Patent classifications
G
G05
G05B
2219/00
G05B2219/30
G05B2219/31
G05B2219/31459
G05B2219/31459
ON-BOARD METROLOGY (OBM) DESIGN AND IMPLICATION IN PROCESS TOOL
20170148654
·
2017-05-25
·
Implementations of the present disclosure generally relate to an improved factory interface that is coupled to an on-board metrology housing configured for measuring film properties of a substrate. In one implementation, an apparatus comprises a factory interface, and a metrology housing removably coupled to the factory interface through a load port, the metrology housing comprises an on-board metrology assembly for measuring properties of a substrate to be transferred into the metrology housing.