A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.

A computer-implemented system and method for part surface manufacturing quality control are provided. A specification for manufacturing a part surface is maintained in a storage, the specification comprising a target value for a profile characteristic of the surface. Measurements of the profile characteristic of the surface produced during multiple manufacturing runs are maintained in the storage, wherein the surface produced during each of the manufacturing runs is associated with two or more of the measurements made at different points of the surface. A score for each of the measurements is calculated based on how the close that measurement is to the target value. For the surface produced during one or more of the manufacturing runs, the scores for at least some of the measurements made for that surface during that manufacturing run are displayed.

A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.

A vision-based product inspection system captures multiple images of each of multiple individual instances of a product as each instance passes through various phases of a production process. The system includes multiple cameras with each camera situated at a known location along a moving conveyor, conveyor belt, production line, or assembly line that moves instances of the product through various phases of the production process. Each camera can be associated with a known location along the conveyor and each image can be associated with a value representing the position of the conveyor as it moves product. Based on each camera's location and the values representing the conveyor's position, a sequence of images can be accumulated representing the progression of any single instance of a product as it moves through the production process. Automated quality control inspection can be performed by comparing or analyzing images in the sequence.

A computer-implemented system and method for attribute-based manufacturing quality control is provided. A specification for manufacturing a part feature is maintained in a database, the specification including a nominal. Also maintained in the database are one or more measurements for the feature on a plurality of parts manufactured in accordance with the specification, each of the measurements associated with one or more attributes, each of the attributes identifying at least one of a circumstance relating to how that measurement was made and how the feature was manufactured. A user selection of one or more of the attributes is received. Each of the measurements that is associated with all of the selected attributes is identified. A score indicative of how close the identified measurements are to the nominal is calculated and displayed.

A vision-based product inspection system captures multiple images of each of multiple individual instances of a product as each instance passes through various phases of a production process. The system includes multiple cameras with each camera situated at a known location along a moving conveyor, conveyor belt, production line, or assembly line that moves instances of the product through various phases of the production process. Each camera can be associated with a known location along the conveyor and each image can be associated with a value representing the position of the conveyor as it moves product. Based on each camera's location and the values representing the conveyor's position, a sequence of images can be accumulated representing the progression of any single instance of a product as it moves through the production process. Automated quality control inspection can be performed by comparing or analyzing images in the sequence.

A method for manufacturing a plurality of components, each of the plurality of components including at least one electrical feedthrough, in which a functional element is fastened in a feedthrough opening in a base body by way of an electrically insulating material, an information being acquired in association with each of the plurality of components, the method comprising the steps of: providing, in one of a plurality of manufacturing steps of the method, each of the plurality of components or one of a plurality of pre-stages of each of the plurality of components with an information store, at least one of (i) the information being stored in the information store, and (ii) an identifier is stored in the information store and the information is stored in a database in association with the identifier.