and a hyperspectral imaging sub-system. The hyperspectral imaging sub-system includes a dispersive element positioned at a pupil plane of the set of collection optics configured to spectrally disperse the collected illumination, a lens array including an array of focusing elements, and one or more imaging optics. The one or more imaging optics combine the spectrally-dispersed collected illumination to form an image of the pupil plane on the lens array. The focusing elements of the lens array distribute the collected illumination on the detector in an arrayed pattern.

A multi-spectral scan camera and methods are presented. Light beams are emitted from a plurality of light sources comprising a plurality of spectral wavelengths respectively. The light beams from the light sources are scanned across a field of view at a plurality of respective angles using a scan mirror, and each of the spectral wavelengths are received at respective detectors.

There is provided a light source unit comprising a first light source having a solid light emitting device, a second light source having a luminescent material layer which emits light in a wavelength range which is different from light in a wavelength range which is emitted from the first light source by using the light emitted from the first light source as an excitation light source, and an optical device which is disposed between the first light source and the second light source, wherein the optical device has a dichroic layer which transmits a pencil of light emitted by the first light source and reflects a pencil of light emitted by the second light source, and a diffusing layer which diffuses the pencil of light emitted from the first light source.

A color splitter, a method of manufacturing the same, and an image sensor including the same are disclosed. The color splitter includes: a color separation element that is formed of a sol-gel material having a high refractive index and exhibits a color separation characteristic; and a low-refractive index layer that has a space in which the color separation element is disposed.

A spectroscopic module includes a plurality of beam splitters that are arranged along an X direction; a plurality of bandpass filters disposed on one side in a Z direction with respect to the plurality of beam splitters facing the plurality of beam splitters, respectively; a light detector disposed on the one side in the Z direction with respect to the plurality of bandpass filters and including a plurality of light receiving regions facing the plurality of bandpass filters, respectively; a first support body supporting the plurality of beam splitters; and a second support body supporting the plurality of bandpass filters. The second support body includes a support portion in which a support surface is formed so as to be open to the one side in the Z direction. The plurality of bandpass filters are disposed on the support surface.

A solid-state imaging device has a plurality of micro lenses, a first substrate, and a second substrate. The first substrate has a plurality of first photoelectric conversion units. Each of the plurality of first photoelectric conversion units corresponds to any one of the plurality of micro lenses. The second substrate has a plurality of second photoelectric conversion units and a plurality of third photoelectric conversion units. A plurality of pairs of photoelectric conversion units are disposed, and each of the plurality of pairs of photoelectric conversion units includes one of the second photoelectric conversion units and one of the third photoelectric conversion units. Each of the plurality of pairs of photoelectric conversion units corresponds to at least one of the plurality of first photoelectric conversion units. The second substrate further includes charge isolation regions disposed between the second photoelectric conversion units and the third photoelectric conversion units.

A metasurface that is designed to control electromagnetic radiation (EMR) in ways that perform more than a single function. The metasurface has a substrate layer that has multiple asymmetric nanofeatures, each having a height (H) between λ.sub.min/100 and 2λ.sub.max. Each nanofeature has a particular length (D.sub.y) that extends along a principal in-plane direction θ and a width (D.sub.x) that is orthogonal thereto. Each nanofeature is tailored to scatter with different patterns one polarization state of electromagnetic radiation and one orthogonal polarization state of electromagnetic radiation.

Methods and devices to build and use multi-functional scattering structures. The disclosed methods and devices account for multiple target functions and can be implemented using fabrication methods based on two-photon polymerization or multi-layer lithography. Exemplary devices functioning as wave splitters are also described. Results confirming the performance and benefits of the disclosed teachings are also described.

In a right-handed XYZ coordinate system, a dichroic-mirror array of the present disclosure includes a first group in which m (m≥2) dichroic mirrors DA1 to DAm are arranged parallel to each other along a positive direction of an X axis and a second group in which n (n≥2) dichroic mirrors DB1 to DBn are arranged parallel to each other along a negative direction of the X axis. Incident surfaces of the DA1 to DAm and incident surfaces of the DB1 to DBn are perpendicular to an XZ plane. A slope of straight lines with normal lines of the incident surfaces of the DA1 to DAm projected onto the XZ plane are negative, and a slope of straight lines with normal lines of incident surfaces of DB1 to DBn projected onto the XZ plane are positive.

Systems and methods here may be used for a setup of image capturing of a gemstone, such as a diamond, exposed to different light sources. Some examples utilize a setup that both sends light and captures the image through multiple dichroic beam splitters at pre-selected timing. The multiple light source and multiple dichroic beam splitter arrangement allows for multiple gemstones to be analyzed using multiple methods with minimal moving, changing, or adjusting the equipment for different samples.