An optical fiber splitter device comprising at least two optical fibers of different lengths is disclosed for partial or complete compensation of the optical path difference between waves interfering to generate a hologram or an interferogram. Various implementations of this fiber splitter device are described in apparatuses for holographic and interferometric imaging of microscopic and larger samples.

A low-cost digital holography microscope (DHM) that is capable of performing inspection at high speed while accurately inspecting an inspection object at high resolution, an inspection method using the DHM, and a method of manufacturing a semiconductor device by using the DHM are provided. The DHM includes: a light source configured to generate and output light; a beam splitter configured to cause the light to be incident on an inspection object and output reflected light from the inspection object; and a detector configured to detect the reflected light, wherein, when the reflected light includes interference light, the detector generates a hologram of the interference light, and wherein no lens is present in a path from the light source to the detector.

The present disclosure relates to improved holographic reconstruction device and a method. In one aspect, the present disclosure relates to improved holographic reconstruction device and method that can measure a digital hologram regardless of optical characteristics of an object to be measured, by an all-in-one type system integrating a transmissive system that measures an object transmitting light and a reflective system that measures an object reflecting light.

A device for producing a master diffraction grating includes a light source unit and a reflecting member 11. The light source unit forms a first interference fringe by irradiating a substrate surface of a master substrate 101 with light. The reflecting member 11 reflects the light from the light source unit reflected on the substrate surface of the master substrate 101 and guides the light again to the substrate surface side to form a second interference fringe. A resist pattern based on the first interference fringe and the second interference fringe is formed on the substrate surface of the master substrate 101.

The present disclosure relates to improved holographic reconstruction device and a method. In one aspect, the present disclosure relates to improved holographic reconstruction device and method that can measure a digital hologram regardless of optical characteristics of an object to be measured, by an all-in-one type system integrating a transmissive system that measures an object transmitting light and a reflective system that measures an object reflecting light.

A low-cost digital holography microscope (DHM) that is capable of performing inspection at high speed while accurately inspecting an inspection object at high resolution, an inspection method using the DHM, and a method of manufacturing a semiconductor device by using the DHM are provided. The DHM includes: a light source configured to generate and output light; a beam splitter configured to cause the light to be incident on an inspection object and output reflected light from the inspection object; and a detector configured to detect the reflected light, wherein, when the reflected light includes interference light, the detector generates a hologram of the interference light, and wherein no lens is present in a path from the light source to the detector.

The present disclosure relates to improved holographic reconstruction device and a method. In one aspect, the present disclosure relates to improved holographic reconstruction device and method that can measure a digital hologram regardless of optical characteristics of an object to be measured, by an all-in-one type system integrating a transmissive system that measures an object transmitting light and a reflective system that measures an object reflecting light.

Example embodiments relate to an integrated lens-free imaging device. One embodiment includes a lens-free imaging device for imaging a sample. The lens-free imaging device includes a radiation guiding structure that includes a first surface parallel with a second surface. The lens-free imaging device also includes an imaging region. The radiation guiding structure is adapted for receiving an incoming radiation wave, thereby obtaining a confined radiation wave. At least one perturbation is present in the radiation guiding structure for generating, from the confined radiation wave, a first radiation wave and a second radiation wave. The radiation guiding structure is configured to direct the first radiation wave out of the radiation guiding structure toward the first surface to a sample measurement region. The radiation guiding structure is further configured to direct the second radiation wave toward the second surface to the imaging region.

Systems, devices, and methods are described herein for performing digital holography to analyze dynamics of fluid flow. According to some aspects of this disclosure, a Digital Fresnel Reflection Holography (DFRH) system, which is arranged to utilize light backscattered from particles in a fluid chamber to create a hologram that may be processed to analyze characteristics of fluid flow. The DFRH system may utilize light reflected from an imaging window disposed between a light source and a sampling volume, to be analyzed as a reference wave, to form an interference pattern and resultant hologram. According to some aspects of this disclosure, the DFRH techniques may provide simple, cost-effective mechanisms with improved performance over other techniques for analyzing fluid flow using holography.

A device for producing a master diffraction grating includes a light source unit and a reflecting member 11. The light source unit forms a first interference fringe by irradiating a substrate surface of a master substrate 101 with light. The reflecting member 11 reflects the light from the light source unit reflected on the substrate surface of the master substrate 101 and guides the light again to the substrate surface side to form a second interference fringe. A resist pattern based on the first interference fringe and the second interference fringe is formed on the substrate surface of the master substrate 101.