An objective of the present disclosure is to obtain a light guide and an image reading apparatus capable of efficiently irradiating an object to be irradiated (1). The light guide and the image reading apparatus include a rod-shaped light guide main body (2) extending in the longitudinal direction, a first end face (3) that is an end face of the light guide main body (2) along the transverse direction, a light scattering pattern (5) that scatters light that enters from the first end face (3) and is guided inside the light guide main body (2), and a light emission surface portion (6) formed on the light guide main body along a longitudinal direction, the light emission surface portion (6) being a surface from which the light scattered at the light scattering pattern (5) is emitted to outside the light guide main body (2) after being reflected on a wall surface of the light guide main body (2).

The light emission surface portion (6) includes a first light emission surface (6a) that is disposed near the first end face (3) in the longitudinal direction and a second light emission surface (6b) that is contiguous with the first light emission surface (6a) in the longitudinal direction. A width of the first light emission surface (6a) in the transverse direction is shorter than a width of the second light emission surface (6b) in the transverse direction.

An illuminating device according to an embodiment included in an image reading apparatus and an image forming apparatus includes light source portions, light-guiding members for illuminating an illumination target from an elongated light emitting face that extends in a longitudinal direction, by guiding light from the light source portions, and holding members for holding the light-guiding members. The holding members include holding portions for removably holding the light-guiding members, and tilted portions that reflect light emitted from the light emitting face, the tilted portions extending from a front end on the light emitting face side of the holding portions, obliquely widening with increasing distance from the light-guiding members.

An illuminating device according to an embodiment included in an image reading apparatus and an image forming apparatus includes light source portions, light-guiding members for illuminating an illumination target from an elongated light emitting face that extends in a longitudinal direction, by guiding light from the light source portions, and holding members for holding the light-guiding members. The holding members include holding portions for removably holding the light-guiding members, and tilted portions that reflect light emitted from the light emitting face, the tilted portions extending from a front end on the light emitting face side of the holding portions, obliquely widening with increasing distance from the light-guiding members.

A pellicle that includes graphene is constructed and arranged for an EUV reticle. A multilayer mirror includes graphene as an outermost layer.

A pellicle that includes graphene is constructed and arranged for an EUV reticle. A multilayer mirror includes graphene as an outermost layer.

An illumination device includes a light source and a rod-like light guide extending in a longitudinal direction for guiding incident light to an object to be illuminated. The light source is disposed at an end of the light guide extending in a longitudinal direction. The light guide includes an incident surface at the longitudinal end to receive light emitted from the light source, a flat emission surface to emit light incident on the light guide toward the object to be illuminated, a parabolic reflective surface to reflect, toward the emission surface, light from a focus of the paraboloid shape of the refractive surface or light passing through the focus from a predetermined area, and a light-scattering portion, having a predetermined area, to scatter light entering through the incident surface and reflect the light toward the reflective surface. The light-scattering portion is placed at the focus of the paraboloid shape or at a position where light reflected by the scattering area on the light-scattering portion passes through the focus.

An inspection apparatus (140) measures asymmetry or other property of target structures (T) formed by a lithographic process on a substrate. For a given set of illumination conditions, accuracy of said measurement is influenced strongly by process variations across the substrate and/or between substrates. The apparatus is arranged to collect radiation scattered by a plurality of structures under two or more variants of said illumination conditions (p1, p1, p1+; 1, 1, 1+). A processing system (PU) is arranged to derive the measurement of said property using radiation collected under a different selection or combination of said variants for different ones of said structures. The variants may be for example in wavelength, or in angular distribution, or in any characteristic of the illumination conditions. Selection and/or combination of variants is made with reference to a signal quality (302, Q, A) observed in the different variants.

A sensor arrangement includes at least one position sensor apparatus for providing a position signal for a mirror and an evaluation apparatus for ascertaining the position of the mirror depending on the position signal.

A projection lens of an EUV-lithographic projection exposure system with at least two reflective optical elements each comprising a body and a reflective surface for projecting an object field on a reticle onto an image field on a substrate if the projection lens is exposed with an exposure power of EUV light, wherein the bodies of at least two reflective optical elements comprise a material with a temperature dependent coefficient of thermal expansion which is zero at respective zero cross temperatures, and wherein the absolute value of the difference between the zero cross temperatures is more than 6K.

An illuminating device capable of stably illuminating an irradiated object such as a document while suppressing light loss with a simply structure is provided. An LED array and a reflective plate are disposed sandwiching a slit (St) through which light reflected by a document MS passes and a light-guiding member is disposed on the side of the LED array. The light-guiding member includes a direct emission unit disposed between an illumination range y centered on a document reading position and the LED array and an indirect emission unit disposed between the reflective plate and the LED array, a light incidence face of the direct emission unit and a light incidence face of the indirect emission unit are disposed at mutually different position around the LED array, and the LED array is disposed on a side of an interior angle formed by the light incidence faces.