A method and apparatus for within-wafer profile localized tuning is disclosed. In one aspect, the method includes providing a wafer attached to a rotating vacuum stage front side up, the wafer including a surface film with an incoming film thickness profile, providing a pad attached to a rotating head front side down, the head configured to sweep along a path, computing a film thickness removal amount based upon the incoming film thickness profile, and removing at least a portion of the surface film of the wafer based on the computed film thickness removal amount via a plurality of steps.

Provided is a technique which performs an RF initialization setting process using a data input/output terminal in an unmanned transporting device without providing a separate terminal to build an RF communication based automated material handling system while minimizing a structural change of an optical communication based unmanned transporting device which has been already provided.

Methods and systems for customizing hides are provided. In particular, one or more embodiments comprise a tanning control system that improves profitability and customer satisfaction by facilitating the customization of hides according to customer orders. Furthermore, one or more embodiments enable the tanning control system to improve efficiency and responsiveness by producing packages of hides that exactly match customer orders. Additionally, one or more embodiments enhance the traceability of hides by capturing data related to the customization of hides.

Implementations described herein generally relate to a method for detecting anomalies in time-series traces received from sensors of manufacturing tools. A server feeds a set of training time-series traces to a neural network configured to derive a model of the training time-series traces that minimizes reconstruction error of the training time-series traces. The server extracts a set of input time-series traces from one or more sensors associated with one or more manufacturing tools configured to produce a silicon substrate. The server feeds the set of input time-series traces to the trained neural network to produce a set of output time series traces reconstructed based on the model. The server calculates a mean square error between a first input time series trace of the set of input time series traces and a corresponding first output time series trace of the set of output time-series traces. The server declares the sensor corresponding to the first input time-series trace as having an anomaly when the mean square error exceeds a pre-determined value.

A mover is configured to be electromagnetically propelled along a track in a linear motor track system with a force that is calculated to include compensation for gravity. A multi-axis accelerometer arranged in each segment of the track can detect an orientation or angle of the track segment for determining gravity with respect to the particular section. As a result, if the track is at an incline, such as a ramp, a desired force for moving a mover along the track can be compensated to include gravity due to the incline for achieving a desired motion result. In addition, the detected orientation of the track can be compared to an expected orientation stored by a control program to avoid a loss of performance due to physical changes in the track not matching an expected/programmed configuration of the track.

Integrated software systems and methods that can control the design, emulation, testing and production activities of a conveyor based system. In embodiments, the control system implements an object-oriented like environment into a PLC (Programmable Logic Controller) system and uses its software to define and control the operation of the PLC dynamically from a computer. In other embodiments, a hot backup method allows the conveyor system to continue to function on failure of one or more PLCs.

The present invention provides an automated modular system and method for production of biopolymers including DNA and RNA. The system and method automates the complete production process for biopolymers. Modular equipment is provided for performing production steps with the individual modules arrange in a linear array. Each module includes a control system and can be rack mounted. One side of the array of modules provides connections for power, gas, vacuum and reagents and is accessible to technicians. On the other side of the array of modules a robotic transport system is provided for transporting materials between module interfaces. The elimination of the requirement for human intervention at multiple steps in the production process significantly decreases the costs of biopolymer production and reduces unnecessary complexity and sources of quality variation.

In a method for setting a mounting position of a target substrate, the test substrate is transferred to a second position deviated from a first position. A mask has expected arrangement position where a non-film formation region has a preset width when the target substrate is mounted at the first position and subjected to a film formation. The film is formed on the test substrate at the second position by using the mask. Width of the non-film formation region formed on the test substrate after the film formation is measured. Actual arrangement position of the mask is specified based on a direction and a distance of the deviation of the second position from the first position and the measured width of the non-film formation region. The first position is corrected such that the non-film formation region has the preset width based on the actual arrangement position of the mask.

A method for controlling a variable production line using a skid-type variable workbench and an apparatus for the same. According to the method, a process group including multiple variable workbenches may be organized based on a design, each of the multiple variable workbenches may be mounted on an upper part of a skid board, the skid board may be loaded on a powered line that moves at a regular speed in a fixed direction, the skid board may be moved in consideration of a position of a worker responsible for each process and a work state of the process group, and movement of a target variable workbench may be stopped by removing a skid board, on which the target variable workbench corresponding to an unload instruction in the process group is mounted, from the powered line when the unload instruction is input by a worker.

A stacker crane includes a transporter, a slide fork, first to third sensors, a counter, and a main controller. The transporter moves from a shelf on which an article is supported to an empty shelf. The slide fork is mounted on the lift stage and transfers the article to and from the shelf. The first, second and third sensors recognize an abnormality of the article moved by the movement of the transporter. The counter counts the number of event occurrences. When an abnormality is recognized by the sensor, the main controller reduces a moving speed of the transporter, and when no abnormality is recognized by the sensor upon reduction in the moving speed, the movement of the transporter is continued. When the number of event occurrences reaches a first threshold, the stacker crane is brought into an abnormal-stop state.