An evaluation apparatus includes a storage unit that stores a model modeling a state of a facility provided in a plant, a simulator that adjusts a parameter that is set in the model so that a difference between an actual measurement value based on a process value of the facility in a first state and a first simulate value calculated by using the model is equal to or less than a threshold, and an estimation unit that estimates a first estimated operating point that indicates an operation state of the facility in the first state based on the adjusted parameter.

A metrology method for use in determining one or more parameters of a patterned structure, the method including providing raw measured TEM image data, TEM.sub.meas, data indicative of a TEM measurement mode, and predetermined simulated TEM image data including data indicative of one or more simulated TEM images of a structure similar to the patterned structure under measurements and a simulated weight map including weights assigned to different regions in the simulated TEM image corresponding to different features of the patterned structure, performing a fitting procedure between the raw measured TEM image data and the predetermined simulated TEM image data and determining one or more parameters of the structure from the simulated TEM image data corresponding to a best fit condition.

A system and method for real world autonomous vehicle trajectory simulation may include: receiving training data from a data collection system; obtaining ground truth data corresponding to the training data; performing a training phase to train a plurality of trajectory prediction models; and performing a simulation or operational phase to generate a vicinal scenario for each simulated vehicle in an iteration of a simulation. Vicinal scenarios may correspond to different locations, traffic patterns, or environmental conditions being simulated. Vehicle intention data corresponding to a data representation of various types of simulated vehicle or driver intentions.

Example embodiments allow for networks of hybrid controllers that can be computed efficiently and that can adapt to changes in the system(s) under control. Such a network includes at least one hybrid controller that includes a dynamic sub-controller and a learned system sub-controller. Information about the ongoing performance of the system under control is provided to both the hybrid controller and to an over-controller, which provides one or more control inputs to the hybrid controller in order to modify the ongoing operation of the hybrid controller. These inputs can include the set-point of the hybrid controller, one or more parameters of the dynamic controller, and an update rate or other parameter of the learned system controller. The over-controller can control multiple hybrid controllers (e.g., controlling respective sub-systems of an overall system) and can, itself, be a hybrid controller.

A system and method of simulating and optimizing industrial and other processes includes a computer that performs multivariate analysis of input variables and output variables to generate a data model of the operation of the process. For industrial applications, the input variables include process variables and the output variables include result variables from the operation of the industrial process. The data model determines contributions to changes in the output or result variables by the respective input or process variables and is provided to a predictive algorithm to identify parameter values for input or process variables expected to have a most significant impact on the output or result variables during performance of the process. The outputs of the predictive algorithm are parameter values that are provided as input or process variables to the industrial process for simulation or performance optimization or product recommendations/optimizations.

A setting method according to the present invention determines a desired time response in an optimum servo control structure corresponding to a servo control structure of a control target, calculates a predetermined gain corresponding to the desired time response, and calculates a first weighting coefficient Qf, a second weighting coefficient Q, and a third weighting coefficient R of a predetermined Riccati equation according to the Riccati equation on the basis of the predetermined gain. The first weighting coefficient Qf, the second weighting coefficient Q, and the third weighting coefficient R are set as a weighting coefficient corresponding to a terminal cost, a weighting coefficient corresponding to a state quantity cost, and a weighting coefficient corresponding to a control input cost, respectively, in a predetermined evaluation function for model prediction control.

A prediction method includes: acquiring time-series data of sets of a control input um and a control output ym as a sample of a control input u and a control output y; calculating, based on the time-series data, a value ρ* that minimizes a value of an evaluation function J(ρ,θ,um,ym) in a state where a parameter θ is set to a fixed value θ0, calculating a value θ* that minimizes the evaluation function J(ρ,θ,um,ym) in a state where a parameter ρ is set to the value ρ*; and calculating a prediction value up of the control input u and a prediction value yp of the control output y corresponding to a desired value r, based on a transfer function C(ρ*) in which the parameter ρ is set to the value ρ* and on a target response transfer function Td(θ*) in which the parameter θ is set to the value θ*.

A control system comprises a memory storing a sequence of sensor data received from one or more sensors. The control system has a processor which processes the sensor data to compute a sequence of derived sensor data values. An autoencoder receives the sequence of derived sensor data values and computes a forward prediction of the sequence of derived sensor data values, the autoencoder having been trained imposing a relationship on positions of the derived sensor data values encoded in a latent space of the autoencoder. A processor initiates control of an apparatus using the forward prediction.

Systems and methods presented herein provide for multivariable model predictive control of a multistep plant. In one embodiment, a model predictive controller (MPC) includes a model of the multistep plant. The MPC is operable to linearize at least two steps of the multistep plant into cycle steps based on the model, to process an output signal from the multistep plant, and to independently control the cycle steps based on the output signal to optimize an output of the multistep plant.

The present disclosure provides system, methods, and computer program products for predicting and detecting anomalies in a subsystem of a system. An example method may comprise (a) determining a first plurality of tags that are indicative of an operational performance of the subsystem. The tags can be obtained from (i) a plurality of sensors in the subsystem and (ii) a plurality of sensors in the system that are not in the subsystem. The method may further comprise (b) processing measured values of the first plurality of tags using an autoencoder trained on historical values of the first plurality of tags to generate estimated values of the first plurality of tags; (c) determining whether a difference between the measured values and estimated values meets a threshold; and (d) transmitting an alert that indicates that the subsystem is predicted to experience an anomaly if the difference meets the threshold.