An access arbitration module includes a plurality of active component communication ports for communicating with a plurality of active components, and includes a passive component communication port for communicating with a passive component. The access arbitration module also includes switching logic defined to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port, such that an authorized one of the plurality of active component communication ports is connected in communication with the passive component communication port at a given time, and such that non-authorized ones of the plurality of active component communication ports are prevented from communication with the passive component communication port at the given time.

A system and method for controlling movement of transporting devices arranged to transport containers stored in stacks arranged in a facility having pathways arranged in a grid-like structure above the stacks, the transporting devices being configured to operate on the grid-like structure. A movement optimisation unit is configured to determine a route of a transporting device from one location on a grid-like structure to another location on the grid-like structure for each transporting device. A reservation unit is configured to reserve a path on the grid-like structure for each transporting device based on the determined route. A clearance unit is configured to provide clearance for each transporting device to traverse a portion of the reserved path.

A workpiece transfer apparatus for a furnace includes a carrier having access to a furnace and carrying a workpiece placed thereon, a controller for controlling movement of the carrier, the controller for determining an amount of deformation of the carrier by heat of the furnace, and the controller for determining an adjustment to the attitude of the carrier on the basis of the amount of deformation of the carrier, wherein when handing over the workpiece for a next process tool, the carrier is moved into an adjusted attitude.

This disclosure relates to a high volume manufacturing system for processing and measuring workpieces in a semiconductor processing sequence without leaving the system's controlled environment (e.g., sub-atmospheric pressure). The systems process chambers are connected to each other via transfer chambers used to move the workpieces, in the controlled environment, between the process chambers. Further, the pass-through chambers may be disposed between the transfer chambers or between the transfer chamber and the process chamber. The pass-through chambers may include a measurement region to measure workpiece attributes when the workpiece is moved through or placed in the pass-through chamber. The transfer chambers may also have separate measurement regions within their internal space to measure other attributes of the workpiece.

A transport system is provided. The transport system includes a stocker configured to store an assigned wafer carrier and having a gate port. The transport system also includes a semiconductor apparatus configured to transmit a request signal comprising a processed time according to a processing wafer carrier loaded on the semiconductor apparatus. The transport system further includes a vehicle configured to transport the assigned wafer carrier from the gate port to the semiconductor apparatus and a control system configured to control the vehicle. When the control system receives the request signal, the control system controls the stocker to transport the assigned wafer carrier inside of the stocker to the gate port at a start time, which is earlier than the processed time, and the control system controls the vehicle to transport the assigned wafer carrier from the gate port to the semiconductor apparatus.

An automated shuttle sorter is disclosed that includes a carriage that is movable from a load position at which the carriage may be loaded, and at least two destination locations into which any contents of the carriage may be provided from the carriage.

A flay assembly for separating a workpiece from a manufacturing fixture has a horizontal beam assembly and a pair of vertical beam assemblies. The horizontal beam assembly includes a horizontal beam having a horizontal drive motor. Each vertical beam assembly includes a vertical beam operably engaged to the horizontal drive motor and has a workpiece attachment assembly operably engaged to a vertical drive motor. The workpiece attachment assembly has an attachment mechanism attachable to the workpiece. The horizontal drive motor and the vertical drive motors are operable in a manner to move the vertical beams away from each other along a horizontal drive axis while simultaneously moving each workpiece attachment assembly along a vertical drive axis to cause the attachment mechanisms to pull the workpiece side portions away from the manufacturing fixture while a center support of the horizontal beam maintains a workpiece crown in contact with the manufacturing fixture.

A substrate processing apparatus includes first processors, second processors, a transfer module and a controller. Each of the first processors is configured to perform a first processing on a substrate. Each of the second processors is configured to perform a second processing on the substrate on which the first processing is performed. The transfer module is configured to transfer the substrate to the first processors and the second processors. The controller is configured to control the first processors, the second processors and the transfer module. The controller controls a start timing for a first transfer processing of transferring the substrates to the first processor such that a timing of a second transfer processing of transferring the substrate having a liquid film formed thereon to the second processor from the first processor and a timing when another substrate is transferred by the transfer module are not overlapped with each other.

A robotic palletizer system and method include selectively operating a palletizing robot between at least a pregrouping state, in which the palletizing robot groups to-be-grouped items at a pregrouping station, and a principal grouping state, in which the palletizing robot groups to-be-grouped items at a principal grouping station. The system and method further include selectively operating a load securing machine between a securing state, in which the load securing machine at least partially secures to be grouped items grouped at the principal grouping station, and a non-operational state. The palletizing robot can be operated in the pregrouping state during at least a portion of a time interval during which the load securing machine is operating in the securing state to secure the to-be-grouped items grouped at the principal grouping station.

There is provided a conveyor assembly for sorting merchandise items. In one form, the conveyor assembly includes: a merchandise identification module; sortation modules each comprising a multi-directional sorting portion with two sets of rollers, a first wing including a third set of rollers, a second wing including a fourth set of rollers, and a controller configured to receive an IP address; a first, disassembled state of the sortation modules; a second, assembled state of the sortation modules; a merchandise database; and a control circuit configured to receive identifying information about an unsorted merchandise item, assign a unique IP address to each sortation module corresponding to the position of the sortation module, determine a sortation destination for the unsorted merchandise item, determine the sortation module corresponding to the sortation destination; and instruct the controller of the corresponding sortation module to divert the unsorted merchandise item to the sortation destination.