Laser light emanates from optical components that are mounted on a substrate, each optical component being coupled to an optical fiber that delivers laser radiation combined from multiple lasers. A linear or elliptical holographic diffuser is located to diffuse the light emanating from the optical components. The laser wavelengths excite plant photopigments for predetermined physiological responses, and the light source intensities may be temporally modulated to maximize photosynthesis and control photomorphogenesis responses. Each laser is independently controlled. At least one laser emits ultraviolet-C radiation.

An apparatus and a method for forming alignment marks are disclosed. The method for forming alignment marks is a photolithography-free process and includes the following operations. A laser beam is provided. The laser beam is divided into a plurality of laser beams separated from each other. The plurality of laser beams is shaped into a plurality of patterned beams, so that the plurality of patterned beams is shaped with patterns corresponding to alignment marks. The plurality of patterned beams is projected onto a semiconductor wafer.

The invention relates to an optical system with a dividing element (2), which divides the input laser beam (EL) into a number of spatially separate sub-beams, at least one optical amplifier (4), through which the spatially separate sub-beams propagate, at least one path-length adjustment element (3), which adjusts the path length of at least one of the sub-beams, and a combination element (6, 8), which coherently superimposes the sub-beams in an output laser beam. The object of the invention is to achieve a high beam quality in the output laser beam, wherein the demands on the surface quality of the optical components used are to be reduced compared with the prior art. To this end the invention proposes that at least one optical functional element (5, 5′, 6′, 7) from the group of transport element, spectral broadening element, beam deflection element, optical isolator, optical modulator and pulse compressor is provided arranged after the at least one optical amplifier (4) in the beam path, through which functional element the spatially separate sub-beams propagate.

A beam-splitting apparatus arranged to receive an input radiation beam and split the input radiation beam into a plurality of output radiation beams. The beam-splitting apparatus comprising a plurality of reflective diffraction gratings arranged to receive a radiation beam and configured to form a diffraction pattern comprising a plurality of diffraction orders, at least some of the reflective diffraction gratings being arranged to receive a 0.sup.th diffraction order formed at another of the reflective diffraction gratings. The reflective diffraction gratings are arranged such that the optical path of each output radiation beam includes no more than one instance of a diffraction order which is not a 0.sup.th diffraction order.

An optical test method is provided. The optical test method includes emitting light through a gap between two substrates of a tested optical element disposed on a holder to generate a plurality of light beams. The optical test method further includes driving the holder with the tested optical element to move to N positions. The optical test method also includes receiving one of the light beams from the tested optical element in the N positions to generate N first intensity signals. In addition, the optical test method includes determining the size of the gap of the tested optical element according to the N first intensity signals and reference data.

Embodiments of the disclosure provide transmitters for light detection and ranging (LiDAR). The transmitter includes a plurality of laser sources and a light modulator. Each of the laser sources includes interleaved emitting regions and gaps and is configured to provide a native laser beam in a respective incident direction. The light modulator is configured to receive the native laser beams from the plurality of laser sources in different incident directions and combine the native laser beams into a combined laser beam in a diffraction direction.

A structured light generator includes a light source configured to emit light, and a first meta optical device including a first metasurface including nanostructures having sub-wavelength dimensions that are less than a wavelength of the light emitted from the light source, the first metasurface being configured to form a distribution of light rays from the light emitted from the light source to thereby radiate structured light.

A structured light system may include a semiconductor laser to emit light and a diffractive optical element to diffract the light such that one or more diffracted orders of the light, associated with forming a structured light pattern, are transmitted by the diffractive optical element. The diffractive optical element may be arranged such that the light is to be incident on the diffractive optical element at a substantially non-normal angle of incidence. The substantially non-normal angle of incidence may be designed to cause the diffractive optical element to transmit a zero-order beam of the light outside of a field of view associated with the diffractive optical element.

Laser light emanates from optical components that are mounted on a substrate, each optical component being coupled to an optical fiber that delivers laser radiation combined from multiple lasers. A linear or elliptical holographic diffuser is located to diffuse the light emanating from the optical components. The laser wavelengths excite plant photopigments for predetermined physiological responses, and the light source intensities may be temporally modulated to maximize photosynthesis and control photomorphogenesis responses. Each laser is independently controlled.

Laser light emanates from optical components that are mounted on a substrate, each optical component being coupled to an optical fiber that delivers laser radiation combined from multiple lasers. A linear or elliptical holographic diffuser is located to diffuse the light emanating from the optical components. The laser wavelengths excite plant photopigments for predetermined physiological responses, and the light source intensities may be temporally modulated to maximize photosynthesis and control photomorphogenesis responses. Each laser is independently controlled.