Laser and inspection systems that generate laser output light at sub-200 nm wavelengths using fundamental light at approximately 1064 nm. A second harmonic generator module generates second harmonic light directed to both an optical parametric (OP) module, which generates down-converted signal (idler light), and to a fifth harmonic generator module, which generates fifth harmonic light. The OP module includes an optical parametric oscillator that is configured to generate the idler signal at approximately 0.5 times the fundamental frequency. The idler light and fifth harmonic light are then mixed by a frequency mixing module to generate the laser output light having an output frequency equal to approximately 5.5 times the fundamental frequency.

Efficient harmonic light generation can be achieved with ultrathin films by coupling an incident pump wave to an epsilon-near-zero (ENZ) mode of the thin film. As an example, efficient third harmonic generation from an indium tin oxide nanofilm (λ/42 thick) on a glass substrate for a pump wavelength of 1.4 μm was demonstrated. A conversion efficiency of 3.3×10.sup.−6 was achieved by exploiting the field enhancement properties of the ENZ mode with an enhancement factor of 200. This nanoscale frequency conversion method is applicable to other plasmonic materials and reststrahlen materials in proximity of the longitudinal optical phonon frequencies.

A method for extending and enhancing bright coherent high-order harmonic generation into the VUV-EUV-X-ray regions of the spectrum involves a way of accomplishing phase matching or effective phase matching of extreme upconversion of laser light at high conversion efficiency, approaching 10.sup.−3 in some spectral regions, and at significantly higher photon energies in a waveguide geometry, in a self-guiding geometry, a gas cell, or a loosely focusing geometry, containing nonlinear medium. The extension and enhancement of the coherent VUV, EUV, X-ray emission to high photon energies relies on using VUV-UV-VIS lasers of shorter wavelength. This leads to enhancement of macroscopic phase matching parameters due to stronger contribution of linear and nonlinear dispersion of both atoms and ions, combined with a strong microscopic single-atom yield.

An method for generating illuminating radiation in an illumination apparatus for use in an inspection apparatus for use in lithographic processes is described. A driving radiation beam is provided that comprises a plurality of radiation pulses. The beam is split into first and second pluralities of driving radiation pulses. Each plurality of driving radiation pulses has a controllable characteristic. The first and second pluralities may be used to generate an illuminating radiation beam with an output wavelength spectrum. The first and second controllable characteristics are controlled so as to control first and second portions respectively of the output wavelength spectrum of the illuminating radiation beam.

Embodiments of the present invention relate to methods and apparatus for detecting atmospheric NO at signal levels capable of distinguishing the NO isotopologues. More particularly, embodiments of the present invention relate to methods and apparatus for a single photon LIF sensor that pumps a vibronic transition near 215 nm and observes the resulting red shifted fluorescence from about 255 to about 267 nm. Embodiments of the present system uses a NO-LIF measurement fiber-amplified laser apparatus capable of: generating laser linewidth that is sufficiently narrow to resolve the Doppler broadened NO spectrum at room temperature and thereby achieve high signal levels and distinguish the NO isotopologues; generating laser repetition rate sufficient to enable single-photon counting of the fluorescence signal; and having size, weight and environmental robustness allowing for integration onto airborne platforms.

Apparatus and methods for generating controllable, narrow-band radiation at short wavelengths, driven by two colors injected into a structured waveguide. The use of multicolor excitation with the structured waveguide allows the use of very small guided beam diameters, without damaging the waveguide. Reduced guided wave mode area combined with low intensities required to drive wave-mixing frequency conversion allow the use of very compact, high average power, moderate peak intensity femtosecond fiber laser technology to drive useful conversion efficiency of laser light into the deep-UV and vacuum-UV at MHz repetition rates.

A nonlinear crystal including stacked Strontium tetraborate SrB.sub.4O.sub.7 (SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency converting stage of a laser assembly to generate laser output light having a wavelength in the range of 125 nm to 183 nm. One or more fundamental light beams having fundamental wavelengths between 1 and 1.1 μm are doubled and/or summed using multiple intermediate frequency conversion stages to generate one or more intermediate light beam frequencies (e.g., second through eighth harmonics, or sums thereof), and then the final frequency converting stage utilizes the nonlinear crystal to either double a single intermediate light beam frequency or to sum two intermediate light beam frequencies to generate the desired laser output light at high power and photon energy levels. A method and inspection system incorporating the laser assembly is also described.

The system and method of producing a first path comprising a pulse stretcher for a mid-wave infrared (MWIR) signal, an optical parametric chirped-pulse amplification (OPCPA) amplifier, and a MWIR compressor for producing a first beam in a MWIR portion of the spectrum and a second path comprising a pulse stretcher for a long wave infrared (LWIR) signal, an OPCPA amplifier, and a LWIR compressor for producing a second beam in a LWIR portion of the spectrum. Each beam, on its own, is configured to produce laser-matter interactions at long range (100s of meters), having nonlinear effects and favoring supercontinuum generation spanning multiple octaves, that is temporally and spatially overlapped with the fundamental laser beam.

Apparatus and methods for improved HHG of ultrashort pulse laser beams. A HHG assembly includes a gas distribution block and a waveguide cartridge having a HHG hollow core waveguide. The waveguide cartridge is attached to the gas distribution block and may be removed and replaced, while the gas distribution block remains affixed within the apparatus. The gas distribution block is configured to maintain a pressure profile within the hollow core fiber. The system also includes two operating beam sensors and two actuatable mirrors. The operating beam sensors are fixed with respect to the HHG assembly. The system is aligned before operation by adjusting the actuatable mirrors to optimize a sample beam through the waveguide and recording the position of the beam on the operating beam sensors. In operation, the mirrors are actuated to maintain the same positions of the input beam on the operating beam sensors.

An illumination source apparatus (500), suitable for use in a metrology apparatus for the characterization of a structure on a substrate, the illumination source apparatus comprising: a high harmonic generation, HHG, medium (502); a pump radiation source (506) operable to emit a beam of pump radiation (508); and adjustable transformation optics (510) configured to adjustably transform the transverse spatial profile of the beam of pump radiation to produce a transformed beam (518) such that relative to the centre axis of the transformed beam, a central region of the transformed beam has substantially zero intensity and an outer region which is radially outwards from the centre axis of the transformed beam has a non-zero intensity, wherein the transformed beam is arranged to excite the HHG medium so as to generate high harmonic radiation (540), wherein the location of said outer region is dependent on an adjustment setting of the adjustable transformation optics.