G03H2001/267

MULTIPLE OFFSET INTERFEROMETER
20190250560 · 2019-08-15 ·

The invention relates to a device, such as a digital holographic microscope (1), for detecting and processing a first full image of a measurement object, measured with a first offset, wherein an arrangement is provided for generating at least one further full image with at least one offset that differs from said first offset.

WIDE-FIELD IMAGING OF BIREFRINGENT CRYSTALS AND OTHER MATERIALS USING LENS-FREE POLARIZED MICROSCOPE

A method of imaging a sample having birefringent crystals (or other materials) using a lens-free polarized microscopy device includes illuminating the sample contained on a sample holder with circularly polarized partially coherent or coherent light and capturing lower resolution holographic images of the birefringent crystals with an image sensor. A polarization analyzer unit made from a /4 retarder and a linear polarizer is positioned between the sample holder and the image sensor. The lower resolution holographic images are obtained with the polarization analyzer unit in two different orientations (e.g. 90 orientations). Phase-retrieved, higher resolution images of the birefringent crystals at the different orientations are obtained using the lower resolution holographic images. A differential image is generated from the respective phase-retrieved, higher resolution images. An object support mask is applied to identify the birefringent crystals which can then be pseudo-colored.

Holographic image recording and reconstructing method
10254713 · 2019-04-09 · ·

A holographic image recording method is disclosed, that is realized through utilizing a holographic image fetching and recording device, including the following steps: using an image fetching device to fetch an image of a target object placed on a rotation table rotating at a fixed speed, the image thus obtained is transmitted to a display panel through a connection line; using a light emitting unit to emit coherent light to a first reflector; that reflects the coherent light to light splitter; and the light splitter splits the coherent light along a first light path and a second light path into an object light and a reference light, and transmits them onto a holographic film to interfere with each other, to form a holographic image. A holographic image reconstructing method is also disclosed, to reconstruct and form a 3D holographic image floating above the holographic film.

Holographic microscope and manufacturing method of semiconductor device using the same

Provided is a holographic microscope including an input optical system configured to emit polarized input beam, a first beam splitter configured to emit an object beam by reflecting a portion of the polarized input beam, and emit a reference beam by transmitting a remaining portion of the polarized input beam, a reference optical system configured to separate the reference beam into a first reference beam and a second reference beam, a camera configured to receive the first reference beam and the second reference beam and the object beam that is reflected by an inspection object, the camera including a micro polarizer array, wherein a first polarization axis of the first reference beam is perpendicular to a second polarization axis of the second reference beam.

HOLOGRAPHIC MICROSCOPE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE USING THE SAME

Provided is a holographic microscope including an input optical system configured to emit polarized input beam, a first beam splitter configured to emit an object beam by reflecting a portion of the polarized input beam, and emit a reference beam by transmitting a remaining portion of the polarized input beam, a reference optical system configured to separate the reference beam into a first reference beam and a second reference beam, a camera configured to receive the first reference beam and the second reference beam and the object beam that is reflected by an inspection object, the camera including a micro polarizer array, wherein a first polarization axis of the first reference beam is perpendicular to a second polarization axis of the second reference beam.

Inline scanning holography system for phosphor and transmitter
12147193 · 2024-11-19 · ·

The present invention relates to an inline scanning holography system for a phosphor and a transmitter. According to the present invention, the inline scanning holography system includes a polarization sensitive lens that receives a linearly polarized beam and generates a first spherical wave of right-handed circular polarized light having a negative focal length and a second spherical wave of left-handed circular polarized light having a positive focal length, a polarizer that passes only a beam component in a predetermined polarization direction therethrough among components of the generated first and second spherical waves, a scanning unit for scanning a phosphor by using an interference beam generated between the first and second spherical waves passing through the polarizer, and a first photodetector that detects a fluorescent beam diverged from the phosphor. According to the present invention, a high-efficiency and high-quality optical scanning holography for a phosphor or a transmitter may be implemented.

HOLOGRAPHIC IMAGE RECORDING AND RECONSTRUCTING METHOD
20170003652 · 2017-01-05 · ·

A holographic image recording method is disclosed, that is realized through utilizing a holographic image fetching and recording device, including the following steps: using an image fetching device to fetch an image of a target object placed on a rotation table rotating at a fixed speed, the image thus obtained is transmitted to a display panel through a connection line; using a light emitting unit to emit coherent light to a first reflector; that reflects the coherent light to light splitter; and the light splitter splits the coherent light along a first light path and a second light path into an object light and a reference light, and transmits them onto a holographic film to interfere with each other, to form a holographic image. A holographic image reconstructing method is also disclosed, to reconstruct and form a 3D holographic image floating above the holographic film.

Optical scanning holography system
12422778 · 2025-09-23 · ·

An optical scanning holography system includes a polarization-sensitive lens configured to receive a linearly polarized beam and generate a first spherical wave of right-handed circular polarized light having a negative focal length and a second spherical wave of left-handed circular polarized light having a positive focal length, a first polarizer configured to pass only a beam component therethrough in a predetermined polarization direction among components of the generated first and second spherical waves, a scanning unit configured to scan an object by using an interference beam generated between the first and second spherical waves passing through the first polarizer, and a first photodetector configured to detect a beam reflected from the object.

SENSOR MODULE, ILLUMINATOR, METROLOGY DEVICE AND ASSOCIATED METROLOGY METHOD

A sensor module is disclosed for a metrology apparatus. The sensor module comprises an illumination device for illuminating a structure on a substrate, said illumination device comprising at least a first set of illuminators and a second set of illuminators, wherein said first set of illuminators comprise one or more illuminators which are each operable to illuminate said structure with first illumination comprising a first optical characteristic and wherein said second set of illuminators comprise one or more illuminators which are each operable to illuminate said structure with second illumination comprising a second optical characteristic different to said first optical characteristic; an optical system being operable to capture scattered radiation scattered by the structure resultant from the structure being illuminated; and a detector operable to detect the scattered radiation.

Stimulus-responsive dynamic meta-holographic device

This disclosure relates to a stimulus-responsive dynamic meta-holographic device. According to an aspect of the disclosure, a stimulus-responsive dynamic meta-holographic device can be provided, which includes a metasurface in which a plurality of nanostructures are provided; wherein in the metasurface is provided a liquid crystal layer comprising a plurality of cells that may be altered in arrangements by outer stimulus, wherein the liquid crystal layer, is configured to alter the polarization state of the transmitted beam penetrating the liquid crystal layer as the arrangements of the cells are altered by outer stimulus.