Provided is a management system for performing quality management on production equipment. A management system that includes: an acquisition component that acquires status information for production equipment that is subject to management; a detection component that, on the basis of the acquired status information, detects the occurrence of some event; and a display component that displays, separated according to inclusion in the four perspectives Machine, Man, Material, and Method, a plurality of factors that could be presumed to have caused the detected event in a manner in which the contents thereof and a probability of having caused the event can be compared.

The subject matter of this specification can be implemented in, among other things, a method, system, and/or device to receive current metrology data for an operation on a current sample in a fabrication process. The metrology data includes a current value for a parameter at each of one or more locations on the current sample. The method further includes determining a current rate of change of the parameter value for each of the one or more locations. The current rate of change is associated with the current sample. The method further includes identifying one or more violating locations each having an associated current rate of change of the parameter value that is greater than an associated reference rate of change of the parameter value, and identifying an instance of abnormality of the fabrication process based on the one or more violating locations.

A real time monitoring system and a method thereof of an optical film manufacturing process are provided. The real time monitoring system includes a plurality of production systems and a cloud big data platform which connects to the plurality of production systems. The process data of the production line is collected by as production line data collector of the production system. The process data is uploaded to a database of the cloud big data platform. The historical process data across the plurality of production systems can be combined as a process waveform feature by a profile database. A processor connects to the database and the profile database. The differences between the process data and the process waveform feature are compared in real time. When the difference value exceeds a threshold value, an abnormal message is sent to the corresponding production line.