The device includes a master module and a slave module. The master module includes a control unit for controlling overall operation of the master module, a power unit electrically for storing electricity to supply the master module, an electricity transmission unit for receiving electricity from the power unit and wirelessly transmitting the electricity; and a communication unit for communicating of the master module. The slave module is electrically connected to the master module and includes a control subunit for controlling overall operation of the slave module, a communication subunit for wirelessly communicating with the communication unit, an electricity reception unit for wirelessly receiving the electricity from the power unit of the master module, a storage unit for storing electricity from the electricity reception unit and supplying power to each unit of the slave module, and an electricity transmission subunit for wirelessly outward transmitting electricity of the storage unit.

An optical measurement device configured for connection to an industrial network, the industrial network functioning to synchronize time between a master device and a slave device, the optical measurement device includes: an interface module configured to receive a synchronization signal transmitted on the industrial network from the master device within a fixed communication cycle; and a measurement unit configured to perform optical measurements in a measurement cycle. The measurement unit synchronizes when a measurement is taken with the communication cycle in accordance with the synchronization signal received by the interface module.

A method for integrating a further bus subscriber into a bus system, and a bus system, having a master module and subscribers disposed in series, includes the temporally consecutive method steps: in a first method step, the further bus subscriber transmits a data packet to the master module in order to log in to the master module, in a second method step, a bus subscriber disposed between the further bus subscriber and the master module stops the data packet and checks whether the bus system has already received a release, in a third method step, the first bus subscriber forwards the data packet to the master module if the bus system has not yet received a release, or in a third, in particular an alternative, method step, if the bus system has already received a release, the bus subscriber stores the data packet and waits until the release of the bus system is revoked and after the release has been revoked, forwards the stored data packet to the master module.

A configuration of a control device capable of efficiently operating multiple types of programs in different execution formats on a single control device is provided. At least a first task that has a first priority including processing execution performed by a program execution part and a command calculation part, a second task that has a second priority, lower than the first priority, including processing execution performed by a parsing part, and a third task that has a third priority including execution of a processing content different from the first task and the second task are set in a scheduler. The control device further includes a priority changing part monitoring a processing state of the parsing part, and when the processing state of the parsing part meets a predetermined condition, changing the second priority set to the second task corresponding to the condition.

A programmable logic controller includes a state monitoring unit to monitor a state of another programmable logic controller that is a counterpart in the duplication, and a system switching control unit to transmit, to a slave device, status information including information indicating whether the programmable logic controller is a control system or a standby system, to receive the control data that is addressed to the programmable logic controller that is the control system and is transmitted from the slave device in a case where the programmable logic controller is the control system, and to switch the programmable logic controller to the control system when hindrance in the another programmable logic controller is detected in a case where the programmable logic controller is the standby system.

{Problem}

In combining the master valve and the groups of slave valves, the configuration of the combination is made not for performing simply a uniform control, but is made to be such a form as capable of corresponding to the size and the inside configuration of the processing apparatus, or customer's requirements, which thereby allows a prompt adaptation to variety of demands.

{Solution to Problem}

In combining the master controller and the slave controller, the operation mode is set, and it is made possible to transmit the generated valve opening degree common signal and the generated valve opening degree individual signal from the master controller, corresponding to the operation mode, to the slave controllers that are connected in the sequential daisy-chain style, thereby the slave valves are opening-degree-controlled by any of such generated valve opening degree signals.

A control system, includes a master control device configured to control a first controlled object based on time information output from a first clock unit, and a slave control device connected to the master control device via a network and configured to control a second controlled object different from the first controlled object based on control information transmitted from the master control device and time information output from a second clock unit. The time information of the first clock unit and the time information of the second clock unit are time-synchronized.

The present disclosure is possible to increase types of executable work. In a slave device, normal connection support and Fast Connect support can be preset by user.

Systems and methods for synchronizing execution of recipe sets are described. One of the methods includes sending by a command controller to a master controller a recipe set and sending by the master controller the recipe set for execution by a sub-system controller of a plasma system. The operation of sending the recipe set from the master controller to the sub-controller is performed during a first clock cycle of a clock signal. The method includes generating by the command controller a recipe event signal and sending by the command controller to the sub-system controller the recipe event signal indicating a time of execution of the recipe set by the sub-system controller. The time of execution occurs during a second clock cycle that follows the first clock cycle. The second cycle is of the clock signal.

A device includes a master device, a set of slave devices and a bus. The master device is configured to transmit first messages carrying a set of operation data message portions indicative of operations for implementation by slave devices of the set of slave devices, and second messages addressed to slave devices in the set of slave devices. The second messages convey identifiers identifying respective ones of the slave devices to which the second messages are addressed requesting respective reactions towards the master device within respective expected reaction intervals. The slave devices are configured to receive the first messages transmitted from the master device, read respective operation data message portions in the set of operation data message portions, implement respective operations as a function of the respective operation data message portions read, and receive the second messages transmitted from the master device.