In a method of predicting an optimal process condition model for a semiconductor fabrication process, process parameter information of a unit process in the semiconductor fabrication process may be collected. First characteristics information of objects to be processed before the unit process and second characteristic information of processed objects after the unit process may be extracted. Process global uniformity (PGU) may be calculated using the first characteristic information and the second characteristic information. A data set of the unit process may be created using the process parameter information and the PGU. A virtual process environment function of the unit process may be created using the data set. The optimal process condition model of the unit process may be created using the virtual process environment function.

Embodiments of the present disclosure provide a method of fast optimization and compensation for volumetric positioning errors of rotary axes of a five-axis CNC system machine tool. The method comprises: establishing a volumetric positioning error model; forming an error database containing 12 geometrical error vectors; constructing a volumetric positioning error compensation table; establishing a compensation value optimization model; completing an iterative optimization of compensation values of volumetric positioning errors; generating a volumetric positioning error compensation file for a CNC system to complete compensation for the volumetric positioning errors; and updating the error database, detecting linkage trajectories of the rotary axes, and setting a linkage trajectory positioning error threshold, and guaranteeing accuracy by iteratively implementing detection, optimization, and compensation.

In accordance with aspects of the disclosure, systems and methods are provided for managing production resources including scheduling production events for production resources used to manufacture products relative to time intervals while maintaining collaboration among the production resources. The systems and methods may include retrieving information related to each production resource, evaluating each production event for each product to determine a sequence of the production events, and generating potential production scheduling schemes for use of each production resource within the time intervals while maintaining collaboration among the production resources. The systems and methods may include generating a production schedule for the production events within the time intervals based on the potential production scheduling schemes for use of each production resource within the time intervals while maintaining collaboration among the production resources.

A set of original model candidates are first grouped into pairs of original model candidates. A pair of child model candidates is generated for each of the pairs of original model candidates by performing mutation, crossover, or both on the each of the pairs of original model candidates. From the original model candidates and the child model candidates, a set of new model candidates are derived, which includes pairing, based on a similarity function, each child model candidate with one of the corresponding original model candidates; selecting one or both of the model candidates in each of the parent-child pairs based on the similarity function and an objective function as new model candidates; and performing niche clearing to keep a number of the new model candidates in each of niches from exceeding a maximum number. The grouping, generating and deriving operations are then iterated.

Method for manufacturing a workpiece with a predefined sequence of machine tools by a computer-controlled manufacturing machine with an optimal tool configuration, wherein the initial locations of the tools are allocated, first and second time transfer time functions are calculated for all tools, possible tool location sequences are generated, for possible tool location sequences a respective first cost factor is calculated, obtained tool location sequences are ranked in accordance with the respective first cost factor, the tools are transferred from their initial locations to the optimal locations in accordance with an optimal tool configuration, and the workpiece is manufactured with the optimal tool configuration by the manufacturing machine.