A process control method is provided for performing a deposition process on a plurality of wafers of a batch. The process control method includes: deciding a placement location of the wafers of the batch according to the history information of a tool and the product information of the batch; calculating a target value of each placement location according to the placement location of the wafers of the batch and the history information of the tool; calculating a process parameter according to the history information of the tool, the product information of the batch, and the target value of each placement location; and performing a deposition process according to the placement location of the wafers of the batch and the process parameter.

Systems and methods described herein use context-adaptive resolution to achieve lossless transfer of critical industrial control system data. Bandwidth and storage optimization is achieved for time-series data generated or collected by an industrial control system and transmitted through a network to a remote historian system. The control system may be implemented through one or more embedded historians and local historians. The control system continuously processes input data, computes output variables, and generates an event trigger when a set of variables meet pre-defined set of conditions. When there are no active event triggers, the control system publishes time-series data for a pre-defined set of variables at a lower resolution to conserve bandwidth and storage. When an event trigger is activated, the control system publishes recent and current time-series data for a subset of the variables to subscribers at a higher resolution.

A data processing device includes: a collector that collects setting values in operating elements that control a production process for a product at prescribed intervals and collects brand information indicating a brand of the product; a first processor that performs a statistical process for the setting values, obtains representative values for the setting values as operation performance values while the product of the brand indicated in the brand information is being produced, and generates a performance value database; a second processor that performs a statistical process for operation performance values associated with brand information indicating a next brand to be produced in the production process among the operation performance values included in the performance value database, and obtains optimal setting values in the operating elements for producing the product of the next brand; and an outputter that outputs the obtained setting values.