Provided are a pellicle for a photomask, which protects the photomask from external contamination and an exposure apparatus including the pellicle for the photomask. The pellicle for the photomask includes a pellicle membrane provided spaced apart from the photomask. The pellicle membrane includes a semiconductor having a two-dimensional (2D) crystalline structure.

A pellicle for a photomask, a reticle including the same, and an exposure apparatus for lithography are provided. The pellicle may include a pellicle membrane and a passivation member. The pellicle membrane may include a carbon-based material having defects. The passivation member may cover the defects of the carbon-based material. The passivation member may include an inorganic material. The passivation member may be disposed on one or two surfaces of the pellicle membrane. The pellicle for the photomask may be applied to extreme ultraviolet (EUV) lithography.

A lithographic apparatus includes a patterning device support to support a patterning device, the patterning device system including a moveable structure movably arranged relative to an object, a patterning device holder movably arranged relative to the movable structure to hold the patterning device, an actuator to move the movable structure relative to the object, and an ultra short stroke actuator to move the patterning device holder with respect to the movable structure; a substrate support to hold a substrate; a projection system to project a patterned radiation beam onto a target portion of the substrate; a transmission image sensor for measuring a position of the patterned radiation beam downstream of the projection system; and a calibrator for determining a relationship between magnitude of an applied control signal to the ultra short stroke actuator and resulting change in position of the patterned radiation beam and/or patterning device holder and/or patterning device.

A reticle stage is provided, including an electrostatic chuck and an acoustic wave transducer. The electrostatic chuck includes multiple chucking electrodes embedded in a dielectric body and configured to secure a reticle to a chuck surface of the dielectric body by electrostatic attraction. The acoustic wave transducer is disposed on the chuck surface and configured to impart a surface acoustic wave to the chuck surface to vibrate the chuck surface, thereby removing the reticle from the reticle stage.

Provided is a document reading apparatus wherein plurality of color reference boards can be flexibly changed. A document reading apparatus includes a document reading module, a document cover provided at a position where the document cover faces against the document reading module, an abutment portion provided in the document cover, a plurality of color reference boards detachably set up relative to the document cover, and a coupling portion that couples the plurality of color reference boards together and that abuts against the abutment portion. Each of the plurality of color reference boards includes a surface that faces against the document reading module and that has different reflectance.

An image scanning device includes a placement-area image data capturing unit that captures placement-area image data corresponding to an area where documents are placed on a platen, a document image data capturing unit that captures pieces of document image data, each of which corresponds to one of the documents, and acquires positions of the pieces of document image data, in accordance with the placement-area image data captured by the placement-area image data capturing unit, a placement order acquiring unit that acquires an order in which the documents, each of which corresponds to one of the pieces of document image data, have been placed in accordance with at least the positions of the pieces of document image data, each of which corresponds to one of the documents, and a sequencing unit that assigns to the pieces of document image data the order acquired by the placement order acquiring unit.

An image scanning device includes a placement-area image data capturing unit that captures placement-area image data corresponding to an area where documents are placed on a platen, a document image data capturing unit that captures pieces of document image data, each of which corresponds to one of the documents, and acquires positions of the pieces of document image data, in accordance with the placement-area image data captured by the placement-area image data capturing unit, a placement order acquiring unit that acquires an order in which the documents, each of which corresponds to one of the pieces of document image data, have been placed in accordance with at least the positions of the pieces of document image data, each of which corresponds to one of the documents, and a sequencing unit that assigns to the pieces of document image data the order acquired by the placement order acquiring unit.

An image scanning device includes a placement-area image data capturing unit that captures placement-area image data corresponding to an area where documents are placed on a platen, a document image data capturing unit that captures pieces of document image data, each of which corresponds to one of the documents, and acquires positions of the pieces of document image data, in accordance with the placement-area image data captured by the placement-area image data capturing unit, a placement order acquiring unit that acquires an order in which the documents, each of which corresponds to one of the pieces of document image data, have been placed in accordance with at least the positions of the pieces of document image data, each of which corresponds to one of the documents, and a sequencing unit that assigns to the pieces of document image data the order acquired by the placement order acquiring unit.

An image scanning device includes a placement-area image data capturing unit that captures placement-area image data corresponding to an area where documents are placed on a platen, a document image data capturing unit that captures pieces of document image data, each of which corresponds to one of the documents, and acquires positions of the pieces of document image data, in accordance with the placement-area image data captured by the placement-area image data capturing unit, a placement order acquiring unit that acquires an order in which the documents, each of which corresponds to one of the pieces of document image data, have been placed in accordance with at least the positions of the pieces of document image data, each of which corresponds to one of the documents, and a sequencing unit that assigns to the pieces of document image data the order acquired by the placement order acquiring unit.

A reading device (100) includes a reading section (143), a casing (160), a cover section (110), a conveyance section (130), an interposed member (170), a controller (153), a cable (180), and a linking member (190). The casing (160) houses the reading section (143) therein. It is possible to place the cover section (110) on the casing (160). The conveyance section (130) is housed in the cover section (110) and conveys a sheet. The interposed member (170) is interposed between the cover section (110) and the casing (160). The controller (153) is housed in the casing (160) and controls the conveyance section (130). The cable (180) is connected to the controller (153), is also connected to the conveyance section (130), and transfers a control signal output by the controller (153) to the conveyance section (130). The linking member (190) is linked to the cover section (110) and is also linked to the casing (160).