In a device for generating output laser pulses having a tunable central wavelength, based on parametric amplification, a laser system is to be provided that has less complexity, but that nevertheless provides great tunability for the wavelength, permits rapid switching of the wavelength, and allows the spectral bandwidth of the emitted pulses to be adjusted. This is attained in that for adjustability of the bandwidth of the output laser pulses, an optical device is provided that is designed to influence the spectral phase of the pump pulses as a function of the spectral phase of the seed pulses.

A frequency-doubled laser, including: a first reflecting mirror, a second reflecting mirror, a gain medium, a telescope module, a polarizing element, and a nonlinear crystal; the first reflecting mirror and the second reflecting mirror are spaced apart to form a resonator of the frequency-doubled laser; the polarizing element, the gain medium, the telescope module, and the nonlinear crystal are located in the resonator, and the telescope module is located between the gain medium and the nonlinear crystal. The present disclosure further provides a method of generating harmonic laser. The frequency-doubled laser and the method of generating harmonic laser make the position of nonlinear crystal more flexible, and the possibility of damage to the nonlinear crystal is reduced.

In a device for generating output laser pulses having a tunable central wavelength, based on parametric amplification, a laser system is to be provided that has less complexity, but that nevertheless provides great tunability for the wavelength, permits rapid switching of the wavelength, and allows the spectral bandwidth of the emitted pulses to be adjusted. This is attained in that for adjustability of the bandwidth of the output laser pulses, an optical device is provided that is designed to influence the spectral phase of the pump pulses as a function of the spectral phase of the seed pulses.

A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source configured to output illumination having a first spectral frequency and an optical frequency converter. The optical frequency converter can be configured to receive the illumination having the first spectral frequency from the illumination source and configured to output pump illumination having a second spectral frequency that is different from the first spectral frequency.

A light source device according to the present disclosure that is provided with a semiconductor laser unit configured to emit excitation light of a prescribed wavelength, a wavelength conversion unit configured to amplify the excitation light by causing the excitation light to resonate and generate output light of a different wavelength from the excitation light using a prescribed non-linear crystal, the wavelength conversion unit including a first optical path for amplifying the excitation light, and a second optical path for generating the output light, a first servo mechanism configured to control an optical path length of the first optical path, and a second servo mechanism configured to control an optical path length of the second optical path.

An optical frequency comb light source and an optical frequency comb generation method, where the light source includes a laser diode, a coupler, a Kerr nonlinear device, a beam splitter, and a phase shifter. The laser diode is connected to one input port of the coupler, and the other input port of the coupler is connected to an output port of the phase shifter. An output port of the coupler is connected to an input port of the Kerr nonlinear device. An output port of the Kerr nonlinear device is connected to an input port of the beam splitter. One output port of the beam splitter is connected to an input port of the phase shifter. The other output port of the beam splitter is configured to output a plurality of optical frequency combs. A multi-wavelength light source with relatively high power may be provided.

The present invention relates to a system and method for generating wavelength-tunable laser output pulses using parametric processes, wherein a simultaneous and tuned tuning of the pump pulse wavelength and repetition rate ensures a temporal overlap between pump and seed pulses in a parametric gain medium. Based on this parameter coupling, lasers with a wide tunable wavelength range can be obtained, which can be fully fiber-based and which are also suitable for modern nonlinear microscopy or fluorescence microscopy due to a particularly fast response.

A nonlinear crystal including stacked strontium tetraborate SrB.sub.4O.sub.7 (SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency doubling stage of a laser assembly to generate laser output light having a wavelength in the range of about 180 nm to 200 nm. One or more fundamental laser beams are frequency doubled, down-converted and/or summed using one or more frequency conversion stages to generate an intermediate frequency light with a corresponding wavelength in the range of about 360 nm to 400 nm, and then the final frequency converting stage utilizes the nonlinear crystal to double the frequency of the intermediate frequency light to generate the desired laser output light at high power. Methods, inspection systems, lithography systems and cutting systems incorporating the laser assembly are also described.

A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source configured to output illumination having a first spectral frequency and an optical frequency converter. The optical frequency converter can be configured to receive the illumination having the first spectral frequency from the illumination source and configured to output pump illumination having a second spectral frequency that is different from the first spectral frequency.

The present invention provides systems and methods for producing short laser pulses that are amplified and spectrally broadened in a bulk gain media. The bulk material, having laser gain and nonlinear properties, is concurrently exposed to an optical pump input and a seed input, the pump power being sufficient to amplify and spectrally broaden the seed pulse.