A digital camera including a printer includes a transport roller pair that transports an instant film, an exposure unit that exposes an image onto the instant film, a spreading roller pair that spreads a developer into a gap of the instant film by crushing a developer pod of the exposed instant film, a spreading control member that is positioned between the transport roller pair and the spreading roller pair, extends in a width direction of the instant film, and controls the developer spread into the gap, and a mechanical switch that is positioned near the spreading control member.

A substrate processing apparatus includes an indexer block, a first processing block, a second processing block, and an interface block. The indexer block includes a pair of carrier platforms and a transport section. A carrier storing a plurality of substrates in multiple stages is placed in each of the carrier platforms. The transport section includes transport mechanisms. The transport mechanisms concurrently transport the substrates.

There is provided an encoder device to measure a relative moving amount between a first and second members. The encoder device includes: a reflective-type diffraction grating on the first member; a light source unit to radiate a measuring light; a first optical member on the second member; a first and second reflecting units on the second member that cause first and third diffracted lights generated via diffraction of the measuring light and having orders different from each other to come into the diffraction grating respectively, and cause second and fourth diffracted lights generated via diffraction of the first and third diffracted lights respectively to come into the first optical member; photo-detectors configured to detect interference lights between two diffracted lights and other light beam respectively; and a measuring unit to obtain the relative moving amount by using detection signals from the photo-detectors.

A scanner cover including a first plate and a second plate is provided. The first plate has a first surface; multiple compressible and deformable elastic structures are arranged protruding on the first surface. The second plate is stacked on the first plate and the second plate has a second surface facing to the first surface, the elastic structures are contacted with the second surface, and deformation of each elastic structure is contained in the second plate while the elastic structures are compressed. While the first plate and the second plate are pressed to move close to each other, the elastic structures are compressed and a restoring force is thereby provided between the first plate and the second plate.

A lithography apparatus includes an original holder configured to hold and move an original, a measurement unit configured to measure a misalignment amount of the original with respect to the original holder, and a controller configured to control movement of the original holder. The controller repeatedly performs preliminary driving for moving the original holder before performing the pattern formation. At this time, if the misalignment amount measured by the measurement unit converges to a predetermined convergence value while the preliminary driving is repeatedly performed, the controller ends the preliminary driving.

A reticle transfer apparatus includes a reticle, a reticle stage (4) and a robot (2). The robot (2) is configured to support, transport and transfer the reticle onto the reticle stage (4). The apparatus further includes: a first set of marks (52) and a second set of marks (53), both provided on the reticle; a pre-alignment unit (3), disposed on one side of the reticle stage (4) and configured to perform a first pre-alignment process by detecting the first set of marks (52) and perform a second pre-alignment process by detecting the second set of marks (53) during the transfer of the reticle; and a control unit, configured to adjust the position of the reticle relative to the reticle stage (4) based on the results of the first pre-alignment process such that the reticle is prevented from colliding with the reticle stage (4) and to adjust the position of the reticle relative to the reticle stage (4) based on the results of the second pre-alignment process such that the reticle is positioned in a predetermined range relative to the reticle stage (4). A reticle transfer method is also disclosed.

An apparatus for a lithography device is provided, which includes a laser-based particle eliminating component and a particle collector. The laser-based particle eliminating component includes a laser emitter and a laser absorbing member. The laser emitter is configured to emit laser beams for irradiating particles in a space near a photomask of the lithography device. The laser absorbing member is disposed opposite to the laser emitter for absorbing the laser beams. The particle collector is configured for collecting the irradiated particles.

A document pressing unit is openable with respect to an apparatus body including a placement portion on which a document is placed, and is configured to press the document from above. The document pressing unit includes a body frame, a pair of hinge units, a pair of metal fixing members, and fastening screws. The body frame is able to press the document. The hinge units respectively include hinge legs mounted on the apparatus body, and are mounted with a certain distance in a left-right direction on a rear end of the body frame to openably support the body frame with respect to the apparatus body. The fixing members fix the hinge units to the body frame, respectively. The fastening screws fasten the fixing member and the hinge unit through the body frame so that the fixing member and the hinge unit sandwich the body frame in an up-down direction.

Disclosed is a document holder assembly for attachment to a mobile device or its enclosure. The document holder assembly has an imaging position in which the document is positioned in the line of sight of the device camera, and a folded position in which the assembly is conveniently stored close to the attachment face. In some embodiments the distance between the document and the camera in the imaging position may be adjusted to achieve an optimum document image.

There is provided an image reading apparatus including a first reading sensor provided in a first reading unit and configured to read one surface of the sheet, a second reading sensor provided in a second reading unit provided to face the first reading sensor and configured to read an image on the other surface of the sheet, a first background portion serving as a reading background of the first reading sensor, a second background portion serving as a reading background of the second reading sensor, and a moving portion configured to integrally move the first reading sensor and the second background portion, wherein the first reading unit includes a sensor case in which the first reading sensor is provided, and the sensor case is fixed to the apparatus main body.