A method and apparatus for processing a lithographic printing plate precursor, comprising development with a first gum solution and subsequently with a second gum solution, wherein both gum solutions are provided in a cascade configuration whereby the second gum solution overflows into the first gum solution and the development is combined with mechanical rubbing and/or brushing by one or more flat brushes.

The present invention provides a substrate treating apparatus. The substrate treating apparatus includes: a first process chamber having a first treatment space therein; a second process chamber having a second treatment space therein; and an exhaust unit exhausting atmospheres of the first treatment space and the second treatment space, in which the exhaust unit includes: an integrated exhaust line; a first exhaust line connecting the first process chamber and the integrated exhaust line; a second exhaust line connecting the second process chamber and the integrated exhaust line; and a partition wall partitioning a partial section of a flow path within the integrated exhaust line into a first flow path through which a fluid exhausted through the first exhaust line flows and a second flow path through which a fluid discharged through the second exhaust line flows.

A liquid processing apparatus includes a holder that holds and rotates a substrate, a liquid supply that supplies a processing liquid to an upper surface of the substrate held by the holder, a first cup body annularly provided on a lower surface side of the substrate held by the holder and below a peripheral edge of the substrate, and a second cup body annularly provided on an inner side of the first cup body and having a plurality of annular protrusions that is concentrically arranged on a side of an opposing surface facing a lower surface of the substrate and protrudes toward the lower surface of the substrate.

The present disclosure provides a bowl and a substrate treatment apparatus.

The bowl includes: a bowl body disposed around a support unit supporting and rotating a substrate, and having an exhaust pipe formed in a lower portion thereof to be connected to an exhaust duct disposed in a lower side thereof; and an outlet guide formed in a lower portion of the exhaust pipe and having an outlet opening formed in an extension direction of the exhaust duct oriented toward an exhaust portion so as to guide gas introduced into the exhaust pipe from the bowl body, to the exhaust portion of the exhaust duct.

Provided are integrated processing equipment, including base, rotating device, and flow-guide device. The rotating device includes inclination-angle adjusting unit and rotating unit. The inclination-angle adjusting unit is arranged on the base, the rotating unit is connected with the inclination-angle adjusting unit, the rotating unit is used to carry the workpiece and can drive the workpiece to rotate around first axis, and the inclination-angle adjusting unit is used to drive the rotating unit to rotate around second axis at angle to the first axis. The flow-guide device includes frame body, liquid storage part and flow-guide part. The frame body is connected to the inclination-angle adjusting unit, both the liquid storage part and the flow-guide part are connected to the frame body, and the liquid storage part is used to transport the liquid to the flow-guide part, through which the liquid can flow to the workpiece positioned on the rotating unit.

A treatment method for a waste aqueous development liquid generated through development of a flexographic printing original plate by using an aqueous development liquid, the method including: a first filtration step of filtering the waste aqueous development liquid at 5 C. or more and 48 C. or less through a microfiltration membrane to give a recovered liquid and a concentrated waste liquid; and a reuse step of reusing the recovered liquid for development of a flexographic printing original plate.