A device for generating individual photons with energy E includes quantum emitters, having at least one determined transition with the energy E from an energy level N* to a lower energy level N1. The emitters are near a propagation path running from first to second regions. The device also includes at least one light source to output light, for propagation along the path. The light has the energy E for resonant excitation of the energy level N*. The emitters are arranged so that optionally exactly Z emitters are illuminated, forming an optical thickness τ>0 for the light along the path. The number Z lies in a range of ZO±10% and ZO is a number at which a maximum destructive interference in the second region occurs between a two-photon component of the light scattered on the ZO emitters and a two-photon component of the non-scattered light.

An electromagnetic radiation frequency, or equivalent wavelength, converter, the converter including a nonlinear optical component or part having or consisting of a predetermined nonlinear optical material, and a guiding module. The guiding module has a predetermined geometry defining or controlling an effective refractive index of the guiding module, and is configured to receive and guide pump light resulting in a guided pump beam. The nonlinear component or part is bonded with or joined to the guiding module. The bonding is configured to allow at least a part of the guided pump beam to overlap and/or evanescently couple into the nonlinear optical material, and the nonlinear optical component or part is configured to convert the guided pump beam in the nonlinear optical material to an un-guided signal mode radiated as an output light signal at a different frequency or an equivalent wavelength.

The present invention describes a laser system for eliminating astigmatism to produce an elliptical laser beam that has an ellipticity between about 0.9 to 1.0. The laser system described herein allows for increased conversion efficiency and output powers. on-linear optical elements in the laser system eliminate astigmatism. The laser system comprises one or more cavities with wavelength splitters that act as dual-minor chambers for single-pass light transmission through the non-linear optical elements to reduce cavity size or as beam splitters for double-pass light transmission through the non-linear optical elements to increase laser output power. The laser system may also include a birefringent filter and/or etalon in the first cavity for polarization and wavelength tuning. The laser system may also generate a high-power, deep-ultraviolet laser output. The laser system may also be devoid of curved mirrors and non-normal incidence reflection to eliminate astigmatism.

A frequency conversion laser system is configured with a single mode (SM) laser source outputting a pulsed pump beam at a fundamental frequency and a nonlinear optical system operating to convert the fundamental frequency sequentially to a second harmonic (SH) and then third harmonic (TH). The nonlinear optical system includes an elongated SHG crystal traversed by the SM pulsed pump beam which generates the SH beam. The SHG crystal has an output surface inclined relative to a longitudinal axis of the SHG crystal at a first wedge angle different from a right angle. The nonlinear optical system further has an elongated THG crystal with an input surface which is impinged upon by a remainder of the pump and SHG beams which propagate through the THG crystal at a walk-off angle therebetween to generate a third harmonic (TH) beam, the input surface of the THG crystal being inclined to a longitudinal axis of the THG crystal at a second wedge angle. The output and input surfaces of respective SHG and THG crystals are inclined so as to minimize the walk-off angle between SH and IR pointing vectors in the THG crystal thereby improving the conversion efficiency and TH output beam's ellipticity.

Systems and methods for measuring or inspecting semiconductor structures using broadband infrared radiation are disclosed. The system may include an illumination source comprising a pump source configured to generate pump light and a nonlinear optical (NLO) assembly configured to generate broadband IR radiation in response to the pump light. The system may also include a detector assembly and a set of optics configured to direct the IR radiation onto a sample and direct a portion of the IR radiation reflected and/or scattered from the sample to the detector assembly.

A wavelength conversion device includes a second-order nonlinear optical medium with a polarization inversion structure, wherein the wavelength conversion device performs wavelength conversion between three wavelengths according to a relationship of 1/λ.sub.1=1/λ.sub.2+1/λ.sub.3, a polarization inversion period Λ of the polarization inversion structure is divided into 2a regions, and when the 2a regions divided from the polarization inversion period Λ each has a width ratio of an inverted region and a non-inverted region of r to 1−r (where 0≤r≤1), a ratio value r is set such that, when one period in phase of a sine function from 0 to 2π is divided into 2a regions, a value of the sine function in a center of each divided region is (1−2r)±0.1.

A nonlinear crystal grating assembly including two integral nonlinear crystal grating structures having inverted crystal axes and having parallel spaced-apart mesas with predetermined mesa widths arranged such that, when assembled in an interdigitated configuration, the mesas of the two grating structures form an alternating grating pattern that is aligned with a propagation direction of input light, thereby creating a periodic structure for quasi-phase-matching (QPM). The nonlinear crystal grating structures are formed using strontium tetraborate, lithium triborate or another nonlinear crystal material. The nonlinear crystal grating assembly is utilized in a laser assembly in which fundamental wavelengths are doubled and/or summed using intermediate frequency conversion stages, and then a final frequency converting stage utilizes the nonlinear crystal grating assembly to double or sum one or more intermediate light beam frequencies to generate laser output light at high power and photon energy levels. A method and inspection system are also described.

A photon source for generating entangled photons includes a pump laser, and 4-N, N-dimethylamino-4′-N′-methyl-stilbazolium-tosylate (DAST) crystals, the pump laser pumping the DAST crystals with pump photons to generate a stream of pairs of entangled photons, each pair comprising a signal photon and an idler photon.

A system for resonantly enhanced frequency conversion includes a nonlinear crystal for frequency converting a pump laser beam, and mirrors forming a ring resonator for the pump laser beam such that a closed propagation path of the pump laser beam, inside the ring resonator, passes through the nonlinear crystal. The mirrors include an adaptive mirror, a curved-mirror pair positioned in a first segment of the propagation path spanning between the adaptive mirror and the nonlinear crystal, and an input coupler for coupling the pump laser beam into the ring resonator. The curved-mirror pair forms an imaging system having conjugate planes at the adaptive mirror and the nonlinear crystal. The input coupler is positioned in a second segment of the propagation path that spans between the adaptive mirror and the nonlinear crystal and does not include deflection by the curved-mirror pair.

An optical element includes an optical crystal and an antireflection film coating the surface of the optical crystal. The antireflection film contains an organic compound that includes, as a structural unit, at least one of a compound containing a cyclic structure to which a fluorine atom is bound and a compound containing a cyclic olefin structure.