A workpiece processing system (1) includes a transfer robot (3), a control device (4) controlling operation of the transfer robot (3), and an operating part (5) performing a teaching operation to the transfer robot (3). The control device (4) has an approach point setter (6) setting in advance an approach point as a reference point for the transfer robot (3) to start operation to a workpiece processing device, a first program generator (7) generating a first program defining the operation of the transfer robot (3) from an operational zero point for the transfer robot (3) to the approach point, a second program generator (8) generating a second program defining the operation of the transfer robot (3) after the approach point based on the teaching operation, and a robot controller (9) controlling the operation of the transfer robot (3) in accordance with the first program and the second program.

A production processing apparatus according to the present technology includes a first robot arm and a plurality of first tilt tables. The first robot arm is capable of conveying a work. On each of the plurality of first tilt tables, the work conveyed by the first robot arm can be mounted. The plurality of first tilt tables are tilted a predetermined angle from a horizontal surface at positions on a circumference of a circle with the first robot arm being a center, and the work is subjected to production processing in a state where the work is mounted on one of the plurality of first tilt tables.

Payload properties may be determined utilizing actuator parameter data. A mobile drive unit may transport a payload around a workspace in accordance with one or more safety. To comply with safety policies, a motion controller of the mobile drive unit may limit acceleration and deceleration to safe maximums for given payload characteristics such as payload mass and payload center of gravity. The motion controller may utilize actuators to cause various motions of the mobile drive unit, including motion across a surface, vertical movements of the payload and motion rotating the payload. To ameliorate worst case assumptions about payload characteristics, in accordance with at least one embodiment of the invention, a payload characterization module may obtain information about payload characteristics based on measurements of operational parameters of the actuators. Utilizing motor current data provides a relatively inexpensive mechanism for obtaining such information compared to special purpose sensors, enabling widespread adoption.

A data communication method for reducing a working time of an automated material handling system between a master communication device installed in an unmanned transfer device and a slave communication device installed in a manufacturing facility in the automated material handling system which transfers a carrier between manufacturing facilities through the unmanned transfer device where the method is to reduce a working time for a carrier by transmitting and receiving data to and from a manufacturing facility while an unmanned transfer device is stopped before performing a carrier work or while it is moving after performing a carrier work, when the unmanned transfer device and the manufacturing facility transmit and receive data for transferring the carrier by using a wireless data communicating device in an automated material handling system.

A transport system comprising linear motor modules utilized both straight and curved track modules, with movers displaced on the track modules by control of power applied to coils of the modules. Curved track modules have modified spline geometries to provide desired acceleration and jerk characteristics. The modified spline geometries may be defined by more than one generators, such as an equation generator and a spline fit between the equation-generated segment and one or more constrained points or locations. The curved track modules may be divided into 180 degree modules, or may be reduced to 90 degree, 45 degree or other fractional arcs to provide for modular assembly, mirror-image geometries and motion profiles, and the like. The system may be adapted to provide improved motion characteristics based on modification of a conventional spline geometry.

A substrate processing apparatus includes: a stage configured to place thereon a substrate or at least a portion of a substrate holding member configured to hold the substrate, the substrate having two sides extending in a first direction and two sides extending in a second direction; a transporter configured to transport the substrate to a position facing the stage; first and second sensors, which are fixed relative to the stage and respectively located outside the sides, extending in the second direction, of the substrate at the position facing the stage so as to detect the sides of the substrate, respectively; and third and fourth sensors, which are fixed relative to the stage and respectively located outside the sides, extending in the first direction, of the substrate at the position facing the stage so as to detect the sides of the substrate, respectively.

A transport system comprising linear motor modules utilized both straight and curved track modules, with movers displaced on the track modules by control of power applied to coils of the modules. Curved track modules have modified spline geometries to provide desired acceleration and jerk characteristics. The modified spline geometries may be defined by more than one generators, such as an equation generator and a spline fit between the equation-generated segment and one or more constrained points or locations. The curved track modules may be divided into 180 degree modules, or may be reduced to 90 degree, 45 degree or other fractional arcs to provide for modular assembly, mirror-image geometries and motion profiles, and the like. The system may be adapted to provide improved motion characteristics based on modification of a conventional spline geometry.

The roller-to-roller conveyance control apparatus includes an amplitude target setting unit that sets an amplitude target value of the tension deviation; an adjustment execution command generation unit that provides a command to adjust the control gain; an adjustment manipulated-variable output unit that outputs an adjustment manipulated variable; a manipulated-variable amplitude determination unit that increases the amplitude of the adjustment manipulated variable until the amplitude of the tension deviation becomes larger than the amplitude target value; and a control-gain calculation device that calculates the control gain from the amplitude and the vibration period of the tension deviation. A tension-shaft speed controller controls a tension-control-shaft motor on the basis of the line speed reference and the adjustment manipulated variable during the adjustment of the control gain.

A method for fault detection in a fabrication facility is provided. The method includes moving a wafer carrier using a transportation apparatus. The method further includes measuring an environmental condition within the wafer carrier or around the wafer carrier using a metrology tool positioned on the wafer carrier during the movement of the wafer carrier. The method also includes issuing a warning when the detected environmental condition is outside a range of acceptable values.

Systems, methods, and machine-executable coded instruction sets are disclosed for fully- and/or partly automated handling of goods. The disclosure provides improvements in the storage and retrieval of storage and delivery containers in order processing systems.