G03F7/2012

TEMPLATE, METHOD FOR FABRICATING TEMPLATE, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
20220050392 · 2022-02-17 · ·

A template includes: a base material having a principal surface; a mesa structure provided on the principal surface and having a first surface; and a silicon film that is provided on the first surface of the mesa structure, has a projection-and-depression pattern, and is made of a material different from a material for the base material.

Multi-chemistry microlattice structures and methods of manufacturing the same

A multi-chemistry structure includes: a plurality of interconnected polymer struts arranged in a lattice; a first layer of the lattice including a first array of first unit cells; a second layer of the lattice including a second array of second unit cells; at least one region of the lattice being formed of a first polymer; and at least one region of the lattice being formed of a second polymer different from the first polymer.

Multiple phase-shift photomask and semiconductor manufacturing method

Manufacturing of semiconductor devices often involves performed photolithography to pattern and etch the various features of those devices. Such photolithography involves masking and focusing light onto a surface of the semiconductor device for exposing and etching the features of the semiconductor devices. However, due to design specifications and other causes, the semiconductor devices may not have a perfectly flat light-incident surface. Rather, some areas of the semiconductor device may be raised or lowered relative to other areas of the semiconductor device. Therefore, focusing the light on one area causes another to become unfocused. By carefully designing a photomask to cause phase shifts of the light transmitted therethrough, focus across all areas of the semiconductor device can be achieved during photolithography, which results in sharp and accurate patterns formed on the semiconductor device.

Stacked microlattice materials and fabrication processes

A system and method for forming microlattice structures of large thickness. In one embodiment, a photomonomer resin is secured in a mold having a transparent bottom, the interior surface of which is coated with a mold-release agent. A substrate is placed in contact with the top surface of the photomonomer resin. The photomonomer resin is illuminated from below by one or more sources of collimated light, through a photomask, causing polymer waveguides to form, extending up to the substrate, forming a microlattice structure connected with the substrate. After a layer of microlattice structure has formed, the substrate is raised using a translation-rotation system, additional photomonomer resin is added to the mold, and the photomonomer resin is again illuminated through the photomask, to form an additional layer of microlattice structure. The process is repeated multiple times to form a stacked microlattice structure.

Method of improving print performance in flexographic printing plates
09720326 · 2017-08-01 ·

A method of making a relief image printing element from a photosensitive printing blank is provided. A photosensitive printing blank with a laser ablatable layer disposed on at least one photocurable layer is ablated with a laser to create an in situ mask. The printing blank is then exposed to at least one source of actinic radiation through the in situ mask to selectively cross link and cure portions of the photocurable layer. Diffusion of air into the at least one photocurable layer is limited during the exposing step and preferably at least one of the type, power and incident angle of illumination of the at least one source of actinic radiation is altered during the exposure step. The resulting relief image comprises a plurality of dots and a dot shape of the plurality of dots that provide optimal print performance on various substrates, including corrugated board.

FLEXOGRAPHIC PRINTING WITH REPEATING TILE INCLUDING DIFFERENT RANDOMNLY-POSITIONED FEATURE SHAPES
20210397096 · 2021-12-23 ·

A method for fabricating a flexographic printing plate for printing image patterns including one or more uniform image regions includes defining a repeating tile having a plurality of different feature shapes positioned in a pattern of pseudo-random feature locations. A plate formation pattern corresponding to the image pattern is determined wherein the repeating tile is applied in a tiled arrangement to the uniform image regions. The plate formation pattern is used to form a flexographic printing plate, wherein regions of the flexographic printing plate corresponding to the uniform image regions of the image pattern include a pattern of raised features in positions corresponding to the feature positions in the repeating tile.

FLEXOGRAPHIC PRINTING WITH REPEATING TILE OF RANDOMNLY-POSITIONED FEATURE SHAPES

A method for fabricating a flexographic printing plate for printing image patterns including one or more uniform image regions includes defining a repeating tile having a pattern of feature shapes positioned at pseudo-random feature locations. A plate formation pattern corresponding to the image pattern is determined wherein the repeating tile is applied in a tiled arrangement to the uniform image regions. The plate formation pattern is used to form a flexographic printing plate, wherein regions of the flexographic printing plate corresponding to the uniform image regions of the image pattern include a pattern of raised features in positions corresponding to the feature positions in the repeating tile.

Method and device for correcting an inhomogeneous intensity distribution of a radiation field generated by a radiation source
11364677 · 2022-06-21 · ·

The invention relates to a device for correcting an inhomogeneous intensity distribution of a radiation field generated by a radiation source, in particular a radiation source for a device for producing three-dimensional articles by the layer-by-layer solidifying, in a build plane, of a material that is solidifiable under the action of radiation. The device comprises a correcting or filtering device that is to be introduced, between the radiation source and the build plane, into a radiation path of a device for producing three-dimensional articles by the layer-by-layer solidifying of a material that is solidifiable under the action of radiation. Further, improved methods for producing a device for correcting an inhomogeneous intensity distribution of a radiation field generated by a radiation source, and methods and devices for producing a three-dimensional article are proposed.

Apparatus and Method for Exposure or Relief Precursors
20230264466 · 2023-08-24 · ·

An apparatus for exposure of a relief precursor having a first side and an opposite second side includes a light source to expose the relief precursor during relative movement between the light source and the relief plate precursor; a moving means to cause a first relative movement between the light source and the relief precursor to expose the first side of the relief precursor, to cause a second relative movement between the light source and the relief precursor to expose the second side of the relief precursor, and to move the light source between a first position and a second position. The first and second positions are on opposite sides of a plane of the relief precursor. At least one of the first and the second relative movement is a reciprocating movement.

FLUID DROPLET METHODOLOGY AND APPARATUS FOR IMPRINT LITHOGRAPHY

A method can be used to generate a fluid droplet pattern for an imprint lithography process using a fluid dispense system having fluid dispense ports. The method can include determining a fluid droplet pattern for dispensing a formable material onto a substrate, during a first pass, dispensing the formable material along a stitch line to form a first part of the fluid droplet pattern for an imprint field, where the stitch line runs from a first corner to a second corner of the imprint field. The method can also include offsetting the substrate and the fluid dispense ports relative to each other after dispensing the formable material during the first pass, and during a second pass, dispensing the formable material along the stitch line onto the substrate to form a second part of the fluid droplet pattern for the imprint field. An apparatus can be configured to carry out the method.