A method for monitoring a process variation index includes operations of: obtaining a target parameter to be monitored and a reference parameter used to increase goodness of fit among structural parameters predicted by measuring a structure in a specific location of a wafer; obtaining a reference parameter set in a reference model; and calculating a process variation index capable of confirming a structural change of the structure according to a change in process conditions using the structural parameter and the reference parameter.

A method for monitoring a process variation index includes operations of: obtaining a target parameter to be monitored and a reference parameter used to increase goodness of fit among structural parameters predicted by measuring a structure in a specific location of a wafer; obtaining a reference parameter set in a reference model; and calculating a process variation index capable of confirming a structural change of the structure according to a change in process conditions using the structural parameter and the reference parameter.

Embodiments provide measurement systems having a coordinate measuring machine, a workpiece storage apparatus, and a robot for delivering workpieces from the workpiece storage apparatus to the coordinate measuring machine, and methods for orienting and operating such systems. Illustrative embodiments employ a reference geometry tool on the robotic arm, and kinematic locators on the coordinate measuring machine and/or on the workpiece storage apparatus to define a coordinate system common to the coordinate measuring machine, the workpiece storage apparatus, and the robot.

Embodiments provide measurement systems having a coordinate measuring machine, a workpiece storage apparatus, and a robot for delivering workpieces from the workpiece storage apparatus to the coordinate measuring machine, and methods for orienting and operating such systems. Illustrative embodiments employ a reference geometry tool on the robotic arm, and kinematic locators on the coordinate measuring machine and/or on the workpiece storage apparatus to define a coordinate system common to the coordinate measuring machine, the workpiece storage apparatus, and the robot.

A system is provided for programming workpiece feature inspection operations for a coordinate measuring machine (CMM), including a user interface that comprises a workpiece inspection program simulation portion configurable to display a 3-D view of a workpiece; an editing user interface portion comprising an editable plan representation of a current workpiece feature inspection plan for the workpiece; and an editable alignment program plan representation for the workpiece. The system is configured with the editable alignment program plan representation being automatically responsive to editing operations, regardless of whether the editing operations are performed in the 3-D view or the editable plan representation. The editing operations include deleting or adding at least one workpiece feature to or from the editable alignment program plan representation.

A system is provided for programming workpiece feature inspection operations for a coordinate measuring machine (CMM), including a user interface that comprises a workpiece inspection program simulation portion configurable to display a 3-D view of a workpiece; an editing user interface portion comprising an editable plan representation of a current workpiece feature inspection plan for the workpiece; and an editable alignment program plan representation for the workpiece. The system is configured with the editable alignment program plan representation being automatically responsive to editing operations, regardless of whether the editing operations are performed in the 3-D view or the editable plan representation. The editing operations include deleting or adding at least one workpiece feature to or from the editable alignment program plan representation.

An apparatus, method, and non-transitory machine-readable medium provide for 360° assistance for a QCS scanner with mixed reality (MR) and machine learning technology. The apparatus includes an optical sensor, a display, a Chatbot, cloud service, and a processor operably connected to the optical sensor and the display. The processor receives diagnostic information from a server related to a field device in an industrial process control and automation system; identifies an issue of the field device based on the diagnostic information; detects, using the optical sensor, the field device corresponding to the identified issue; guides, using the display, a user to a location and a scanner part of the field device that is related to the issue; provides, using the display, necessary steps or actions to resolve the issue; and connects, using a cloud server, a user to get modules of installation, commissioning, annual maintenance (AMC) and training for a quality control system (QCS) as per the selected persona.

An apparatus, method, and non-transitory machine-readable medium provide for 360° assistance for a QCS scanner with mixed reality (MR) and machine learning technology. The apparatus includes an optical sensor, a display, a Chatbot, cloud service, and a processor operably connected to the optical sensor and the display. The processor receives diagnostic information from a server related to a field device in an industrial process control and automation system; identifies an issue of the field device based on the diagnostic information; detects, using the optical sensor, the field device corresponding to the identified issue; guides, using the display, a user to a location and a scanner part of the field device that is related to the issue; provides, using the display, necessary steps or actions to resolve the issue; and connects, using a cloud server, a user to get modules of installation, commissioning, annual maintenance (AMC) and training for a quality control system (QCS) as per the selected persona.

The present invention discloses an in-place non-contact detection method for a shaft workpiece. The method includes: establishing a detection system, calibrating the detection system and establishing a detection coordinate system; analyzing a pose of a workpiece in the detection system to establish a coordinate system of a workpiece clamping device; controlling the workpiece clamping device of a shaft workpiece processing machine tool to rotate, continuously acquiring data by a linear laser measuring instrument, and calculating and analyzing the acquired data to obtain an ideal reference axis of the shaft workpiece; continuously acquiring data of a detection part, and calculating and analyzing the acquired data to obtain actual machining precision of runout of a shaft neck of a camshaft; and continuously acquiring data of the detection part, and calculating and analyzing the acquired data to obtain machining precision of coaxiality of the shaft workpiece.

A method for machining and measuring workpieces includes: machining a workpiece by a gear cutting process, wherein a tooth flank of the workpiece is produced or machined; measuring an actual geometry of the tooth flank produced by the gear cutting process by a measuring process; determining a deviation of the actual geometry from a predetermined nominal geometry of the tooth flank; determining a corrected gear cutting process for at least partially reducing the deviation; and machining the workpiece and/or a further workpiece by the corrected gear cutting process. The determination of the corrected gear cutting process for at least partial reduction of the deviation has the specification that a distinction is made between first and second evaluation areas of the tooth flank, wherein first and second permissible deviations of the actual geometry from the nominal geometry is specified for the evaluation areas of the tooth flank, respectively.