An optical waveguide device includes a substrate on which an intermediate layer, a thin-film LN layer of lithium niobate, and a buffer layer are stacked; an optical waveguide formed in the thin-film LN layer; and a plurality of electrodes near the optical waveguide. The intermediate layer and the buffer layer contain a same material of a metal element of any one of group 3 of group 18 of a periodic table of elements.

An optical waveguide device includes a substrate on which an intermediate layer, a thin-film LN layer of lithium niobate, and a buffer layer are stacked; an optical waveguide formed in the thin-film LN layer; and a plurality of electrodes near the optical waveguide. The intermediate layer and the buffer layer contain a same material of a metal element of any one of group 3 of group 18 of a periodic table of elements.

An optical waveguide device has a substrate, an intermediate layer, a thin-film LN layer containing an X-cut lithium niobate, and a buffer layer stacked on the substrate, and an optical waveguide having a ridge shape formed in the thin-film LN layer. The optical waveguide device includes a plurality of electrodes provided, respectively, at a first side and a second side of the optical waveguide. The electrodes are disposed so that respective bottom surfaces thereof are at positions lower than a position of a surface of the buffer layer.

An optical waveguide device has a substrate, an intermediate layer, a thin-film LN layer containing an X-cut lithium niobate, and a buffer layer stacked on the substrate, and an optical waveguide having a ridge shape formed in the thin-film LN layer. The optical waveguide device includes a plurality of electrodes provided, respectively, at a first side and a second side of the optical waveguide. The electrodes are disposed so that respective bottom surfaces thereof are at positions lower than a position of a surface of the buffer layer.

An optical device includes a thin film Lithium Niobate (LN) layer, a first optical waveguide, and a second optical waveguide. The thin film LN layer is an X-cut or a Y-cut LN layer. The first optical waveguide is an optical waveguide that is formed on the thin film LN layer along a direction that is substantially perpendicular to a Z direction of a crystal axis of the thin film LN layer. The second optical waveguide is an optical waveguide that is routed and connected to the first optical waveguide. At least a part of a core of the first optical waveguide is made thicker than a core of the second optical waveguide.

An optical device includes a thin film Lithium Niobate (LN) layer, a first optical waveguide, and a second optical waveguide. The thin film LN layer is an X-cut or a Y-cut LN layer. The first optical waveguide is an optical waveguide that is formed on the thin film LN layer along a direction that is substantially perpendicular to a Z direction of a crystal axis of the thin film LN layer. The second optical waveguide is an optical waveguide that is routed and connected to the first optical waveguide. At least a part of a core of the first optical waveguide is made thicker than a core of the second optical waveguide.

A waveguide component includes a waveguide, which is at least partially transparent or translucent with respect to light and is set up in such a way that light can be conducted at least partially through the waveguide. The waveguide includes a waveguide core, a first casing region, and a second casing region. The waveguide core is formed from one or more spatially separated elements of at least one waveguide core material. The first casing region, which includes at least one electro-optical material, interacts with light guided in the waveguide. The first casing region is disposed around the one or more elements of the waveguide core. The second casing region includes at least one dielectric material. The second casing region is arranged around the first casing region and/or the waveguide core. The waveguide component further includes at least two line regions that are at least partially electrically conductive.

A waveguide component includes a waveguide, which is at least partially transparent or translucent with respect to light and is set up in such a way that light can be conducted at least partially through the waveguide. The waveguide includes a waveguide core, a first casing region, and a second casing region. The waveguide core is formed from one or more spatially separated elements of at least one waveguide core material. The first casing region, which includes at least one electro-optical material, interacts with light guided in the waveguide. The first casing region is disposed around the one or more elements of the waveguide core. The second casing region includes at least one dielectric material. The second casing region is arranged around the first casing region and/or the waveguide core. The waveguide component further includes at least two line regions that are at least partially electrically conductive.

A laminate (22) is formed on a semiconductor substrate (10). Two or more grooves (54) are formed in the laminate (22). A mesa (24) with two grooves among the two or more grooves (54) positioned on both sides is formed. An insulating resin film (30) is embedded into the two or more grooves (54). A first opening (32) is formed at the insulating resin film (30) embedded in one of the two or more grooves (54) and an electrode (46) extracted upward from a bottom surface (36) is formed. A first side surface (34) of the insulating resin film (30) is inclined in a forward tapered direction.

The invention provides an optical system and method for outputting a modulated signal comprising a single multimode interference (MMI) device having at least two inputs configured with a fixed phase and an output, wherein the output modulated signal is controlled by modulating the input power of at 5 least one of the inputs. The invention only requires a single MMI device to operate as the relative phase between the two inputs are fixed relative each other and one of the inputs can be used to modulate the output by modulating the power at a single input. In further embodiments, the invention shows how correct phases can be set by a single MMI device. Thus, no more than two 10 MMIs are required in conjunction with phase or amplitude modulating elements to fully generate a BPSK or QPSK signal.